JPS61198637A - 半導体単結晶ウエハ−の製法 - Google Patents

半導体単結晶ウエハ−の製法

Info

Publication number
JPS61198637A
JPS61198637A JP61013301A JP1330186A JPS61198637A JP S61198637 A JPS61198637 A JP S61198637A JP 61013301 A JP61013301 A JP 61013301A JP 1330186 A JP1330186 A JP 1330186A JP S61198637 A JPS61198637 A JP S61198637A
Authority
JP
Japan
Prior art keywords
wafer
semiconductor
crystal
single crystal
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61013301A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235456B2 (show.php
Inventor
Mitsuru Sakamoto
充 坂本
Kuniyuki Hamano
浜野　邦幸
Masahiko Nakamae
正彦 中前
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61013301A priority Critical patent/JPS61198637A/ja
Publication of JPS61198637A publication Critical patent/JPS61198637A/ja
Publication of JPH0235456B2 publication Critical patent/JPH0235456B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P36/03—

Landscapes

  • Drying Of Semiconductors (AREA)
JP61013301A 1986-01-24 1986-01-24 半導体単結晶ウエハ−の製法 Granted JPS61198637A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61013301A JPS61198637A (ja) 1986-01-24 1986-01-24 半導体単結晶ウエハ−の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61013301A JPS61198637A (ja) 1986-01-24 1986-01-24 半導体単結晶ウエハ−の製法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP9669980A Division JPS5721826A (en) 1980-07-15 1980-07-15 Manufacture of semiconductor single crystal wafer

Publications (2)

Publication Number Publication Date
JPS61198637A true JPS61198637A (ja) 1986-09-03
JPH0235456B2 JPH0235456B2 (show.php) 1990-08-10

Family

ID=11829359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61013301A Granted JPS61198637A (ja) 1986-01-24 1986-01-24 半導体単結晶ウエハ−の製法

Country Status (1)

Country Link
JP (1) JPS61198637A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007317950A (ja) * 2006-05-26 2007-12-06 Toyota Motor Corp 半導体基板製造方法及び半導体基板

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0339203U (show.php) * 1989-08-28 1991-04-16

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5487066A (en) * 1977-12-22 1979-07-11 Mitsubishi Electric Corp Semiconductor wafer
JPS5721826A (en) * 1980-07-15 1982-02-04 Nec Corp Manufacture of semiconductor single crystal wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5487066A (en) * 1977-12-22 1979-07-11 Mitsubishi Electric Corp Semiconductor wafer
JPS5721826A (en) * 1980-07-15 1982-02-04 Nec Corp Manufacture of semiconductor single crystal wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007317950A (ja) * 2006-05-26 2007-12-06 Toyota Motor Corp 半導体基板製造方法及び半導体基板

Also Published As

Publication number Publication date
JPH0235456B2 (show.php) 1990-08-10

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