JPS6127900B2 - - Google Patents

Info

Publication number
JPS6127900B2
JPS6127900B2 JP55096699A JP9669980A JPS6127900B2 JP S6127900 B2 JPS6127900 B2 JP S6127900B2 JP 55096699 A JP55096699 A JP 55096699A JP 9669980 A JP9669980 A JP 9669980A JP S6127900 B2 JPS6127900 B2 JP S6127900B2
Authority
JP
Japan
Prior art keywords
wafer
semiconductor
back surface
crystal
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55096699A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5721826A (en
Inventor
Mitsuru Sakamoto
Kunyuki Hamano
Masahiko Nakamae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP9669980A priority Critical patent/JPS5721826A/ja
Publication of JPS5721826A publication Critical patent/JPS5721826A/ja
Publication of JPS6127900B2 publication Critical patent/JPS6127900B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P36/03—

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9669980A 1980-07-15 1980-07-15 Manufacture of semiconductor single crystal wafer Granted JPS5721826A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9669980A JPS5721826A (en) 1980-07-15 1980-07-15 Manufacture of semiconductor single crystal wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9669980A JPS5721826A (en) 1980-07-15 1980-07-15 Manufacture of semiconductor single crystal wafer

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP61013301A Division JPS61198637A (ja) 1986-01-24 1986-01-24 半導体単結晶ウエハ−の製法

Publications (2)

Publication Number Publication Date
JPS5721826A JPS5721826A (en) 1982-02-04
JPS6127900B2 true JPS6127900B2 (show.php) 1986-06-27

Family

ID=14172005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9669980A Granted JPS5721826A (en) 1980-07-15 1980-07-15 Manufacture of semiconductor single crystal wafer

Country Status (1)

Country Link
JP (1) JPS5721826A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009206431A (ja) * 2008-02-29 2009-09-10 Sumco Corp シリコン基板とその製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938492U (ja) * 1982-08-31 1984-03-10 富士通株式会社 プラズマデイスプレイパネルの駆動回路
JPS61198637A (ja) * 1986-01-24 1986-09-03 Nec Corp 半導体単結晶ウエハ−の製法
KR20030002847A (ko) * 2001-06-29 2003-01-09 주식회사 하이닉스반도체 반도체 소자의 제조 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009206431A (ja) * 2008-02-29 2009-09-10 Sumco Corp シリコン基板とその製造方法

Also Published As

Publication number Publication date
JPS5721826A (en) 1982-02-04

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