JPH0434826B2 - - Google Patents

Info

Publication number
JPH0434826B2
JPH0434826B2 JP59253619A JP25361984A JPH0434826B2 JP H0434826 B2 JPH0434826 B2 JP H0434826B2 JP 59253619 A JP59253619 A JP 59253619A JP 25361984 A JP25361984 A JP 25361984A JP H0434826 B2 JPH0434826 B2 JP H0434826B2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
imaging device
stage
circuit
pass filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59253619A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61131541A (ja
Inventor
Kozo Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP59253619A priority Critical patent/JPS61131541A/ja
Publication of JPS61131541A publication Critical patent/JPS61131541A/ja
Publication of JPH0434826B2 publication Critical patent/JPH0434826B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Automatic Focus Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP59253619A 1984-11-30 1984-11-30 半導体ウェハ検査装置 Granted JPS61131541A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59253619A JPS61131541A (ja) 1984-11-30 1984-11-30 半導体ウェハ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59253619A JPS61131541A (ja) 1984-11-30 1984-11-30 半導体ウェハ検査装置

Publications (2)

Publication Number Publication Date
JPS61131541A JPS61131541A (ja) 1986-06-19
JPH0434826B2 true JPH0434826B2 (enExample) 1992-06-09

Family

ID=17253876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59253619A Granted JPS61131541A (ja) 1984-11-30 1984-11-30 半導体ウェハ検査装置

Country Status (1)

Country Link
JP (1) JPS61131541A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0727932B2 (ja) * 1986-09-02 1995-03-29 東京エレクトロン株式会社 プロ−バ装置
JPH0669056B2 (ja) * 1986-09-11 1994-08-31 東京エレクトロン株式会社 プロ−ブ装置
JPH07105414B2 (ja) * 1986-09-30 1995-11-13 東京エレクトロン株式会社 半導体ウエハのプローブ装置
JPS63261727A (ja) * 1987-04-20 1988-10-28 Tokyo Electron Ltd 板状体の面歪み補正方法

Also Published As

Publication number Publication date
JPS61131541A (ja) 1986-06-19

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