AU659630B2 - Process and apparatus for the production of argon - Google Patents

Process and apparatus for the production of argon Download PDF

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Publication number
AU659630B2
AU659630B2 AU13140/92A AU1314092A AU659630B2 AU 659630 B2 AU659630 B2 AU 659630B2 AU 13140/92 A AU13140/92 A AU 13140/92A AU 1314092 A AU1314092 A AU 1314092A AU 659630 B2 AU659630 B2 AU 659630B2
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Australia
Prior art keywords
column
argon
production
distillation
impure argon
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AU13140/92A
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AU1314092A (en
Inventor
Bertrand Mollaret
Bernard Saulnier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04406—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system
    • F25J3/04412—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system in a classical double column flowsheet, i.e. with thermal coupling by a main reboiler-condenser in the bottom of low pressure respectively top of high pressure column
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04642—Recovering noble gases from air
    • F25J3/04648—Recovering noble gases from air argon
    • F25J3/04654—Producing crude argon in a crude argon column
    • F25J3/04666—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system
    • F25J3/04672—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system having a top condenser
    • F25J3/04678—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system having a top condenser cooled by oxygen enriched liquid from high pressure column bottoms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04642—Recovering noble gases from air
    • F25J3/04648—Recovering noble gases from air argon
    • F25J3/04721—Producing pure argon, e.g. recovered from a crude argon column
    • F25J3/04733—Producing pure argon, e.g. recovered from a crude argon column using a hybrid system, e.g. using adsorption, permeation or catalytic reaction
    • F25J3/04739—Producing pure argon, e.g. recovered from a crude argon column using a hybrid system, e.g. using adsorption, permeation or catalytic reaction in combination with an auxiliary pure argon column
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/82—Processes or apparatus using other separation and/or other processing means using a reactor with combustion or catalytic reaction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2230/00—Processes or apparatus involving steps for increasing the pressure of gaseous process streams
    • F25J2230/58—Processes or apparatus involving steps for increasing the pressure of gaseous process streams the fluid being argon or crude argon

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Catalysts (AREA)
  • Separation Of Gases By Adsorption (AREA)

Description

:i
AUSTRALIA
Patents Act COMPLETE SPECIFICATION
(ORIGINAL)
Class Int. Class Application Number: Lodged: Complete Specification Lodged: Accepted: Published: 65963Q Priority Related Art: Name of Applicant: I I L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude '''Actual Inventor(s): Bertrand Mollaret Bernard Saulnier Address for Service: PHILLIPS ORMONDE FITZPATRICK Patent and Trade Mark Attorneys 367 Collins Street Melbourne 3000 AUSTRALIA Invention Title: PROCESS AND APPARATUS FOR THE PRODUCTION OF ARGON Our Ref 283580 SPOF Code: 141256/43509 The following statement is a full description of this invention, including the best method of performing it known to applicant(s): 2cU2 4 1 6006
'A.
BACKGROUND OF INVENTION Field of the Invention' The present invention relates to a process f or the production of impure argon by air distillation in a double column connected to a column Ifor the production of impure argon, removal of the oxygen ,present in impure argon by catalytic conversion in the presence of an excess of a reducing agent, removal of the product resulting from this conversion by adsorption, and removal of the excess (for of reducing agent and of the remaining nitrogen gas by distillation.
1 4 Description of Prior Art In the known processes of this type, impure argon, having a composition of about 95% argon, 3% nitrogen and 2% oxygen, is purified by oxygen removal 20 at an elevated temperature in an apparatus called "DZOXO"1. According to this technique, the reaction 0 temperature should be controlled to about 450 C, to v prevent any formation of methane by reaction of K carbon particles with hydrogen at low temperature, and to avoid all the risks resulting from explosion and pollution of argon. Moreover, the gas which exits from the DEOXO must be cooled, first, down to to 800 C by means of a-water cooler, to be able to proceed to its drying on alumina. The apparatus is therefore relatively complicated.
To overcome these disadvantages, it has been proposed, in the document EP-A-377.117, to completely remove the oxygen from the column for the production of impure argon. This -is also costly, because there must be provided a column having at least 150 theoretical plates, and therefore of large r size, which should be mounted at ground level and be provided with a pump for raising that liquid in the low pressure column of the double column.
SUMMARY OF INVENTION The invention aims at providing a process which is reliable and efficient, in which the costs of equipment and utilisation are reduced and which, at least for certain applications, overcomes in a particularly economical manner the disadvantages ft(I associated with DEOXO.
,II For this purpose, the process according to the invention is characterized in that impure argon t having a low content of oxygen, e.g. lower than 1000 t vpm, typically between about 100 and 1000 vpm, is produced by distillation, and in that the catalytic conversion is carried out by passing the impure argon and the excess of reducing agent at about room temperature, over a catalytic bed consisting of particles of at least one metal of the platinum family which is supported on a particulate support with high specific surface.
According to other characteristics: -the particulate support is a zeolite and/or alumina and/or silica; the catalyst is regenerated by temperature 4 rise and/or pressure decrease, possibly below atmospheric pressure, and/or by means of a diluting flow of the gas to be purified or of a gas originating from the distillation column, for example nitrogen produced in the double column; -the catalytic conversion agent is hydrogen or carbon monoxide.
-2ri It is also an object of the invention to provide an apparatus for the production of argon enabling to carry ut such process. This apparatus, of the type CMMPMiV a double column for air distillation connected to a column for the production of impure argon by distillation, a compressor for impure argon which pushes towards an apparatus for the catalytic conversion of oxygen, means for removing products resulting from the conversion, and a denitrogenation column, is characterized in that the column for the production of impure argon I includes at least 80, typically between about 80 and 110 theoretical plates, and in that the apparatus for catalytic conversion -ef A es- a catalytic bed
A
consisting of particles of at least one metal of the platinum family which is supported on a particulate support with high specific surface and operates at about room temperature.
According to other characteristics: -the particulate support is a zeolite and/or alumina and/or silica- -the apparatus A cpr= a heat exchanger placing in counter-current heat exchange relationship the impure argon from the column for the production of impure argon and the gas which is produced by said removing means; -the inlet of the apparatus for catalytic conversion is connected to a source of hydrogen or carbon monoxide in excess; -the apparatusA p at least one catalytic bed and one bed of adsorbent material defining said removing means, disposed by being superposed over one another in aE least the same vessel.
0 t 4~4,
A~
BRIEF DESCRIPTION OF DRAWINGS An embodiment of the invention will now be described with reference to the annexed drawing, in which: The single figure is a schematic illustration of an apparatus for the production of argon ac'cording to the invention.
DESCRIPTION OF PREFERRED EMBODIMENTS t rt The pressures mentioned in the present fit* r! description are absolute pressures.
The drawing illustrates an apparatus for air distillation adapted to produce at low pressure, i.e. at about atmospheric pressure, gaseous oxygen GO, liquid oxygen LO, gaseous nitrogen GN and, at a pressure of the order of 1.8 x 105 Pa, liquid argon LA. This apparatus includes, in known manner, a double distillation column 1 of the type with "minaret",' a column 2 for the production of impure argon, a device 3 for separating oxygen from impure argon, and a denitrogenation column 4.
Except for the number of theoretical plates of column 2, the distillation parts 1, 2 and 4 are known and will only be described briefly.
Double column 1 comprises a mean pressure column 5 operating for example at about 6 x 10 Pa, surmounted by a low pressure column 6, operating for example slightly above atmospheric pressure.
The air to be treated is introduced at the base of column 5, and the head vapor (nitrogen) of the latter is placed in heat exchange relationship with the bottom liquid (oxygen) of column 6 by means of vaporiser condenser 7.
-4-
I
Column 6 receives, at increasing levels, three expanded liquids taken respectively from the base, at an intermediate level and at the top of column 5, namely "rich liquid" RL (oxygen enriched air), "inferior poor liquid" IPL (impure nitrogen) and "superior poor liquid" SPL (practically pure nitrogen). A residual gas W (impure nitrogen) is withdrawp from column 6 at the point of injection of inferior poor liquid, and the nitrogen produced is withdrawn at the top of minaret 8, which constitutes (titA gas is taken from LP 6, at a level lower than the injection of rich liquid, via duct 9, so called "argon bleeding", and is introduced at the base of the argon column 2. The bottom liquid from this column 2 is sent to the same level of column 6 4 #4t& via return duct 10. Column 2 includes a head condenser 'll cooled with expanded rich liquid, and produces impure argon at the top via duct 12. The rich liquid which is vaporised in condenser 11 is sent into column 6.
Column 2 includes at least 80 theoretical plates, typically between about 80 and 110 theoretical plates, so that it is advantageous, for purposes of loss of charge, to provide it with a lining, such as an organized lining, advantageously a cross-ondulated lining, such as described in the 0$ document WO-A-89/10527. The impure argon thus contains about 97% argon, 3% nitrogen and less than 1000 vpm (parts per million in vapor phase) oxygen, typically between about 100 and 1000 vpm depending on the number of theoretical plates.
Device 3 successively comprises a counter-current heat exchanger 13, a,coMpressor 14, a water cooler 15, a source of hydrogen 16 under a pressure typically of about 6 x 10' Pa, and at least 2 bottles 17 mounted in parallel. Each of these bottles contain two beds disposed in series, one above the other, namely in the lower part, a first bed 18 of a catalyst which will be more specifically described later, and in the upper part, a second bed 19 of a water adsorbent such as alumina.
The impure argon which circulates in duct 12 is warmed up to about 300 C in exchanger 13, compressed at about 6 x 10 Pa at 14, cooled to about +150 C at 15, mixed to a current of hydrogen under about 6 x 10 Pa supplied by source 16, and ftt introduced at the base of one of the two bottles 17.
Hydrogen is in excess with respect to the stoichiometry of the reaction 2H 2 02 2H 2 0, and all the oxygen is thus converted into water in bed 18. The gas which originates from this bed, "titi containing solely argon, nitrogen, hydrogen and water, is dried and partially purified in bed 19, and exits from bottle 17 warmed by an amount of about 200 C, i.e, at about 350 C. This gas is thereafter cooled in exchanger 13 in counter-current with impure argon, condensed in a vat condensor 20 of column 4, expanded at about 1.8 x 10 Pa in expansion valve 21 and injected at an intermediate level into column 4.
The latter includes a head condensor 22 cooled with expanded inferior poor liquid, which, after vaporization, is sent to column 6, and produces on S the one hand, at the bottom, liquid argon having a very high purity of oxygen and hydrogen, which could reach a value of the order of ppb (part per billion according to the English terminology, i.e. 10 ppm) for the whole of these two elements. Column 4 also produces at the top, via a duct 23, a residual gas consisting of nitrogen and hydrogen., -6while a bottle 17 operates in conversion/drying, the other (for example its bed 19) is regenerated. This regeneration is carried out by means of a temperature rise and/or a pressure decrease, possibly below atmospheric pressure, and/or a diluting flow with the gas to be purified or having been purified, or with a gas from the distillation column, ,for example nitrogen produced in the double column.
The catalyst -included in 'beds 18 is formed* of particles of at least one metal of the platinum t( T litI family, i.e. group VIII of the periodic 1 14 f classification of the elements, which group consists of ruthenium rhodium (Rh)r palladium (Pd), f l5 osmium iridium (Ir) and platinum (Pt), it supported on a particulate s-upport with high specific I t surface advantageously consisting of a zeolite, alumina or" silica.
The operation of supporting the metallic element is carried out according to techniques, known per se, of ion exchange and/or impregnation.
The process described above enables to prevent any risk of excessive warming up of the purifying bottle 17, and requires no cooling device with outside refrigerating agent between the beds 18 and 19, which may thus advantageously be superposed within the same bottle.
C if As a variant, hydrogen may be replaced by carbon monoxide in which case the oxygen is converted into carbon dioxide CO 2 in bed 18 and CO 2 is rg'moved by adsorption in bed 19, the latter being of course made of an appropriate adsorbent such as a moleom.lar sieve. The excess of CO is removed with nitrogen in column 4.
-7-
LI

Claims (13)

1. Process for the production of argon by air distillation in a double column connected to a column for the production of impure argon, removal of the oxygen present in impure argon by catalytic conversion in the presence of a reducing agent in excess, removal of the product of this conversion by adsorption, and removal of the excess reducing agent and remaining nitrogen gas by distillation, which fe~r-u( es -eempr-ISe. producing impure argon having an oxygen content lower than 1000 vpm by distillation, and carrying out the catalytic conversion, at a temperature near room temperature, by passing impure 15 argon and the reducing agent in excess over a I catalytic bed consisting of particles of at least one metal of the platinum family supported on a particulate support with high specific surface.
2. Process according to claim 1, wherein the impure argon has an oxygen content between about 100 and 1000 vpm. (;So2.
3. Process according toelalm wherein the particulate support is a zeolite and/or alumina and/or silica. C;vf one Ct, I iudes
4. Process according t9Acam 2, wLich A. ee,.e sA~ regenerating the catalyst by means of a temperature rise and/or a pressure decrease, possibly below atmospheric pressure, and/or a dilution flow with the gas to be purified or having been purified or with a gas from the distillation column, for example nitrogen produced in the double column.
Process accordcingtoA wherein the reducing agent is hydrogen or carbon monoxide.
6. Apparatus for the production of argon, of the type, eempriinj a double column for air distillation connected to a column for the production -8- LA I I of impure argon by distillation, a compressor for impure argon pressing towards a means for the catalytic conversion of oxygen, means for removing conversion products, and a column for denitrogenation, wherein said column for the production of impure argon includes at least theoretical.plates, and the apparatus for catalytic conversipnA .'--SeeS a catalytic bed formed of at least one metal of the platinum family which is supported on a particulate support with high specific surface, and is carried out in the vicinity of room temperature. 4 ~5t a I 4 t
7. Apparatus according to claim 6, wherein the column for the production of impure argon includes between about 80 and 110 theoretical plates. claims (a or 7
8. Apparatus according to 4 elaim 67 wherein the particulate support is a zeolite and/or alumina .n a 4 I 4 4 4 Sa y one of c irvl 6 1s)
9. Apparatus according toeaim-6, which mpri A a heat exchanger enabling to place impure argon from the column for the production of impure argon and the gas produced by said removing means in counter-current heat exchange. a oOF s 6-
10. Apparatus according to, -ejam i--27 wherein the inlet of the, device for catalytic conversion is connected to a source of hydrogen or a carbon monoxide. <Qn/ one of cJ.161s 6 -to S11 i.
Apparatus according to 4 .elaim which -comprse at least one catalytic bed and an adsorbent bed defining said removing means, disposed over one another in at least the same vessel. -9- 1 LU
12. Process according to claim 1 substantially as hereinbefore described with reference to the accompanying drawing.
13. Apparatus according to claim 6 substantially as hereinbefore described with reference to the accompanying drawing. DATED: 23rd March, 1992 PHILLIPS ORMONDE FITZPATRICK Attorneys for: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE 1 U- .Il IIi PROCESS AND APPARATUS FOR THE PRODUCTION OF ARGON ABSTRACT OF THE DISCLOSURE In this process which involves air distillation in a double column connected to a distillation column for the production of impure argon, removal of the oxygen present in impure argon by catalytic conversion, removal of the product Ct I 1 obtained by this conversion by adsorption, and removal by distillation of the remaining nitrogen, S impure argon having an oxygen content lower than about 1000 vpm is produced by distillation, and catalytic conversion is carried out by passing S impure argon and excess hydrogen at about room temperature over a catalytic bed consisting of particles of at least one metal of the platinum family which is supported on a particulate support with high specific surface. s 30 I, o;t *l
AU13140/92A 1991-04-16 1992-03-24 Process and apparatus for the production of argon Ceased AU659630B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9104623A FR2675567A1 (en) 1991-04-16 1991-04-16 PROCESS AND PLANT FOR THE PRODUCTION OF ARGON.
FR9104623 1991-04-16

Publications (2)

Publication Number Publication Date
AU1314092A AU1314092A (en) 1992-10-22
AU659630B2 true AU659630B2 (en) 1995-05-25

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AU13140/92A Ceased AU659630B2 (en) 1991-04-16 1992-03-24 Process and apparatus for the production of argon

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EP (1) EP0509871A1 (en)
JP (1) JPH05262506A (en)
AU (1) AU659630B2 (en)
CA (1) CA2064505A1 (en)
FR (1) FR2675567A1 (en)
ZA (1) ZA922111B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3020842B2 (en) * 1995-09-05 2000-03-15 日本エア・リキード株式会社 Argon purification method and apparatus
FR2776206A1 (en) * 1998-03-19 1999-09-24 Air Liquide Air distillation device, particularly for producing argon
FR2807150B1 (en) * 2000-04-04 2002-10-18 Air Liquide PROCESS AND APPARATUS FOR PRODUCING OXYGEN ENRICHED FLUID BY CRYOGENIC DISTILLATION
FR2831953B1 (en) * 2001-11-05 2004-09-24 Air Liquide AIR DISTILLATION PROCESS WITH ARGON PRODUCTION AND CORRESPONDING AIR DISTILLATION SYSTEM
FR2848652A1 (en) * 2002-12-12 2004-06-18 Air Liquide Cryogenic distillation procedure for producing argon includes condensation of flow containing at least 70 per cent mol. of nitrogen by indirect heat exchange with argon-rich liquid flow
DE102009004520A1 (en) 2009-01-09 2010-07-15 Budke, Gudula Brush for cleaning paved surfaces, is provided with brush head holder, where connections are provided for detachable fixing of brush heads with bristles
JP2012106904A (en) * 2010-10-29 2012-06-07 Sumitomo Seika Chem Co Ltd Method and apparatus for purifying argon gas

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3401197A1 (en) * 1984-01-14 1985-07-18 Basf Ag, 6700 Ludwigshafen Process for catalytic ultrapurification of inert gases

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63267878A (en) * 1987-04-24 1988-11-04 株式会社日立製作所 Argon purifying method recovering argon and hydrogen in purified argon tower waste gas
DE3806523A1 (en) * 1988-03-01 1989-09-14 Linde Ag METHOD FOR CLEANING ROHARGON

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3401197A1 (en) * 1984-01-14 1985-07-18 Basf Ag, 6700 Ludwigshafen Process for catalytic ultrapurification of inert gases

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FR2675567A1 (en) 1992-10-23
JPH05262506A (en) 1993-10-12
AU1314092A (en) 1992-10-22
EP0509871A1 (en) 1992-10-21
CA2064505A1 (en) 1992-10-17
ZA922111B (en) 1992-11-25

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