JPS61131544A - 自動アライニング方式 - Google Patents

自動アライニング方式

Info

Publication number
JPS61131544A
JPS61131544A JP59253620A JP25362084A JPS61131544A JP S61131544 A JPS61131544 A JP S61131544A JP 59253620 A JP59253620 A JP 59253620A JP 25362084 A JP25362084 A JP 25362084A JP S61131544 A JPS61131544 A JP S61131544A
Authority
JP
Japan
Prior art keywords
image
circuit
semiconductor wafer
suction table
circuit pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59253620A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525177B2 (enExample
Inventor
Kouzou Oota
太田　鎬蔵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON MAIKURONIKUSU KK
Micronics Japan Co Ltd
Original Assignee
NIPPON MAIKURONIKUSU KK
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON MAIKURONIKUSU KK, Micronics Japan Co Ltd filed Critical NIPPON MAIKURONIKUSU KK
Priority to JP59253620A priority Critical patent/JPS61131544A/ja
Publication of JPS61131544A publication Critical patent/JPS61131544A/ja
Publication of JPH0525177B2 publication Critical patent/JPH0525177B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/53—
JP59253620A 1984-11-30 1984-11-30 自動アライニング方式 Granted JPS61131544A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59253620A JPS61131544A (ja) 1984-11-30 1984-11-30 自動アライニング方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59253620A JPS61131544A (ja) 1984-11-30 1984-11-30 自動アライニング方式

Publications (2)

Publication Number Publication Date
JPS61131544A true JPS61131544A (ja) 1986-06-19
JPH0525177B2 JPH0525177B2 (enExample) 1993-04-12

Family

ID=17253889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59253620A Granted JPS61131544A (ja) 1984-11-30 1984-11-30 自動アライニング方式

Country Status (1)

Country Link
JP (1) JPS61131544A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002331930A (ja) * 2001-05-11 2002-11-19 Kinki Sharyo Co Ltd 鉄道車両用軸箱支持装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56153747A (en) * 1980-04-02 1981-11-27 Gen Signal Corp Positioning system
JPS5854648A (ja) * 1981-09-28 1983-03-31 Nippon Kogaku Kk <Nikon> 位置合わせ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56153747A (en) * 1980-04-02 1981-11-27 Gen Signal Corp Positioning system
JPS5854648A (ja) * 1981-09-28 1983-03-31 Nippon Kogaku Kk <Nikon> 位置合わせ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002331930A (ja) * 2001-05-11 2002-11-19 Kinki Sharyo Co Ltd 鉄道車両用軸箱支持装置

Also Published As

Publication number Publication date
JPH0525177B2 (enExample) 1993-04-12

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