JPS61130382U - - Google Patents
Info
- Publication number
- JPS61130382U JPS61130382U JP1137885U JP1137885U JPS61130382U JP S61130382 U JPS61130382 U JP S61130382U JP 1137885 U JP1137885 U JP 1137885U JP 1137885 U JP1137885 U JP 1137885U JP S61130382 U JPS61130382 U JP S61130382U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- coating
- resist
- piston
- coating piston
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Cylinder Crankcases Of Internal Combustion Engines (AREA)
- Coating Apparatus (AREA)
Description
第１図は本考案の一実施例によるフオトエツチ
ング用レジストの塗布装置のコーテイングピスト
ン部分の断面図、第２図はその塗布部部分の拡大
図、第３図は上記実施例装置の全体構成図、第４
図は上記実施例の効果を説明するための比較試験
におけるシリンダライナの断面図である。
２……シリンダライナ（被処理物）、２ａ……
穴、２ｃ，２ｂ……上端、下端開口、４……ピス
トン駆動機構、１１……レジスト液供給装置、１
５……コーテイングピストン、１６……塗布部、
１７……液状レジスト。
FIG. 1 is a cross-sectional view of the coating piston portion of a photo-etching resist coating device according to an embodiment of the present invention, FIG. 2 is an enlarged view of the coating section, and FIG. 3 is an overall configuration diagram of the above-mentioned embodiment of the device. , 4th
The figure is a sectional view of a cylinder liner in a comparative test for explaining the effects of the above embodiment. 2... Cylinder liner (workpiece), 2a...
Hole, 2c, 2b... upper end, lower end opening, 4... piston drive mechanism, 11... resist liquid supply device, 1
5... Coating piston, 16... Application part,
17...Liquid resist.
Claims (1)
トを塗布する装置において、上方向に両端開口が
位置するよう配置される被処理物の穴内に上方開
口部から挿入可能に配置されたコーテイングピス
トンと、該コーテイングピストンに形成され上記
被処理物の穴の横断面形状と略対応する形状に形
成され、かつ上記被処理物の穴内に挿入されたコ
ーテイングピストン上に液状のフオトレジストが
供給されて該コーテイングピストンを上動させた
時被処理物の穴内周面に所定厚さのレジスト膜を
形成する塗布部と、上記穴内に挿入されたコーテ
イングピストン上にフオトエツチング用液状レジ
ストを供給するレジスト液供給装置と、上記コー
テイングピストンを上下方向に駆動するピストン
駆動機構とを備えたことを特徴とするフオトエツ
チング用レジストの塗布装置。 In an apparatus for applying a photoetching resist to the inner surface of a hole of a workpiece, the coating piston is arranged such that it can be inserted into the hole of the workpiece from an upper opening, and the coating piston is arranged such that both end openings are located upward. Liquid photoresist is supplied onto the coating piston, which is formed in a coating piston and has a shape substantially corresponding to the cross-sectional shape of the hole in the object to be treated, and which is inserted into the hole in the object to be treated. an application unit that forms a resist film of a predetermined thickness on the inner circumferential surface of the hole of the object to be processed when moved upward; and a resist liquid supply device that supplies liquid resist for photoetching onto a coating piston inserted into the hole. A photo-etching resist coating apparatus, comprising: a piston drive mechanism that drives the coating piston in the vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1137885U JPS61130382U (en) | 1985-01-29 | 1985-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1137885U JPS61130382U (en) | 1985-01-29 | 1985-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61130382U true JPS61130382U (en) | 1986-08-15 |
Family
ID=30493444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1137885U Pending JPS61130382U (en) | 1985-01-29 | 1985-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61130382U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010029793A (en) * | 2008-07-29 | 2010-02-12 | Ricoh Co Ltd | Coat forming device, anchoring means and imaging device |
| JP2015021185A (en) * | 2013-07-16 | 2015-02-02 | 和百エンジニアリング株式会社 | Device for forming fine-shaped recessed part on curved-shaped inner circumferential face, and method therefor |
-
1985
- 1985-01-29 JP JP1137885U patent/JPS61130382U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010029793A (en) * | 2008-07-29 | 2010-02-12 | Ricoh Co Ltd | Coat forming device, anchoring means and imaging device |
| JP2015021185A (en) * | 2013-07-16 | 2015-02-02 | 和百エンジニアリング株式会社 | Device for forming fine-shaped recessed part on curved-shaped inner circumferential face, and method therefor |