JPS6136372B2 - - Google Patents

Info

Publication number
JPS6136372B2
JPS6136372B2 JP11249478A JP11249478A JPS6136372B2 JP S6136372 B2 JPS6136372 B2 JP S6136372B2 JP 11249478 A JP11249478 A JP 11249478A JP 11249478 A JP11249478 A JP 11249478A JP S6136372 B2 JPS6136372 B2 JP S6136372B2
Authority
JP
Japan
Prior art keywords
tube
liner
reaction
reaction tube
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11249478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5539630A (en
Inventor
Masaharu Nogami
Tanji Ookawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11249478A priority Critical patent/JPS5539630A/ja
Publication of JPS5539630A publication Critical patent/JPS5539630A/ja
Publication of JPS6136372B2 publication Critical patent/JPS6136372B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP11249478A 1978-09-13 1978-09-13 Vapor phase growth device Granted JPS5539630A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11249478A JPS5539630A (en) 1978-09-13 1978-09-13 Vapor phase growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11249478A JPS5539630A (en) 1978-09-13 1978-09-13 Vapor phase growth device

Publications (2)

Publication Number Publication Date
JPS5539630A JPS5539630A (en) 1980-03-19
JPS6136372B2 true JPS6136372B2 (enrdf_load_stackoverflow) 1986-08-18

Family

ID=14588043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11249478A Granted JPS5539630A (en) 1978-09-13 1978-09-13 Vapor phase growth device

Country Status (1)

Country Link
JP (1) JPS5539630A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106824935A (zh) * 2016-12-08 2017-06-13 尚涛 一种气相色谱玻璃衬管的清洗方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6221005Y2 (enrdf_load_stackoverflow) * 1980-12-19 1987-05-28
JPS58181796A (ja) * 1982-04-19 1983-10-24 Matsushita Electric Ind Co Ltd 結晶成長方法
JPS6167915A (ja) * 1984-09-12 1986-04-08 Hitachi Tokyo Electronics Co Ltd プラズマｃｖｄ装置
JPH04180619A (ja) * 1990-11-15 1992-06-26 Nec Yamagata Ltd 半導体製造用横形反応炉
JP4734950B2 (ja) * 2005-02-17 2011-07-27 株式会社デンソー 熱処理装置
JP2009527877A (ja) 2006-02-23 2009-07-30 シーメンス アクチエンゲゼルシヤフト パワー半導体モジュールの短絡装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106824935A (zh) * 2016-12-08 2017-06-13 尚涛 一种气相色谱玻璃衬管的清洗方法

Also Published As

Publication number Publication date
JPS5539630A (en) 1980-03-19

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