JPS61247040A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS61247040A
JPS61247040A JP60087853A JP8785385A JPS61247040A JP S61247040 A JPS61247040 A JP S61247040A JP 60087853 A JP60087853 A JP 60087853A JP 8785385 A JP8785385 A JP 8785385A JP S61247040 A JPS61247040 A JP S61247040A
Authority
JP
Japan
Prior art keywords
ceramic substrate
semiconductor device
protrusion
heat sink
header
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60087853A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0344414B2 (enExample
Inventor
Shigeo Iki
伊木　茂男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60087853A priority Critical patent/JPS61247040A/ja
Publication of JPS61247040A publication Critical patent/JPS61247040A/ja
Publication of JPH0344414B2 publication Critical patent/JPH0344414B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
    • H01L21/4814—Conductive parts
    • H01L21/4871—Bases, plates or heatsinks
    • H01L21/4882—Assembly of heatsink parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13099—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32153—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate
    • H01L2224/32175—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate the item being metallic
    • H01L2224/32188—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate the item being metallic the layer connector connecting to a bonding area protruding from the surface of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8119—Arrangement of the bump connectors prior to mounting
    • H01L2224/81191—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818—Bonding techniques
    • H01L2224/81801—Soldering or alloying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
JP60087853A 1985-04-24 1985-04-24 半導体装置の製造方法 Granted JPS61247040A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60087853A JPS61247040A (ja) 1985-04-24 1985-04-24 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60087853A JPS61247040A (ja) 1985-04-24 1985-04-24 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61247040A true JPS61247040A (ja) 1986-11-04
JPH0344414B2 JPH0344414B2 (enExample) 1991-07-05

Family

ID=13926442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60087853A Granted JPS61247040A (ja) 1985-04-24 1985-04-24 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61247040A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63174328A (ja) * 1987-01-14 1988-07-18 Hitachi Ltd 電子部品の接続構造
JPH0448740A (ja) * 1990-06-15 1992-02-18 Matsushita Electric Ind Co Ltd Ｔａｂ半導体装置
JP2011187946A (ja) * 2010-02-16 2011-09-22 Internatl Rectifier Corp はんだ濡れ性の前面金属部を備えるｉｉｉ族窒化物パワーデバイス
US20150041187A1 (en) * 2012-03-19 2015-02-12 Nippon Light Metal Company, Ltd. Manufacturing method of radiator-integrated substrate and radiator-integrated substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107342A (en) * 1980-01-31 1981-08-26 Sanyo Electric Co Ltd Reciprocating type cassette recorder
JPS5844731A (ja) * 1981-09-10 1983-03-15 Mitsubishi Electric Corp 半導体装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107342A (en) * 1980-01-31 1981-08-26 Sanyo Electric Co Ltd Reciprocating type cassette recorder
JPS5844731A (ja) * 1981-09-10 1983-03-15 Mitsubishi Electric Corp 半導体装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63174328A (ja) * 1987-01-14 1988-07-18 Hitachi Ltd 電子部品の接続構造
JPH0448740A (ja) * 1990-06-15 1992-02-18 Matsushita Electric Ind Co Ltd Ｔａｂ半導体装置
JP2011187946A (ja) * 2010-02-16 2011-09-22 Internatl Rectifier Corp はんだ濡れ性の前面金属部を備えるｉｉｉ族窒化物パワーデバイス
US8853744B2 (en) 2010-02-16 2014-10-07 International Rectifier Corporation Power device with solderable front metal
US20150041187A1 (en) * 2012-03-19 2015-02-12 Nippon Light Metal Company, Ltd. Manufacturing method of radiator-integrated substrate and radiator-integrated substrate
US9474146B2 (en) * 2012-03-19 2016-10-18 Nippon Light Metal Company, Ltd. Manufacturing method of radiator-integrated substrate and radiator-integrated substrate

Also Published As

Publication number Publication date
JPH0344414B2 (enExample) 1991-07-05

Similar Documents

Publication Publication Date Title
JP3022393B2 (ja) 半導体装置およびリードフレームならびに半導体装置の製造方法
JP2953424B2 (ja) フェイスダウンボンディング用リードフレーム
JP2840316B2 (ja) 半導体装置およびその製造方法
EP0468475B1 (en) Power semiconductor device suitable for automation of production
JPH11145336A (ja) バンプ付電子部品の実装構造および実装方法
JPS5931042A (ja) 高周波高出力半導体装置
WO2011064817A1 (ja) 半導体装置とその製造方法
JPS61247040A (ja) 半導体装置の製造方法
JPH0817870A (ja) 半導体装置
JPH05315520A (ja) 表面実装型半導体装置及びそのアウターリードの折り曲げ加工方法
JP4266429B2 (ja) 樹脂封止型半導体装置およびその製造方法
KR100480455B1 (ko) 높은 품질과 높은 생산성으로 ｔａｂ테이프들의 내부리드들을 전극패드들에 접합할 수 있는 접합도구와 접합방법
JPH03228339A (ja) ボンディングツール
JPH0451056B2 (enExample)
JPH09223767A (ja) リードフレーム
JP3246265B2 (ja) ボンディングワイヤを用いた電子部品並びにその製造方法及びワイヤ成形方法
JPH03171744A (ja) 半導体装置及びその製造方法
JP2001308254A (ja) 半導体装置及びその製造方法
WO2025094349A1 (ja) 半導体装置および半導体装置の製造方法
JPS6035245Y2 (ja) 半導体装置
JP3434226B2 (ja) 固定リードフレームおよびその製造方法
JP3314516B2 (ja) 前成形ずみフィルムキャリアおよびその製造方法ならびに電子素子およびその製造方法
JP2806816B2 (ja) ボンディング装置およびこれを用いたボンディング方法
JPH03276737A (ja) 半導体装置
JPH05315531A (ja) リードフレーム及びその製造方法