JPS61254305A - 半導体ウエハの表面保護方法 - Google Patents

半導体ウエハの表面保護方法

Info

Publication number
JPS61254305A
JPS61254305A JP60095800A JP9580085A JPS61254305A JP S61254305 A JPS61254305 A JP S61254305A JP 60095800 A JP60095800 A JP 60095800A JP 9580085 A JP9580085 A JP 9580085A JP S61254305 A JPS61254305 A JP S61254305A
Authority
JP
Japan
Prior art keywords
film
suction table
wafer
suction
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60095800A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0347584B2 (enEXAMPLES
Inventor
三郎 宮本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Electric Industrial Co Ltd filed Critical Nitto Electric Industrial Co Ltd
Priority to JP60095800A priority Critical patent/JPS61254305A/ja
Publication of JPS61254305A publication Critical patent/JPS61254305A/ja
Publication of JPH0347584B2 publication Critical patent/JPH0347584B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
JP60095800A 1985-05-02 1985-05-02 半導体ウエハの表面保護方法 Granted JPS61254305A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60095800A JPS61254305A (ja) 1985-05-02 1985-05-02 半導体ウエハの表面保護方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60095800A JPS61254305A (ja) 1985-05-02 1985-05-02 半導体ウエハの表面保護方法

Publications (2)

Publication Number Publication Date
JPS61254305A true JPS61254305A (ja) 1986-11-12
JPH0347584B2 JPH0347584B2 (enEXAMPLES) 1991-07-19

Family

ID=14147509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60095800A Granted JPS61254305A (ja) 1985-05-02 1985-05-02 半導体ウエハの表面保護方法

Country Status (1)

Country Link
JP (1) JPS61254305A (enEXAMPLES)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02214134A (ja) * 1989-02-15 1990-08-27 Nitto Denko Corp 半導体ウエハマウンタにおける粘着テープテンション付与装置
JPH0311749A (ja) * 1989-06-09 1991-01-21 Fujitsu Ltd 半導体ウエハに粘着テープを接着する方法
JP2021114522A (ja) * 2020-01-17 2021-08-05 株式会社ディスコ 載置面清掃方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5986547A (ja) * 1982-11-04 1984-05-18 Nitto Electric Ind Co Ltd キヤリヤ治具用フイルム貼着装置
JPS59103354A (ja) * 1983-09-21 1984-06-14 Hitachi Ltd 板状物の貼着装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5986547A (ja) * 1982-11-04 1984-05-18 Nitto Electric Ind Co Ltd キヤリヤ治具用フイルム貼着装置
JPS59103354A (ja) * 1983-09-21 1984-06-14 Hitachi Ltd 板状物の貼着装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02214134A (ja) * 1989-02-15 1990-08-27 Nitto Denko Corp 半導体ウエハマウンタにおける粘着テープテンション付与装置
JPH0311749A (ja) * 1989-06-09 1991-01-21 Fujitsu Ltd 半導体ウエハに粘着テープを接着する方法
JP2021114522A (ja) * 2020-01-17 2021-08-05 株式会社ディスコ 載置面清掃方法

Also Published As

Publication number Publication date
JPH0347584B2 (enEXAMPLES) 1991-07-19

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