JPS6116758B2 - - Google Patents

Info

Publication number
JPS6116758B2
JPS6116758B2 JP54133566A JP13356679A JPS6116758B2 JP S6116758 B2 JPS6116758 B2 JP S6116758B2 JP 54133566 A JP54133566 A JP 54133566A JP 13356679 A JP13356679 A JP 13356679A JP S6116758 B2 JPS6116758 B2 JP S6116758B2
Authority
JP
Japan
Prior art keywords
thin film
film
polycrystalline
protective film
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54133566A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5659694A (en
Inventor
Koichiro Ootori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP13356679A priority Critical patent/JPS5659694A/ja
Publication of JPS5659694A publication Critical patent/JPS5659694A/ja
Publication of JPS6116758B2 publication Critical patent/JPS6116758B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Recrystallisation Techniques (AREA)
JP13356679A 1979-10-18 1979-10-18 Manufacture of thin film Granted JPS5659694A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13356679A JPS5659694A (en) 1979-10-18 1979-10-18 Manufacture of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13356679A JPS5659694A (en) 1979-10-18 1979-10-18 Manufacture of thin film

Publications (2)

Publication Number Publication Date
JPS5659694A JPS5659694A (en) 1981-05-23
JPS6116758B2 true JPS6116758B2 (enExample) 1986-05-01

Family

ID=15107792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13356679A Granted JPS5659694A (en) 1979-10-18 1979-10-18 Manufacture of thin film

Country Status (1)

Country Link
JP (1) JPS5659694A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57208124A (en) * 1981-06-18 1982-12-21 Fujitsu Ltd Manufacture of semiconductor device
JPS5812320A (ja) * 1981-07-15 1983-01-24 Fujitsu Ltd 半導体装置の製造方法
JPS5855395A (ja) * 1981-09-30 1983-04-01 Toshiba Corp シリコン単結晶膜の成長方法
JPS58112333A (ja) * 1981-12-26 1983-07-04 Fujitsu Ltd 半導体装置の製造方法
JPS6017583Y2 (ja) * 1982-07-23 1985-05-29 フシマン株式会社 自力式パイロツト作動型調整弁
JPS60200887A (ja) * 1984-03-23 1985-10-11 Nippon Sheet Glass Co Ltd 磁性薄膜の製造方法
JPH0824103B2 (ja) * 1984-11-26 1996-03-06 ソニー株式会社 薄膜トランジスタの製造方法
JPS6384013A (ja) * 1986-09-27 1988-04-14 Agency Of Ind Science & Technol 半導体結晶層の製造方法
US5643801A (en) 1992-11-06 1997-07-01 Semiconductor Energy Laboratory Co., Ltd. Laser processing method and alignment

Also Published As

Publication number Publication date
JPS5659694A (en) 1981-05-23

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