JPS6123521B2 - - Google Patents

Info

Publication number
JPS6123521B2
JPS6123521B2 JP52090061A JP9006177A JPS6123521B2 JP S6123521 B2 JPS6123521 B2 JP S6123521B2 JP 52090061 A JP52090061 A JP 52090061A JP 9006177 A JP9006177 A JP 9006177A JP S6123521 B2 JPS6123521 B2 JP S6123521B2
Authority
JP
Japan
Prior art keywords
substrate
ethieret
ion beam
grating
lattice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52090061A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5424653A (en
Inventor
Susumu Nanba
Katsunobu Aoyanagi
Kazuo Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP9006177A priority Critical patent/JPS5424653A/ja
Publication of JPS5424653A publication Critical patent/JPS5424653A/ja
Publication of JPS6123521B2 publication Critical patent/JPS6123521B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP9006177A 1977-07-27 1977-07-27 Substrate for echelette grating and method of manufacturing same Granted JPS5424653A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9006177A JPS5424653A (en) 1977-07-27 1977-07-27 Substrate for echelette grating and method of manufacturing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9006177A JPS5424653A (en) 1977-07-27 1977-07-27 Substrate for echelette grating and method of manufacturing same

Publications (2)

Publication Number Publication Date
JPS5424653A JPS5424653A (en) 1979-02-24
JPS6123521B2 true JPS6123521B2 (en, 2012) 1986-06-06

Family

ID=13988042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9006177A Granted JPS5424653A (en) 1977-07-27 1977-07-27 Substrate for echelette grating and method of manufacturing same

Country Status (1)

Country Link
JP (1) JPS5424653A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161302A (ja) * 1987-12-18 1989-06-26 Shimadzu Corp ホログラフィックグレーティング製作方法
JPH03113U (en, 2012) * 1989-05-22 1991-01-07

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61172101A (ja) * 1985-01-25 1986-08-02 Matsushita Electric Ind Co Ltd 回折格子の作成方法
KR940018710A (ko) * 1993-01-28 1994-08-18 이헌조 홀로그램 광학 소자의 제조 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5275341A (en) * 1975-12-19 1977-06-24 Rikagaku Kenkyusho Method of producing echelette grating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161302A (ja) * 1987-12-18 1989-06-26 Shimadzu Corp ホログラフィックグレーティング製作方法
JPH03113U (en, 2012) * 1989-05-22 1991-01-07

Also Published As

Publication number Publication date
JPS5424653A (en) 1979-02-24

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