JPS61290629A - 電子ビ−ム励起イオン源 - Google Patents

電子ビ−ム励起イオン源

Info

Publication number
JPS61290629A
JPS61290629A JP60132138A JP13213885A JPS61290629A JP S61290629 A JPS61290629 A JP S61290629A JP 60132138 A JP60132138 A JP 60132138A JP 13213885 A JP13213885 A JP 13213885A JP S61290629 A JPS61290629 A JP S61290629A
Authority
JP
Japan
Prior art keywords
ion
cathode
acceleration
plasma
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60132138A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0375975B2 (OSRAM
Inventor
Tamio Hara
民夫 原
Manabu Hamagaki
浜垣　学
Katsunobu Aoyanagi
克信 青柳
Susumu Nanba
難波　進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP60132138A priority Critical patent/JPS61290629A/ja
Priority to CA000510112A priority patent/CA1252581A/en
Priority to DE86107195T priority patent/DE3688860T2/de
Priority to EP86107195A priority patent/EP0203573B1/en
Priority to US06/868,350 priority patent/US4749910A/en
Publication of JPS61290629A publication Critical patent/JPS61290629A/ja
Publication of JPH0375975B2 publication Critical patent/JPH0375975B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP60132138A 1985-05-28 1985-06-18 電子ビ−ム励起イオン源 Granted JPS61290629A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60132138A JPS61290629A (ja) 1985-06-18 1985-06-18 電子ビ−ム励起イオン源
CA000510112A CA1252581A (en) 1985-05-28 1986-05-27 Electron beam-excited ion beam source
DE86107195T DE3688860T2 (de) 1985-05-28 1986-05-27 Mittels Elektronenstrahl angeregte Ionenstrahlquelle.
EP86107195A EP0203573B1 (en) 1985-05-28 1986-05-27 Electron beam-excited ion beam source
US06/868,350 US4749910A (en) 1985-05-28 1986-05-28 Electron beam-excited ion beam source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60132138A JPS61290629A (ja) 1985-06-18 1985-06-18 電子ビ−ム励起イオン源

Publications (2)

Publication Number Publication Date
JPS61290629A true JPS61290629A (ja) 1986-12-20
JPH0375975B2 JPH0375975B2 (OSRAM) 1991-12-04

Family

ID=15074250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60132138A Granted JPS61290629A (ja) 1985-05-28 1985-06-18 電子ビ−ム励起イオン源

Country Status (1)

Country Link
JP (1) JPS61290629A (OSRAM)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63190300A (ja) * 1987-01-31 1988-08-05 東京エレクトロン株式会社 電子ビーム式プラズマ装置
JPH01176634A (ja) * 1987-12-30 1989-07-13 Tokyo Electron Ltd 電子ビーム励起イオン源
JPH01189838A (ja) * 1988-01-25 1989-07-31 Nissin Electric Co Ltd イオン源
JPH02297853A (ja) * 1989-02-28 1990-12-10 Tokyo Electron Ltd 電子ビーム励起イオン源
JPH0340342A (ja) * 1989-07-06 1991-02-21 Akira Oota イオンビーム照射装置
JPH0393141A (ja) * 1989-09-04 1991-04-18 Tokyo Electron Ltd イオン注入装置
JPH03210742A (ja) * 1990-01-11 1991-09-13 Tokyo Electron Ltd イオン源
JPH03219540A (ja) * 1989-11-14 1991-09-26 Tokyo Electron Ltd イオン源
JPH03219539A (ja) * 1989-10-27 1991-09-26 Tokyo Electron Ltd イオン生成方法およびイオン生成装置
US5089747A (en) * 1989-02-16 1992-02-18 Tokyo Electron Limited Electron beam excitation ion source
US5252892A (en) * 1989-02-16 1993-10-12 Tokyo Electron Limited Plasma processing apparatus
US5326981A (en) * 1991-09-27 1994-07-05 Kawasaki Jukogyo Kabushiki Kaisha Electron beam excited ion irradiation apparatus
JP2011501382A (ja) * 2007-10-22 2011-01-06 アクセリス テクノロジーズ， インコーポレイテッド ダブルプラズマイオンソース
JP2011065969A (ja) * 2009-09-18 2011-03-31 Ulvac Japan Ltd イオン源及びイオン照射方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ROV.SCI.INSTRUM=1977 *

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63190300A (ja) * 1987-01-31 1988-08-05 東京エレクトロン株式会社 電子ビーム式プラズマ装置
JPH01176634A (ja) * 1987-12-30 1989-07-13 Tokyo Electron Ltd 電子ビーム励起イオン源
JPH01189838A (ja) * 1988-01-25 1989-07-31 Nissin Electric Co Ltd イオン源
US5089747A (en) * 1989-02-16 1992-02-18 Tokyo Electron Limited Electron beam excitation ion source
US5252892A (en) * 1989-02-16 1993-10-12 Tokyo Electron Limited Plasma processing apparatus
JPH02297853A (ja) * 1989-02-28 1990-12-10 Tokyo Electron Ltd 電子ビーム励起イオン源
JPH0340342A (ja) * 1989-07-06 1991-02-21 Akira Oota イオンビーム照射装置
JPH0393141A (ja) * 1989-09-04 1991-04-18 Tokyo Electron Ltd イオン注入装置
JPH03219539A (ja) * 1989-10-27 1991-09-26 Tokyo Electron Ltd イオン生成方法およびイオン生成装置
JPH03219540A (ja) * 1989-11-14 1991-09-26 Tokyo Electron Ltd イオン源
JPH03210742A (ja) * 1990-01-11 1991-09-13 Tokyo Electron Ltd イオン源
US5326981A (en) * 1991-09-27 1994-07-05 Kawasaki Jukogyo Kabushiki Kaisha Electron beam excited ion irradiation apparatus
JP2011501382A (ja) * 2007-10-22 2011-01-06 アクセリス テクノロジーズ， インコーポレイテッド ダブルプラズマイオンソース
JP2011065969A (ja) * 2009-09-18 2011-03-31 Ulvac Japan Ltd イオン源及びイオン照射方法

Also Published As

Publication number Publication date
JPH0375975B2 (OSRAM) 1991-12-04

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