JPS61131541A - 半導体ウェハ検査装置 - Google Patents

半導体ウェハ検査装置

Info

Publication number
JPS61131541A
JPS61131541A JP59253619A JP25361984A JPS61131541A JP S61131541 A JPS61131541 A JP S61131541A JP 59253619 A JP59253619 A JP 59253619A JP 25361984 A JP25361984 A JP 25361984A JP S61131541 A JPS61131541 A JP S61131541A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
stage
circuit
image pick
imaging device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59253619A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0434826B2 (enExample
Inventor
Kouzou Oota
太田　鎬蔵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON MAIKURONIKUSU KK
Micronics Japan Co Ltd
Original Assignee
NIPPON MAIKURONIKUSU KK
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON MAIKURONIKUSU KK, Micronics Japan Co Ltd filed Critical NIPPON MAIKURONIKUSU KK
Priority to JP59253619A priority Critical patent/JPS61131541A/ja
Publication of JPS61131541A publication Critical patent/JPS61131541A/ja
Publication of JPH0434826B2 publication Critical patent/JPH0434826B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Automatic Focus Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP59253619A 1984-11-30 1984-11-30 半導体ウェハ検査装置 Granted JPS61131541A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59253619A JPS61131541A (ja) 1984-11-30 1984-11-30 半導体ウェハ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59253619A JPS61131541A (ja) 1984-11-30 1984-11-30 半導体ウェハ検査装置

Publications (2)

Publication Number Publication Date
JPS61131541A true JPS61131541A (ja) 1986-06-19
JPH0434826B2 JPH0434826B2 (enExample) 1992-06-09

Family

ID=17253876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59253619A Granted JPS61131541A (ja) 1984-11-30 1984-11-30 半導体ウェハ検査装置

Country Status (1)

Country Link
JP (1) JPS61131541A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362249A (ja) * 1986-09-02 1988-03-18 Tokyo Electron Ltd プロ−バ装置
JPS6370432A (ja) * 1986-09-11 1988-03-30 Tokyo Electron Ltd プロ−ブ装置
JPS6386540A (ja) * 1986-09-30 1988-04-16 Tokyo Electron Ltd 半導体ウエハのプローブ装置
JPS63261727A (ja) * 1987-04-20 1988-10-28 Tokyo Electron Ltd 板状体の面歪み補正方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362249A (ja) * 1986-09-02 1988-03-18 Tokyo Electron Ltd プロ−バ装置
JPS6370432A (ja) * 1986-09-11 1988-03-30 Tokyo Electron Ltd プロ−ブ装置
JPS6386540A (ja) * 1986-09-30 1988-04-16 Tokyo Electron Ltd 半導体ウエハのプローブ装置
JPS63261727A (ja) * 1987-04-20 1988-10-28 Tokyo Electron Ltd 板状体の面歪み補正方法

Also Published As

Publication number Publication date
JPH0434826B2 (enExample) 1992-06-09

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