JPS6123765Y2 - - Google Patents
Info
- Publication number
- JPS6123765Y2 JPS6123765Y2 JP1550279U JP1550279U JPS6123765Y2 JP S6123765 Y2 JPS6123765 Y2 JP S6123765Y2 JP 1550279 U JP1550279 U JP 1550279U JP 1550279 U JP1550279 U JP 1550279U JP S6123765 Y2 JPS6123765 Y2 JP S6123765Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- test object
- optical flat
- optical
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 28
- 235000012431 wafers Nutrition 0.000 description 8
- 239000003818 cinder Substances 0.000 description 7
- 229910000859 α-Fe Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1550279U JPS6123765Y2 (forum.php) | 1979-02-08 | 1979-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1550279U JPS6123765Y2 (forum.php) | 1979-02-08 | 1979-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55116209U JPS55116209U (forum.php) | 1980-08-16 |
| JPS6123765Y2 true JPS6123765Y2 (forum.php) | 1986-07-16 |
Family
ID=28837312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1550279U Expired JPS6123765Y2 (forum.php) | 1979-02-08 | 1979-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6123765Y2 (forum.php) |
-
1979
- 1979-02-08 JP JP1550279U patent/JPS6123765Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55116209U (forum.php) | 1980-08-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5959461A (en) | Probe station adapter for backside emission inspection | |
| WO2019205499A1 (zh) | 一种玻璃面板检测设备及检测图像拼接方法 | |
| JPS6123765Y2 (forum.php) | ||
| US4234254A (en) | Unit for measuring planeness | |
| JP3312495B2 (ja) | 硬度計 | |
| JP2000097684A (ja) | 光学素子の面間の位置関係を測定する方法および装置および同装置に用いる光学素子を保持する保持具 | |
| US6242926B1 (en) | Method and apparatus for moving an article relative to and between a pair of thickness measuring probes to develop a thickness map for the article | |
| JPH11108644A (ja) | 基板平面度測定装置 | |
| JPH0296608A (ja) | 被検査体の半径方向の寸法検査用装置 | |
| CN111307058A (zh) | 一种基于非接触式的翘曲度测量治具及测量方法 | |
| JPS5936202B2 (ja) | 基板のそり測定装置 | |
| JP2005062634A (ja) | ペリクルマウンタ及びペリクルのフォトマスクへの装着方法 | |
| CN221925023U (zh) | 一种便于快速检测的三坐标检测机 | |
| JPH0517611Y2 (forum.php) | ||
| JPS62251603A (ja) | レンズ形状の測定方法 | |
| CN216846063U (zh) | 一种用于框型工件尺寸变形度测量的装置 | |
| CN212674624U (zh) | 一种电梯显示屏测试夹具 | |
| JPH0244250Y2 (forum.php) | ||
| JPS6259457B2 (forum.php) | ||
| JPS62285001A (ja) | レンズ形状の測定方法 | |
| JPH07181031A (ja) | 測定用補助台 | |
| JP2593661Y2 (ja) | 段差測定具 | |
| JPH05187818A (ja) | レンズ評価装置 | |
| JP2562249Y2 (ja) | セラミックフェルールの端面加工装置 | |
| JPH01153266A (ja) | 半導体ウエーハの研磨装置 |