JPS6114656B2 - - Google Patents

Info

Publication number
JPS6114656B2
JPS6114656B2 JP5837678A JP5837678A JPS6114656B2 JP S6114656 B2 JPS6114656 B2 JP S6114656B2 JP 5837678 A JP5837678 A JP 5837678A JP 5837678 A JP5837678 A JP 5837678A JP S6114656 B2 JPS6114656 B2 JP S6114656B2
Authority
JP
Japan
Prior art keywords
cleaning
chip
jig
chips
storage chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5837678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54149470A (en
Inventor
Terunobu Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5837678A priority Critical patent/JPS54149470A/ja
Publication of JPS54149470A publication Critical patent/JPS54149470A/ja
Publication of JPS6114656B2 publication Critical patent/JPS6114656B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP5837678A 1978-05-16 1978-05-16 Washing jig of semiconductor chip Granted JPS54149470A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5837678A JPS54149470A (en) 1978-05-16 1978-05-16 Washing jig of semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5837678A JPS54149470A (en) 1978-05-16 1978-05-16 Washing jig of semiconductor chip

Publications (2)

Publication Number Publication Date
JPS54149470A JPS54149470A (en) 1979-11-22
JPS6114656B2 true JPS6114656B2 (enrdf_load_stackoverflow) 1986-04-19

Family

ID=13082599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5837678A Granted JPS54149470A (en) 1978-05-16 1978-05-16 Washing jig of semiconductor chip

Country Status (1)

Country Link
JP (1) JPS54149470A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163836U (enrdf_load_stackoverflow) * 1984-10-02 1986-04-30
JPH0727882B2 (ja) * 1985-03-08 1995-03-29 株式会社日立製作所 洗浄装置用搬送トレイ

Also Published As

Publication number Publication date
JPS54149470A (en) 1979-11-22

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