JPS6119103B2 - - Google Patents

Info

Publication number
JPS6119103B2
JPS6119103B2 JP54140596A JP14059679A JPS6119103B2 JP S6119103 B2 JPS6119103 B2 JP S6119103B2 JP 54140596 A JP54140596 A JP 54140596A JP 14059679 A JP14059679 A JP 14059679A JP S6119103 B2 JPS6119103 B2 JP S6119103B2
Authority
JP
Japan
Prior art keywords
heat treatment
semiconductor substrate
sputtering
substrate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54140596A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5664444A (en
Inventor
Toshio Sonobe
Yukio Tsuzuki
Kunihiko Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP14059679A priority Critical patent/JPS5664444A/ja
Publication of JPS5664444A publication Critical patent/JPS5664444A/ja
Publication of JPS6119103B2 publication Critical patent/JPS6119103B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/2636—Bombardment with radiation with high-energy radiation for heating, e.g. electron beam heating

Landscapes

  • Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
JP14059679A 1979-10-31 1979-10-31 Manufacture of semiconductor device Granted JPS5664444A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14059679A JPS5664444A (en) 1979-10-31 1979-10-31 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14059679A JPS5664444A (en) 1979-10-31 1979-10-31 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5664444A JPS5664444A (en) 1981-06-01
JPS6119103B2 true JPS6119103B2 (enrdf_load_stackoverflow) 1986-05-15

Family

ID=15272366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14059679A Granted JPS5664444A (en) 1979-10-31 1979-10-31 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5664444A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5433920A (en) * 1977-08-19 1979-03-13 Sharp Corp Carburetor

Also Published As

Publication number Publication date
JPS5664444A (en) 1981-06-01

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