JPH0525177B2 - - Google Patents

Info

Publication number
JPH0525177B2
JPH0525177B2 JP59253620A JP25362084A JPH0525177B2 JP H0525177 B2 JPH0525177 B2 JP H0525177B2 JP 59253620 A JP59253620 A JP 59253620A JP 25362084 A JP25362084 A JP 25362084A JP H0525177 B2 JPH0525177 B2 JP H0525177B2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
circuit
suction table
image
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59253620A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61131544A (ja
Inventor
Kozo Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP59253620A priority Critical patent/JPS61131544A/ja
Publication of JPS61131544A publication Critical patent/JPS61131544A/ja
Publication of JPH0525177B2 publication Critical patent/JPH0525177B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/53—
JP59253620A 1984-11-30 1984-11-30 自動アライニング方式 Granted JPS61131544A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59253620A JPS61131544A (ja) 1984-11-30 1984-11-30 自動アライニング方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59253620A JPS61131544A (ja) 1984-11-30 1984-11-30 自動アライニング方式

Publications (2)

Publication Number Publication Date
JPS61131544A JPS61131544A (ja) 1986-06-19
JPH0525177B2 true JPH0525177B2 (enExample) 1993-04-12

Family

ID=17253889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59253620A Granted JPS61131544A (ja) 1984-11-30 1984-11-30 自動アライニング方式

Country Status (1)

Country Link
JP (1) JPS61131544A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4723753B2 (ja) * 2001-05-11 2011-07-13 近畿車輌株式会社 鉄道車両用軸箱支持装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0037663B1 (en) * 1980-04-02 1986-06-11 General Signal Corporation Method and apparatus for positioning a wafer on a flat bed
JPS5854648A (ja) * 1981-09-28 1983-03-31 Nippon Kogaku Kk <Nikon> 位置合わせ装置

Also Published As

Publication number Publication date
JPS61131544A (ja) 1986-06-19

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