JPS61143681A - 高純度窒素ガス製造装置 - Google Patents

高純度窒素ガス製造装置

Info

Publication number
JPS61143681A
JPS61143681A JP26474984A JP26474984A JPS61143681A JP S61143681 A JPS61143681 A JP S61143681A JP 26474984 A JP26474984 A JP 26474984A JP 26474984 A JP26474984 A JP 26474984A JP S61143681 A JPS61143681 A JP S61143681A
Authority
JP
Japan
Prior art keywords
liquid nitrogen
evaporator
vaporized
nitrogen
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26474984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447232B2 (enrdf_load_stackoverflow
Inventor
明 吉野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Sanso Co Ltd
Original Assignee
Daido Sanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Sanso Co Ltd filed Critical Daido Sanso Co Ltd
Priority to JP26474984A priority Critical patent/JPS61143681A/ja
Publication of JPS61143681A publication Critical patent/JPS61143681A/ja
Publication of JPH0447232B2 publication Critical patent/JPH0447232B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation By Low-Temperature Treatments (AREA)
JP26474984A 1984-12-15 1984-12-15 高純度窒素ガス製造装置 Granted JPS61143681A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26474984A JPS61143681A (ja) 1984-12-15 1984-12-15 高純度窒素ガス製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26474984A JPS61143681A (ja) 1984-12-15 1984-12-15 高純度窒素ガス製造装置

Publications (2)

Publication Number Publication Date
JPS61143681A true JPS61143681A (ja) 1986-07-01
JPH0447232B2 JPH0447232B2 (enrdf_load_stackoverflow) 1992-08-03

Family

ID=17407647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26474984A Granted JPS61143681A (ja) 1984-12-15 1984-12-15 高純度窒素ガス製造装置

Country Status (1)

Country Link
JP (1) JPS61143681A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0280300U (enrdf_load_stackoverflow) * 1988-12-09 1990-06-20
JPH0370978A (ja) * 1989-08-09 1991-03-26 Hitachi Ltd 高純度窒素ガスの製造方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0280300U (enrdf_load_stackoverflow) * 1988-12-09 1990-06-20
JPH0370978A (ja) * 1989-08-09 1991-03-26 Hitachi Ltd 高純度窒素ガスの製造方法及び装置

Also Published As

Publication number Publication date
JPH0447232B2 (enrdf_load_stackoverflow) 1992-08-03

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