JPS6130025B2 - - Google Patents

Info

Publication number
JPS6130025B2
JPS6130025B2 JP52083853A JP8385377A JPS6130025B2 JP S6130025 B2 JPS6130025 B2 JP S6130025B2 JP 52083853 A JP52083853 A JP 52083853A JP 8385377 A JP8385377 A JP 8385377A JP S6130025 B2 JPS6130025 B2 JP S6130025B2
Authority
JP
Japan
Prior art keywords
mask
metal
masks
vapor deposition
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52083853A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5418671A (en
Inventor
Koshiro Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8385377A priority Critical patent/JPS5418671A/ja
Publication of JPS5418671A publication Critical patent/JPS5418671A/ja
Publication of JPS6130025B2 publication Critical patent/JPS6130025B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP8385377A 1977-07-12 1977-07-12 Vapor deposit method Granted JPS5418671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8385377A JPS5418671A (en) 1977-07-12 1977-07-12 Vapor deposit method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8385377A JPS5418671A (en) 1977-07-12 1977-07-12 Vapor deposit method

Publications (2)

Publication Number Publication Date
JPS5418671A JPS5418671A (en) 1979-02-10
JPS6130025B2 true JPS6130025B2 (2) 1986-07-10

Family

ID=13814243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8385377A Granted JPS5418671A (en) 1977-07-12 1977-07-12 Vapor deposit method

Country Status (1)

Country Link
JP (1) JPS5418671A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005517810A (ja) * 2002-02-14 2005-06-16 スリーエム イノベイティブ プロパティズ カンパニー 回路製造用のインライン堆積法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195701A (ja) * 1985-02-27 1986-08-30 Sumitomo Metal Ind Ltd 縞付形鋼の圧延方法
JP6137041B2 (ja) * 2014-04-28 2017-05-31 トヨタ自動車株式会社 表面に膜を有する部材を製造する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005517810A (ja) * 2002-02-14 2005-06-16 スリーエム イノベイティブ プロパティズ カンパニー 回路製造用のインライン堆積法

Also Published As

Publication number Publication date
JPS5418671A (en) 1979-02-10

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