JPH0548621B2 - - Google Patents

Info

Publication number
JPH0548621B2
JPH0548621B2 JP59268475A JP26847584A JPH0548621B2 JP H0548621 B2 JPH0548621 B2 JP H0548621B2 JP 59268475 A JP59268475 A JP 59268475A JP 26847584 A JP26847584 A JP 26847584A JP H0548621 B2 JPH0548621 B2 JP H0548621B2
Authority
JP
Japan
Prior art keywords
defective
pellet
light amount
value
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP59268475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61147541A (ja
Inventor
Makoto Arie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Mechatronics Co Ltd
Original Assignee
Toshiba Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Seiki Co Ltd filed Critical Toshiba Seiki Co Ltd
Priority to JP59268475A priority Critical patent/JPS61147541A/ja
Publication of JPS61147541A publication Critical patent/JPS61147541A/ja
Publication of JPH0548621B2 publication Critical patent/JPH0548621B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP59268475A 1984-12-21 1984-12-21 良品ペレツトの判別装置 Granted JPS61147541A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59268475A JPS61147541A (ja) 1984-12-21 1984-12-21 良品ペレツトの判別装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59268475A JPS61147541A (ja) 1984-12-21 1984-12-21 良品ペレツトの判別装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2868493A Division JPH0648701B2 (ja) 1993-01-25 1993-01-25 良品ペレットの判別装置

Publications (2)

Publication Number Publication Date
JPS61147541A JPS61147541A (ja) 1986-07-05
JPH0548621B2 true JPH0548621B2 (enExample) 1993-07-22

Family

ID=17459015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59268475A Granted JPS61147541A (ja) 1984-12-21 1984-12-21 良品ペレツトの判別装置

Country Status (1)

Country Link
JP (1) JPS61147541A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58125837A (ja) * 1982-01-22 1983-07-27 Mitsubishi Electric Corp 自動ダイボンダのペレツト位置決め装置

Also Published As

Publication number Publication date
JPS61147541A (ja) 1986-07-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees