JPS61147501A - 薄膜サ−ミスタ - Google Patents

薄膜サ−ミスタ

Info

Publication number
JPS61147501A
JPS61147501A JP59269949A JP26994984A JPS61147501A JP S61147501 A JPS61147501 A JP S61147501A JP 59269949 A JP59269949 A JP 59269949A JP 26994984 A JP26994984 A JP 26994984A JP S61147501 A JPS61147501 A JP S61147501A
Authority
JP
Japan
Prior art keywords
film
thin film
temperature
sensitive resistor
insulating substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59269949A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334202B2 (enExample
Inventor
彪 長井
一志 山本
俊行 石黒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59269949A priority Critical patent/JPS61147501A/ja
Publication of JPS61147501A publication Critical patent/JPS61147501A/ja
Publication of JPH0334202B2 publication Critical patent/JPH0334202B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP59269949A 1984-12-21 1984-12-21 薄膜サ−ミスタ Granted JPS61147501A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59269949A JPS61147501A (ja) 1984-12-21 1984-12-21 薄膜サ−ミスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59269949A JPS61147501A (ja) 1984-12-21 1984-12-21 薄膜サ−ミスタ

Publications (2)

Publication Number Publication Date
JPS61147501A true JPS61147501A (ja) 1986-07-05
JPH0334202B2 JPH0334202B2 (enExample) 1991-05-21

Family

ID=17479450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59269949A Granted JPS61147501A (ja) 1984-12-21 1984-12-21 薄膜サ−ミスタ

Country Status (1)

Country Link
JP (1) JPS61147501A (enExample)

Also Published As

Publication number Publication date
JPH0334202B2 (enExample) 1991-05-21

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