JPS6138126B2 - - Google Patents
Info
- Publication number
- JPS6138126B2 JPS6138126B2 JP7742480A JP7742480A JPS6138126B2 JP S6138126 B2 JPS6138126 B2 JP S6138126B2 JP 7742480 A JP7742480 A JP 7742480A JP 7742480 A JP7742480 A JP 7742480A JP S6138126 B2 JPS6138126 B2 JP S6138126B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- amorphous silicon
- gas
- fluidized bed
- silane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7742480A JPS573710A (en) | 1980-06-09 | 1980-06-09 | Amophous silicon and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7742480A JPS573710A (en) | 1980-06-09 | 1980-06-09 | Amophous silicon and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS573710A JPS573710A (en) | 1982-01-09 |
| JPS6138126B2 true JPS6138126B2 (enrdf_load_stackoverflow) | 1986-08-27 |
Family
ID=13633584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7742480A Granted JPS573710A (en) | 1980-06-09 | 1980-06-09 | Amophous silicon and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS573710A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2530607B1 (fr) * | 1982-07-26 | 1985-06-28 | Rhone Poulenc Spec Chim | Silicium pur, en poudre dense et son procede de preparation |
| JPS60221311A (ja) * | 1984-04-18 | 1985-11-06 | Mitsubishi Gas Chem Co Inc | 非晶質複合粉末組成物 |
| ES2331824B1 (es) * | 2007-06-18 | 2010-10-22 | Consejo Superior De Investigaciones Cientificas (Csic) | Microcabidades opticas y esponjas fotonicas, procedimiento de producc ion y sus aplicaciones en la fabricacion de dispositivos fotonicos. |
-
1980
- 1980-06-09 JP JP7742480A patent/JPS573710A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS573710A (en) | 1982-01-09 |
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