JPS6129538B2 - - Google Patents
Info
- Publication number
- JPS6129538B2 JPS6129538B2 JP53112065A JP11206578A JPS6129538B2 JP S6129538 B2 JPS6129538 B2 JP S6129538B2 JP 53112065 A JP53112065 A JP 53112065A JP 11206578 A JP11206578 A JP 11206578A JP S6129538 B2 JPS6129538 B2 JP S6129538B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- main surface
- forming
- buried layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 38
- 239000011248 coating agent Substances 0.000 claims description 26
- 238000000576 coating method Methods 0.000 claims description 26
- 238000009792 diffusion process Methods 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 21
- 239000012535 impurity Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 16
- 150000002500 ions Chemical class 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 26
- 229910052710 silicon Inorganic materials 0.000 description 26
- 239000010703 silicon Substances 0.000 description 26
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000007796 conventional method Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910001439 antimony ion Inorganic materials 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- -1 arsenic ions Chemical class 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 150000001463 antimony compounds Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910001423 beryllium ion Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11206578A JPS5538082A (en) | 1978-09-11 | 1978-09-11 | Formation for buried layer of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11206578A JPS5538082A (en) | 1978-09-11 | 1978-09-11 | Formation for buried layer of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5538082A JPS5538082A (en) | 1980-03-17 |
| JPS6129538B2 true JPS6129538B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-07-07 |
Family
ID=14577164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11206578A Granted JPS5538082A (en) | 1978-09-11 | 1978-09-11 | Formation for buried layer of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5538082A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62162325A (ja) * | 1986-01-13 | 1987-07-18 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| JPS62198120A (ja) * | 1986-02-25 | 1987-09-01 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| KR100393962B1 (ko) * | 1996-12-26 | 2003-11-17 | 주식회사 하이닉스반도체 | 반도체소자의제조방법 |
-
1978
- 1978-09-11 JP JP11206578A patent/JPS5538082A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5538082A (en) | 1980-03-17 |