JPS61147501A - 薄膜サ−ミスタ - Google Patents
薄膜サ−ミスタInfo
- Publication number
- JPS61147501A JPS61147501A JP26994984A JP26994984A JPS61147501A JP S61147501 A JPS61147501 A JP S61147501A JP 26994984 A JP26994984 A JP 26994984A JP 26994984 A JP26994984 A JP 26994984A JP S61147501 A JPS61147501 A JP S61147501A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin film
- temperature
- sensitive resistor
- insulating substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 19
- 239000010408 film Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 23
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 2
- 235000017491 Bambusa tulda Nutrition 0.000 description 2
- 241001330002 Bambuseae Species 0.000 description 2
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 2
- 239000011425 bamboo Substances 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26994984A JPS61147501A (ja) | 1984-12-21 | 1984-12-21 | 薄膜サ−ミスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26994984A JPS61147501A (ja) | 1984-12-21 | 1984-12-21 | 薄膜サ−ミスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61147501A true JPS61147501A (ja) | 1986-07-05 |
| JPH0334202B2 JPH0334202B2 (enrdf_load_stackoverflow) | 1991-05-21 |
Family
ID=17479450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26994984A Granted JPS61147501A (ja) | 1984-12-21 | 1984-12-21 | 薄膜サ−ミスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61147501A (enrdf_load_stackoverflow) |
-
1984
- 1984-12-21 JP JP26994984A patent/JPS61147501A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0334202B2 (enrdf_load_stackoverflow) | 1991-05-21 |
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