JPS61194247U - - Google Patents
Info
- Publication number
- JPS61194247U JPS61194247U JP7645685U JP7645685U JPS61194247U JP S61194247 U JPS61194247 U JP S61194247U JP 7645685 U JP7645685 U JP 7645685U JP 7645685 U JP7645685 U JP 7645685U JP S61194247 U JPS61194247 U JP S61194247U
- Authority
- JP
- Japan
- Prior art keywords
- section
- sample
- electron beam
- diffraction image
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 4
- 238000003384 imaging method Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7645685U JPS61194247U (fr) | 1985-05-24 | 1985-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7645685U JPS61194247U (fr) | 1985-05-24 | 1985-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61194247U true JPS61194247U (fr) | 1986-12-03 |
Family
ID=30618612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7645685U Pending JPS61194247U (fr) | 1985-05-24 | 1985-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61194247U (fr) |
-
1985
- 1985-05-24 JP JP7645685U patent/JPS61194247U/ja active Pending
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