JPS61238962A - 膜形成装置 - Google Patents
膜形成装置Info
- Publication number
- JPS61238962A JPS61238962A JP8051585A JP8051585A JPS61238962A JP S61238962 A JPS61238962 A JP S61238962A JP 8051585 A JP8051585 A JP 8051585A JP 8051585 A JP8051585 A JP 8051585A JP S61238962 A JPS61238962 A JP S61238962A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- substrate
- accelerating
- vessel
- base body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 21
- 239000007789 gas Substances 0.000 claims abstract description 37
- 238000002347 injection Methods 0.000 claims abstract description 19
- 239000007924 injection Substances 0.000 claims abstract description 19
- 230000005284 excitation Effects 0.000 claims abstract description 15
- 239000000178 monomer Substances 0.000 claims abstract description 10
- 239000012159 carrier gas Substances 0.000 claims abstract description 9
- 230000007935 neutral effect Effects 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 52
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000001939 inductive effect Effects 0.000 claims description 3
- 150000003254 radicals Chemical class 0.000 claims 1
- 150000002500 ions Chemical class 0.000 abstract description 25
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 16
- 229910052799 carbon Inorganic materials 0.000 abstract description 16
- 230000001133 acceleration Effects 0.000 abstract description 14
- 239000000696 magnetic material Substances 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 51
- 230000015572 biosynthetic process Effects 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 239000001257 hydrogen Substances 0.000 description 8
- 229910052739 hydrogen Inorganic materials 0.000 description 8
- 238000005240 physical vapour deposition Methods 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 6
- 239000004215 Carbon black (E152) Substances 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 5
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 229930195733 hydrocarbon Natural products 0.000 description 5
- 150000002430 hydrocarbons Chemical class 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000001737 promoting effect Effects 0.000 description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8051585A JPS61238962A (ja) | 1985-04-16 | 1985-04-16 | 膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8051585A JPS61238962A (ja) | 1985-04-16 | 1985-04-16 | 膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61238962A true JPS61238962A (ja) | 1986-10-24 |
| JPS644591B2 JPS644591B2 (enrdf_load_stackoverflow) | 1989-01-26 |
Family
ID=13720449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8051585A Granted JPS61238962A (ja) | 1985-04-16 | 1985-04-16 | 膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61238962A (enrdf_load_stackoverflow) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011530155A (ja) * | 2008-08-04 | 2011-12-15 | エージーシー フラット グラス ノース アメリカ，インコーポレイテッド | プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法 |
| US9721765B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
| US9721764B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Method of producing plasma by multiple-phase alternating or pulsed electrical current |
| US10242846B2 (en) | 2015-12-18 | 2019-03-26 | Agc Flat Glass North America, Inc. | Hollow cathode ion source |
| US10573499B2 (en) | 2015-12-18 | 2020-02-25 | Agc Flat Glass North America, Inc. | Method of extracting and accelerating ions |
| US10586685B2 (en) | 2014-12-05 | 2020-03-10 | Agc Glass Europe | Hollow cathode plasma source |
| US10755901B2 (en) | 2014-12-05 | 2020-08-25 | Agc Flat Glass North America, Inc. | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5521515A (en) * | 1978-07-31 | 1980-02-15 | Oyo Kagaku Kenkyusho | Surface treatment |
| JPS58112045A (ja) * | 1981-12-02 | 1983-07-04 | Konishiroku Photo Ind Co Ltd | 薄膜形成方法 |
| JPS59205471A (ja) * | 1983-05-02 | 1984-11-21 | Kowa Eng Kk | 被処理物品の表面に黒色被膜を形成する方法 |
| JPS60116781A (ja) * | 1983-11-28 | 1985-06-24 | Kyocera Corp | 高硬度窒化ホウ素膜の製造方法 |
| JPS61130487A (ja) * | 1984-11-29 | 1986-06-18 | Matsushita Electric Ind Co Ltd | プラズマ・インジエクシヨン・ｃｖｄ装置 |
| JPS61136678A (ja) * | 1984-12-06 | 1986-06-24 | Matsushita Electric Ind Co Ltd | 高硬度炭素膜形成方法 |
-
1985
- 1985-04-16 JP JP8051585A patent/JPS61238962A/ja active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5521515A (en) * | 1978-07-31 | 1980-02-15 | Oyo Kagaku Kenkyusho | Surface treatment |
| JPS58112045A (ja) * | 1981-12-02 | 1983-07-04 | Konishiroku Photo Ind Co Ltd | 薄膜形成方法 |
| JPS59205471A (ja) * | 1983-05-02 | 1984-11-21 | Kowa Eng Kk | 被処理物品の表面に黒色被膜を形成する方法 |
| JPS60116781A (ja) * | 1983-11-28 | 1985-06-24 | Kyocera Corp | 高硬度窒化ホウ素膜の製造方法 |
| JPS61130487A (ja) * | 1984-11-29 | 1986-06-18 | Matsushita Electric Ind Co Ltd | プラズマ・インジエクシヨン・ｃｖｄ装置 |
| JPS61136678A (ja) * | 1984-12-06 | 1986-06-24 | Matsushita Electric Ind Co Ltd | 高硬度炭素膜形成方法 |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10580625B2 (en) | 2008-08-04 | 2020-03-03 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| US20140216343A1 (en) | 2008-08-04 | 2014-08-07 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| US20150004330A1 (en) | 2008-08-04 | 2015-01-01 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| US20150002021A1 (en) | 2008-08-04 | 2015-01-01 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| JP2016006771A (ja) * | 2008-08-04 | 2016-01-14 | エージーシー フラット グラス ノース アメリカ，インコーポレイテッドＡｇｃ Ｆｌａｔ Ｇｌａｓｓ Ｎｏｒｔｈ Ａｍｅｒｉｃａ，Ｉｎｃ． | プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法 |
| US9478401B2 (en) | 2008-08-04 | 2016-10-25 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| US10580624B2 (en) | 2008-08-04 | 2020-03-03 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| JP2011530155A (ja) * | 2008-08-04 | 2011-12-15 | エージーシー フラット グラス ノース アメリカ，インコーポレイテッド | プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法 |
| JP2017214651A (ja) * | 2008-08-04 | 2017-12-07 | エージーシー フラット グラス ノース アメリカ，インコーポレイテッドＡｇｃ Ｆｌａｔ Ｇｌａｓｓ Ｎｏｒｔｈ Ａｍｅｒｉｃａ，Ｉｎｃ． | プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法 |
| JP2019083200A (ja) * | 2008-08-04 | 2019-05-30 | エージーシー フラット グラス ノース アメリカ，インコーポレイテッドＡｇｃ Ｆｌａｔ Ｇｌａｓｓ Ｎｏｒｔｈ Ａｍｅｒｉｃａ，Ｉｎｃ． | プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法 |
| US10438778B2 (en) | 2008-08-04 | 2019-10-08 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| US10586685B2 (en) | 2014-12-05 | 2020-03-10 | Agc Glass Europe | Hollow cathode plasma source |
| US10755901B2 (en) | 2014-12-05 | 2020-08-25 | Agc Flat Glass North America, Inc. | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces |
| US11875976B2 (en) | 2014-12-05 | 2024-01-16 | Agc Flat Glass North America, Inc. | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces |
| US20170309458A1 (en) | 2015-11-16 | 2017-10-26 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
| US10559452B2 (en) | 2015-11-16 | 2020-02-11 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
| US9721764B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Method of producing plasma by multiple-phase alternating or pulsed electrical current |
| US9721765B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
| US10242846B2 (en) | 2015-12-18 | 2019-03-26 | Agc Flat Glass North America, Inc. | Hollow cathode ion source |
| US10573499B2 (en) | 2015-12-18 | 2020-02-25 | Agc Flat Glass North America, Inc. | Method of extracting and accelerating ions |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS644591B2 (enrdf_load_stackoverflow) | 1989-01-26 |
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