JPS61225568A - 空気分離装置 - Google Patents

空気分離装置

Info

Publication number
JPS61225568A
JPS61225568A JP60063534A JP6353485A JPS61225568A JP S61225568 A JPS61225568 A JP S61225568A JP 60063534 A JP60063534 A JP 60063534A JP 6353485 A JP6353485 A JP 6353485A JP S61225568 A JPS61225568 A JP S61225568A
Authority
JP
Japan
Prior art keywords
air
hydrogen
gas
nitrogen
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60063534A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463993B2 (enrdf_load_stackoverflow
Inventor
正博 山崎
小山　祥二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60063534A priority Critical patent/JPS61225568A/ja
Publication of JPS61225568A publication Critical patent/JPS61225568A/ja
Priority to JP2012587A priority patent/JPH0711384B2/ja
Publication of JPH0463993B2 publication Critical patent/JPH0463993B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/044—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a single pressure main column system only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04151—Purification and (pre-)cooling of the feed air; recuperative heat-exchange with product streams
    • F25J3/04163—Hot end purification of the feed air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04151—Purification and (pre-)cooling of the feed air; recuperative heat-exchange with product streams
    • F25J3/04163—Hot end purification of the feed air
    • F25J3/04169—Hot end purification of the feed air by adsorption of the impurities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/72—Refluxing the column with at least a part of the totally condensed overhead gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/82—Processes or apparatus using other separation and/or other processing means using a reactor with combustion or catalytic reaction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/42—Nitrogen or special cases, e.g. multiple or low purity N2
    • F25J2215/44—Ultra high purity nitrogen, i.e. generally less than 1 ppb impurities

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
JP60063534A 1985-03-29 1985-03-29 空気分離装置 Granted JPS61225568A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60063534A JPS61225568A (ja) 1985-03-29 1985-03-29 空気分離装置
JP2012587A JPH0711384B2 (ja) 1985-03-29 1990-01-24 窒素製造方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60063534A JPS61225568A (ja) 1985-03-29 1985-03-29 空気分離装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012587A Division JPH0711384B2 (ja) 1985-03-29 1990-01-24 窒素製造方法および装置

Publications (2)

Publication Number Publication Date
JPS61225568A true JPS61225568A (ja) 1986-10-07
JPH0463993B2 JPH0463993B2 (enrdf_load_stackoverflow) 1992-10-13

Family

ID=13231976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60063534A Granted JPS61225568A (ja) 1985-03-29 1985-03-29 空気分離装置

Country Status (1)

Country Link
JP (1) JPS61225568A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295410A (ja) * 1988-09-30 1990-04-06 Hitachi Ltd 二層充填式一酸化炭素の除去方法及び装置
JPH02307506A (ja) * 1989-05-22 1990-12-20 Teisan Kk 窒素製造装置用原料空気の精製装置
JPH0576759A (ja) * 1991-09-20 1993-03-30 Hitachi Ltd 耐被毒性触媒とその製法および該触媒の使用方法
WO1994024501A1 (en) * 1993-04-22 1994-10-27 Nippon Sanso Corporation Method of and apparatus for manufacturing various kinds of gases to be supplied to semiconductor manufacturing factories
US5359857A (en) * 1992-05-08 1994-11-01 Nippon Sanso Corporation Installation for air liquefaction separation and process therefor

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1137643A (ja) * 1997-07-18 1999-02-12 Osaka Oxygen Ind Ltd 空気分離方法および空気分離装置
JP3466437B2 (ja) * 1997-09-24 2003-11-10 ジャパン・エア・ガシズ株式会社 空気分離装置
JP3665451B2 (ja) * 1997-09-24 2005-06-29 ジャパン・エア・ガシズ株式会社 空気清浄装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243478A (en) * 1975-10-01 1977-04-05 Ibm Sample retainer for spectrophotometer
JPS5649319A (en) * 1972-07-31 1981-05-02 Lilly Co Eli Animal medicine composition

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5649319A (en) * 1972-07-31 1981-05-02 Lilly Co Eli Animal medicine composition
JPS5243478A (en) * 1975-10-01 1977-04-05 Ibm Sample retainer for spectrophotometer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295410A (ja) * 1988-09-30 1990-04-06 Hitachi Ltd 二層充填式一酸化炭素の除去方法及び装置
JPH02307506A (ja) * 1989-05-22 1990-12-20 Teisan Kk 窒素製造装置用原料空気の精製装置
JPH0576759A (ja) * 1991-09-20 1993-03-30 Hitachi Ltd 耐被毒性触媒とその製法および該触媒の使用方法
US5359857A (en) * 1992-05-08 1994-11-01 Nippon Sanso Corporation Installation for air liquefaction separation and process therefor
WO1994024501A1 (en) * 1993-04-22 1994-10-27 Nippon Sanso Corporation Method of and apparatus for manufacturing various kinds of gases to be supplied to semiconductor manufacturing factories
US5656557A (en) * 1993-04-22 1997-08-12 Nippon Sanso Corporation Process for producing various gases for semiconductor production factories

Also Published As

Publication number Publication date
JPH0463993B2 (enrdf_load_stackoverflow) 1992-10-13

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