JPS61238962A - 膜形成装置 - Google Patents

膜形成装置

Info

Publication number
JPS61238962A
JPS61238962A JP60080515A JP8051585A JPS61238962A JP S61238962 A JPS61238962 A JP S61238962A JP 60080515 A JP60080515 A JP 60080515A JP 8051585 A JP8051585 A JP 8051585A JP S61238962 A JPS61238962 A JP S61238962A
Authority
JP
Japan
Prior art keywords
plasma
substrate
accelerating
vessel
base body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60080515A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644591B2 (enrdf_load_stackoverflow
Inventor
Hideo Kurokawa
英雄 黒川
Tsutomu Mitani
力 三谷
Taketoshi Yonezawa
米澤　武敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60080515A priority Critical patent/JPS61238962A/ja
Publication of JPS61238962A publication Critical patent/JPS61238962A/ja
Publication of JPS644591B2 publication Critical patent/JPS644591B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP60080515A 1985-04-16 1985-04-16 膜形成装置 Granted JPS61238962A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60080515A JPS61238962A (ja) 1985-04-16 1985-04-16 膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60080515A JPS61238962A (ja) 1985-04-16 1985-04-16 膜形成装置

Publications (2)

Publication Number Publication Date
JPS61238962A true JPS61238962A (ja) 1986-10-24
JPS644591B2 JPS644591B2 (enrdf_load_stackoverflow) 1989-01-26

Family

ID=13720449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60080515A Granted JPS61238962A (ja) 1985-04-16 1985-04-16 膜形成装置

Country Status (1)

Country Link
JP (1) JPS61238962A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011530155A (ja) * 2008-08-04 2011-12-15 エージーシー フラット グラス ノース アメリカ，インコーポレイテッド プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法
US9721764B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Method of producing plasma by multiple-phase alternating or pulsed electrical current
US9721765B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US10242846B2 (en) 2015-12-18 2019-03-26 Agc Flat Glass North America, Inc. Hollow cathode ion source
US10573499B2 (en) 2015-12-18 2020-02-25 Agc Flat Glass North America, Inc. Method of extracting and accelerating ions
US10586685B2 (en) 2014-12-05 2020-03-10 Agc Glass Europe Hollow cathode plasma source
US10755901B2 (en) 2014-12-05 2020-08-25 Agc Flat Glass North America, Inc. Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521515A (en) * 1978-07-31 1980-02-15 Oyo Kagaku Kenkyusho Surface treatment
JPS58112045A (ja) * 1981-12-02 1983-07-04 Konishiroku Photo Ind Co Ltd 薄膜形成方法
JPS59205471A (ja) * 1983-05-02 1984-11-21 Kowa Eng Kk 被処理物品の表面に黒色被膜を形成する方法
JPS60116781A (ja) * 1983-11-28 1985-06-24 Kyocera Corp 高硬度窒化ホウ素膜の製造方法
JPS61130487A (ja) * 1984-11-29 1986-06-18 Matsushita Electric Ind Co Ltd プラズマ・インジエクシヨン・ｃｖｄ装置
JPS61136678A (ja) * 1984-12-06 1986-06-24 Matsushita Electric Ind Co Ltd 高硬度炭素膜形成方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521515A (en) * 1978-07-31 1980-02-15 Oyo Kagaku Kenkyusho Surface treatment
JPS58112045A (ja) * 1981-12-02 1983-07-04 Konishiroku Photo Ind Co Ltd 薄膜形成方法
JPS59205471A (ja) * 1983-05-02 1984-11-21 Kowa Eng Kk 被処理物品の表面に黒色被膜を形成する方法
JPS60116781A (ja) * 1983-11-28 1985-06-24 Kyocera Corp 高硬度窒化ホウ素膜の製造方法
JPS61130487A (ja) * 1984-11-29 1986-06-18 Matsushita Electric Ind Co Ltd プラズマ・インジエクシヨン・ｃｖｄ装置
JPS61136678A (ja) * 1984-12-06 1986-06-24 Matsushita Electric Ind Co Ltd 高硬度炭素膜形成方法

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10580624B2 (en) 2008-08-04 2020-03-03 Agc Flat Glass North America, Inc. Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
US20140216343A1 (en) 2008-08-04 2014-08-07 Agc Flat Glass North America, Inc. Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
US20150002021A1 (en) 2008-08-04 2015-01-01 Agc Flat Glass North America, Inc. Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
US20150004330A1 (en) 2008-08-04 2015-01-01 Agc Flat Glass North America, Inc. Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
JP2016006771A (ja) * 2008-08-04 2016-01-14 エージーシー フラット グラス ノース アメリカ，インコーポレイテッドＡｇｃ Ｆｌａｔ Ｇｌａｓｓ Ｎｏｒｔｈ Ａｍｅｒｉｃａ，Ｉｎｃ． プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法
US9478401B2 (en) 2008-08-04 2016-10-25 Agc Flat Glass North America, Inc. Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
US10580625B2 (en) 2008-08-04 2020-03-03 Agc Flat Glass North America, Inc. Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
JP2011530155A (ja) * 2008-08-04 2011-12-15 エージーシー フラット グラス ノース アメリカ，インコーポレイテッド プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法
JP2017214651A (ja) * 2008-08-04 2017-12-07 エージーシー フラット グラス ノース アメリカ，インコーポレイテッドＡｇｃ Ｆｌａｔ Ｇｌａｓｓ Ｎｏｒｔｈ Ａｍｅｒｉｃａ，Ｉｎｃ． プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法
JP2019083200A (ja) * 2008-08-04 2019-05-30 エージーシー フラット グラス ノース アメリカ，インコーポレイテッドＡｇｃ Ｆｌａｔ Ｇｌａｓｓ Ｎｏｒｔｈ Ａｍｅｒｉｃａ，Ｉｎｃ． プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法
US10438778B2 (en) 2008-08-04 2019-10-08 Agc Flat Glass North America, Inc. Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
US10586685B2 (en) 2014-12-05 2020-03-10 Agc Glass Europe Hollow cathode plasma source
US10755901B2 (en) 2014-12-05 2020-08-25 Agc Flat Glass North America, Inc. Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces
US11875976B2 (en) 2014-12-05 2024-01-16 Agc Flat Glass North America, Inc. Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces
US20170309458A1 (en) 2015-11-16 2017-10-26 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US10559452B2 (en) 2015-11-16 2020-02-11 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US9721765B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US9721764B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Method of producing plasma by multiple-phase alternating or pulsed electrical current
US10242846B2 (en) 2015-12-18 2019-03-26 Agc Flat Glass North America, Inc. Hollow cathode ion source
US10573499B2 (en) 2015-12-18 2020-02-25 Agc Flat Glass North America, Inc. Method of extracting and accelerating ions

Also Published As

Publication number Publication date
JPS644591B2 (enrdf_load_stackoverflow) 1989-01-26

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