JPS6117141B2 - - Google Patents

Info

Publication number
JPS6117141B2
JPS6117141B2 JP3647280A JP3647280A JPS6117141B2 JP S6117141 B2 JPS6117141 B2 JP S6117141B2 JP 3647280 A JP3647280 A JP 3647280A JP 3647280 A JP3647280 A JP 3647280A JP S6117141 B2 JPS6117141 B2 JP S6117141B2
Authority
JP
Japan
Prior art keywords
wafer
vacuum suction
probe
suction table
polishing jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3647280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56133843A (en
Inventor
Akitoshi Tetsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3647280A priority Critical patent/JPS56133843A/ja
Publication of JPS56133843A publication Critical patent/JPS56133843A/ja
Publication of JPS6117141B2 publication Critical patent/JPS6117141B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3647280A 1980-03-21 1980-03-21 Probe grinder for probe card Granted JPS56133843A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3647280A JPS56133843A (en) 1980-03-21 1980-03-21 Probe grinder for probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3647280A JPS56133843A (en) 1980-03-21 1980-03-21 Probe grinder for probe card

Publications (2)

Publication Number Publication Date
JPS56133843A JPS56133843A (en) 1981-10-20
JPS6117141B2 true JPS6117141B2 (ko) 1986-05-06

Family

ID=12470751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3647280A Granted JPS56133843A (en) 1980-03-21 1980-03-21 Probe grinder for probe card

Country Status (1)

Country Link
JP (1) JPS56133843A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6155338U (ko) * 1984-09-14 1986-04-14
JPS6194347U (ko) * 1984-11-26 1986-06-18
JP5381118B2 (ja) * 2009-01-21 2014-01-08 東京エレクトロン株式会社 プローブ装置

Also Published As

Publication number Publication date
JPS56133843A (en) 1981-10-20

Similar Documents

Publication Publication Date Title
KR100377021B1 (ko) 프로브 단자의 클리닝 방법, 프로빙 방법 및 프로브 장치
KR101331353B1 (ko) 프로브 카드를 세척하기 위한 방법 및 장치
US7362116B1 (en) Method for probing impact sensitive and thin layered substrate
KR100745861B1 (ko) 재치대의 정전기 제거 기구 및 검사 장치
JPS6117141B2 (ko)
JPH10163281A (ja) 半導体素子およびその製造方法
JP2006237413A (ja) プローブ針のクリーニング方法、これに用いるウエハおよびウエハプローバ装置
JPH05136219A (ja) 検査装置
JP2022039650A (ja) チップ電子部品検査用のローラ電極接触子を備えた装置
US9915699B2 (en) Integrated fan-out pillar probe system
JPS61152034A (ja) ウエハプロ−バ装置
JPH03290940A (ja) プロービングマシンのウエハ載置台
JPH03220742A (ja) プロービングマシン
JPH05288802A (ja) 半導体チップの電気特性検査方法およびウェーハプローバ
JP2000164649A (ja) プローバの触針クリーニング機構
JPS63237429A (ja) ウエハプロ−バ
JP6593251B2 (ja) 半導体検査装置
JPS63170933A (ja) ウエ−ハプロ−バ
JPH0438847A (ja) ウエハプローバ
JPS63292640A (ja) ウエハプロ−バ
JP2717884B2 (ja) 半導体ウエハ測定方法
JP2021063676A (ja) プローバ装置、及び計測用治具
CN112924847A (zh) 晶圆测试装置及晶圆测试方法
JPS62219937A (ja) 半導体ウエ−ハ
JPH0590357A (ja) 半導体ウエーハの電気特性検査方法