JPS6124815B2 - - Google Patents

Info

Publication number
JPS6124815B2
JPS6124815B2 JP52091077A JP9107777A JPS6124815B2 JP S6124815 B2 JPS6124815 B2 JP S6124815B2 JP 52091077 A JP52091077 A JP 52091077A JP 9107777 A JP9107777 A JP 9107777A JP S6124815 B2 JPS6124815 B2 JP S6124815B2
Authority
JP
Japan
Prior art keywords
patterns
charged particle
pattern
exposure
exposure amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52091077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5425596A (en
Inventor
Masanori Idesawa
Hidekazu Goto
Takashi Soma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP9107777A priority Critical patent/JPS5425596A/ja
Publication of JPS5425596A publication Critical patent/JPS5425596A/ja
Publication of JPS6124815B2 publication Critical patent/JPS6124815B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP9107777A 1977-07-29 1977-07-29 Method of projecting charged particle beam Granted JPS5425596A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9107777A JPS5425596A (en) 1977-07-29 1977-07-29 Method of projecting charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9107777A JPS5425596A (en) 1977-07-29 1977-07-29 Method of projecting charged particle beam

Publications (2)

Publication Number Publication Date
JPS5425596A JPS5425596A (en) 1979-02-26
JPS6124815B2 true JPS6124815B2 (enExample) 1986-06-12

Family

ID=14016435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9107777A Granted JPS5425596A (en) 1977-07-29 1977-07-29 Method of projecting charged particle beam

Country Status (1)

Country Link
JP (1) JPS5425596A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54105971A (en) * 1978-02-07 1979-08-20 Jeol Ltd Electron beam exposure method
EP0053225B1 (en) * 1980-11-28 1985-03-13 International Business Machines Corporation Electron beam system and method
JPS62206829A (ja) * 1986-03-06 1987-09-11 Nec Corp 荷電粒子線描画装置
JPH0330313A (ja) * 1989-06-27 1991-02-08 Matsushita Electric Ind Co Ltd 微細パターン形成方法
US9460260B2 (en) * 2014-02-21 2016-10-04 Mapper Lithography Ip B.V. Enhanced stitching by overlap dose and feature reduction

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424833A (en) * 1977-07-26 1979-02-24 Mitsubishi Chem Ind Ltd Polyoxyethylene glycol complex of rare earth element

Also Published As

Publication number Publication date
JPS5425596A (en) 1979-02-26

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