JPS61147541A - 良品ペレツトの判別装置 - Google Patents

良品ペレツトの判別装置

Info

Publication number
JPS61147541A
JPS61147541A JP59268475A JP26847584A JPS61147541A JP S61147541 A JPS61147541 A JP S61147541A JP 59268475 A JP59268475 A JP 59268475A JP 26847584 A JP26847584 A JP 26847584A JP S61147541 A JPS61147541 A JP S61147541A
Authority
JP
Japan
Prior art keywords
pellet
defective
pellets
mark
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59268475A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548621B2 (enExample
Inventor
Makoto Arie
誠 有江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Mechatronics Co Ltd
Original Assignee
Toshiba Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Seiki Co Ltd filed Critical Toshiba Seiki Co Ltd
Priority to JP59268475A priority Critical patent/JPS61147541A/ja
Publication of JPS61147541A publication Critical patent/JPS61147541A/ja
Publication of JPH0548621B2 publication Critical patent/JPH0548621B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP59268475A 1984-12-21 1984-12-21 良品ペレツトの判別装置 Granted JPS61147541A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59268475A JPS61147541A (ja) 1984-12-21 1984-12-21 良品ペレツトの判別装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59268475A JPS61147541A (ja) 1984-12-21 1984-12-21 良品ペレツトの判別装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2868493A Division JPH0648701B2 (ja) 1993-01-25 1993-01-25 良品ペレットの判別装置

Publications (2)

Publication Number Publication Date
JPS61147541A true JPS61147541A (ja) 1986-07-05
JPH0548621B2 JPH0548621B2 (enExample) 1993-07-22

Family

ID=17459015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59268475A Granted JPS61147541A (ja) 1984-12-21 1984-12-21 良品ペレツトの判別装置

Country Status (1)

Country Link
JP (1) JPS61147541A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58125837A (ja) * 1982-01-22 1983-07-27 Mitsubishi Electric Corp 自動ダイボンダのペレツト位置決め装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58125837A (ja) * 1982-01-22 1983-07-27 Mitsubishi Electric Corp 自動ダイボンダのペレツト位置決め装置

Also Published As

Publication number Publication date
JPH0548621B2 (enExample) 1993-07-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees