JPS6149248B2 - - Google Patents
Info
- Publication number
- JPS6149248B2 JPS6149248B2 JP54043234A JP4323479A JPS6149248B2 JP S6149248 B2 JPS6149248 B2 JP S6149248B2 JP 54043234 A JP54043234 A JP 54043234A JP 4323479 A JP4323479 A JP 4323479A JP S6149248 B2 JPS6149248 B2 JP S6149248B2
- Authority
- JP
- Japan
- Prior art keywords
- boron
- substrate
- alloy
- layer
- structural material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4323479A JPS55136119A (en) | 1979-04-09 | 1979-04-09 | Manufacture of boron structural material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4323479A JPS55136119A (en) | 1979-04-09 | 1979-04-09 | Manufacture of boron structural material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55136119A JPS55136119A (en) | 1980-10-23 |
| JPS6149248B2 true JPS6149248B2 (enExample) | 1986-10-28 |
Family
ID=12658210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4323479A Granted JPS55136119A (en) | 1979-04-09 | 1979-04-09 | Manufacture of boron structural material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55136119A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4856010B2 (ja) * | 2007-06-04 | 2012-01-18 | 株式会社アルバック | 触媒化学気相成長装置 |
| WO2017148067A1 (zh) * | 2016-03-01 | 2017-09-08 | 北京化工大学 | 一种层状非金属材料的制备方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216201A (en) * | 1975-07-29 | 1977-02-07 | Toshiba Corp | Manufacturing method of pick-up cantilever |
-
1979
- 1979-04-09 JP JP4323479A patent/JPS55136119A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55136119A (en) | 1980-10-23 |
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