JPS61183198A - ダイヤモンド膜の製法 - Google Patents
ダイヤモンド膜の製法Info
- Publication number
- JPS61183198A JPS61183198A JP59278645A JP27864584A JPS61183198A JP S61183198 A JPS61183198 A JP S61183198A JP 59278645 A JP59278645 A JP 59278645A JP 27864584 A JP27864584 A JP 27864584A JP S61183198 A JPS61183198 A JP S61183198A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- gas
- film
- hydrogen
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010432 diamond Substances 0.000 title claims description 47
- 229910003460 diamond Inorganic materials 0.000 title claims description 46
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000007789 gas Substances 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 239000012808 vapor phase Substances 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 23
- 229930195733 hydrocarbon Natural products 0.000 description 20
- 150000002430 hydrocarbons Chemical class 0.000 description 20
- 229910052739 hydrogen Inorganic materials 0.000 description 15
- 239000001257 hydrogen Substances 0.000 description 14
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 13
- 239000004215 Carbon black (E152) Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 10
- 229910052760 oxygen Inorganic materials 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- -1 ethylene, propylene Chemical group 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- PMPVIKIVABFJJI-UHFFFAOYSA-N Cyclobutane Chemical compound C1CCC1 PMPVIKIVABFJJI-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 208000002564 X-linked cardiac valvular dysplasia Diseases 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000002927 oxygen compounds Chemical class 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59278645A JPS61183198A (ja) | 1984-12-29 | 1984-12-29 | ダイヤモンド膜の製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59278645A JPS61183198A (ja) | 1984-12-29 | 1984-12-29 | ダイヤモンド膜の製法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60170020A Division JPS61158899A (ja) | 1985-07-31 | 1985-07-31 | ダイヤモンド膜の製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61183198A true JPS61183198A (ja) | 1986-08-15 |
| JPH0566359B2 JPH0566359B2 (enrdf_load_stackoverflow) | 1993-09-21 |
Family
ID=17600162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59278645A Granted JPS61183198A (ja) | 1984-12-29 | 1984-12-29 | ダイヤモンド膜の製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61183198A (enrdf_load_stackoverflow) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1987003307A1 (en) * | 1985-11-25 | 1987-06-04 | Showa Denko Kabushiki Kaisha | Process for synthesizing diamond |
| JPS62174378A (ja) * | 1986-01-27 | 1987-07-31 | Meijiyou Univ | 硬質炭素薄膜の形成方法 |
| JPS63166733A (ja) * | 1986-12-27 | 1988-07-09 | Kyocera Corp | ダイヤモンド膜の製造方法 |
| JPS63166798A (ja) * | 1986-12-27 | 1988-07-09 | Kyocera Corp | ダイヤモンド膜の製造方法 |
| JPS6433096A (en) * | 1987-04-03 | 1989-02-02 | Fujitsu Ltd | Gaseous phase synthesis for diamond |
| JPH01192794A (ja) * | 1988-01-26 | 1989-08-02 | Nachi Fujikoshi Corp | ダイヤモンドの気相合成法 |
| US4869924A (en) * | 1987-09-01 | 1989-09-26 | Idemitsu Petrochemical Company Limited | Method for synthesis of diamond and apparatus therefor |
| JPH01246115A (ja) * | 1988-03-26 | 1989-10-02 | Semiconductor Energy Lab Co Ltd | 炭素または炭素を主成分とする被膜を形成する方法 |
| JPH01308896A (ja) * | 1988-02-01 | 1989-12-13 | Sumitomo Electric Ind Ltd | ダイヤモンドおよびその気相合成法 |
| JPH0244096A (ja) * | 1988-05-02 | 1990-02-14 | Nachi Fujikoshi Corp | ダイヤモンドの気相合成方法 |
| JPH02233590A (ja) * | 1989-03-07 | 1990-09-17 | Sumitomo Electric Ind Ltd | 単結晶ダイヤモンド層形成法 |
| JPH07300394A (ja) * | 1988-02-01 | 1995-11-14 | Sumitomo Electric Ind Ltd | ダイヤモンドおよびその気相合成法 |
| JP2006161075A (ja) * | 2004-12-03 | 2006-06-22 | Shinko Seiki Co Ltd | 硬質炭素膜およびその形成方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3030187A (en) * | 1958-07-23 | 1962-04-17 | Union Carbide Corp | Synthesis of diamond |
| US3030188A (en) * | 1958-07-23 | 1962-04-17 | Union Carbide Corp | Synthesis of diamond |
| JPS58135117A (ja) * | 1982-01-29 | 1983-08-11 | Natl Inst For Res In Inorg Mater | ダイヤモンドの製造法 |
| JPH0566360A (ja) * | 1991-09-02 | 1993-03-19 | Asahi Optical Co Ltd | 特殊写真撮影レンズ |
-
1984
- 1984-12-29 JP JP59278645A patent/JPS61183198A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3030187A (en) * | 1958-07-23 | 1962-04-17 | Union Carbide Corp | Synthesis of diamond |
| US3030188A (en) * | 1958-07-23 | 1962-04-17 | Union Carbide Corp | Synthesis of diamond |
| JPS58135117A (ja) * | 1982-01-29 | 1983-08-11 | Natl Inst For Res In Inorg Mater | ダイヤモンドの製造法 |
| JPH0566360A (ja) * | 1991-09-02 | 1993-03-19 | Asahi Optical Co Ltd | 特殊写真撮影レンズ |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1987003307A1 (en) * | 1985-11-25 | 1987-06-04 | Showa Denko Kabushiki Kaisha | Process for synthesizing diamond |
| JPS62174378A (ja) * | 1986-01-27 | 1987-07-31 | Meijiyou Univ | 硬質炭素薄膜の形成方法 |
| JPS63166733A (ja) * | 1986-12-27 | 1988-07-09 | Kyocera Corp | ダイヤモンド膜の製造方法 |
| JPS63166798A (ja) * | 1986-12-27 | 1988-07-09 | Kyocera Corp | ダイヤモンド膜の製造方法 |
| JPS6433096A (en) * | 1987-04-03 | 1989-02-02 | Fujitsu Ltd | Gaseous phase synthesis for diamond |
| US4869924A (en) * | 1987-09-01 | 1989-09-26 | Idemitsu Petrochemical Company Limited | Method for synthesis of diamond and apparatus therefor |
| JPH01192794A (ja) * | 1988-01-26 | 1989-08-02 | Nachi Fujikoshi Corp | ダイヤモンドの気相合成法 |
| JPH01308896A (ja) * | 1988-02-01 | 1989-12-13 | Sumitomo Electric Ind Ltd | ダイヤモンドおよびその気相合成法 |
| JPH07300394A (ja) * | 1988-02-01 | 1995-11-14 | Sumitomo Electric Ind Ltd | ダイヤモンドおよびその気相合成法 |
| JPH01246115A (ja) * | 1988-03-26 | 1989-10-02 | Semiconductor Energy Lab Co Ltd | 炭素または炭素を主成分とする被膜を形成する方法 |
| JPH0244096A (ja) * | 1988-05-02 | 1990-02-14 | Nachi Fujikoshi Corp | ダイヤモンドの気相合成方法 |
| JPH02233590A (ja) * | 1989-03-07 | 1990-09-17 | Sumitomo Electric Ind Ltd | 単結晶ダイヤモンド層形成法 |
| US5400738A (en) * | 1989-03-07 | 1995-03-28 | Sumitomo Electric Industries, Ltd. | Method for producing single crystal diamond film |
| JP2006161075A (ja) * | 2004-12-03 | 2006-06-22 | Shinko Seiki Co Ltd | 硬質炭素膜およびその形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0566359B2 (enrdf_load_stackoverflow) | 1993-09-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |