JPS61128123A - 質量流量計 - Google Patents

質量流量計

Info

Publication number
JPS61128123A
JPS61128123A JP59249861A JP24986184A JPS61128123A JP S61128123 A JPS61128123 A JP S61128123A JP 59249861 A JP59249861 A JP 59249861A JP 24986184 A JP24986184 A JP 24986184A JP S61128123 A JPS61128123 A JP S61128123A
Authority
JP
Japan
Prior art keywords
coils
temperature
fluid
heat
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59249861A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449893B2 (enrdf_load_stackoverflow
Inventor
Osamu Akebe
明部　治
Yoritaka Isoda
磯田　頼孝
Hirofumi Ono
弘文 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
S Tec Inc
Original Assignee
S Tec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S Tec Inc filed Critical S Tec Inc
Priority to JP59249861A priority Critical patent/JPS61128123A/ja
Publication of JPS61128123A publication Critical patent/JPS61128123A/ja
Publication of JPH0449893B2 publication Critical patent/JPH0449893B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Details Of Flowmeters (AREA)
  • Measuring Volume Flow (AREA)
JP59249861A 1984-11-27 1984-11-27 質量流量計 Granted JPS61128123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59249861A JPS61128123A (ja) 1984-11-27 1984-11-27 質量流量計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59249861A JPS61128123A (ja) 1984-11-27 1984-11-27 質量流量計

Publications (2)

Publication Number Publication Date
JPS61128123A true JPS61128123A (ja) 1986-06-16
JPH0449893B2 JPH0449893B2 (enrdf_load_stackoverflow) 1992-08-12

Family

ID=17199278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59249861A Granted JPS61128123A (ja) 1984-11-27 1984-11-27 質量流量計

Country Status (1)

Country Link
JP (1) JPS61128123A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01150817A (ja) * 1987-12-08 1989-06-13 Rintetsuku:Kk 質量流量計
US4843881A (en) * 1987-12-24 1989-07-04 Aalborg Instruments & Controls Fluid flow sensor system
JPH01311231A (ja) * 1988-06-09 1989-12-15 Stec Kk マスフローメータ
JPH01318925A (ja) * 1988-06-20 1989-12-25 Tadahiro Omi マスフローコントローラ
US5447173A (en) * 1993-07-23 1995-09-05 Hitachi Metals, Ltd. Mass flow controller, operating method and electromagnetic valve

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149752A (ja) * 1974-10-25 1976-04-30 Okura Denki Co Ltd Netsushikiryuryokei
JPS5623094A (en) * 1979-08-03 1981-03-04 Toshiba Electric Equip Corp Remote control unit
JPS5858417A (ja) * 1981-09-10 1983-04-07 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 流動横断面部を流れる脈動的に変化する媒体の量を測定する装置
JPS59136620A (ja) * 1982-12-30 1984-08-06 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 流体の流量測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149752A (ja) * 1974-10-25 1976-04-30 Okura Denki Co Ltd Netsushikiryuryokei
JPS5623094A (en) * 1979-08-03 1981-03-04 Toshiba Electric Equip Corp Remote control unit
JPS5858417A (ja) * 1981-09-10 1983-04-07 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 流動横断面部を流れる脈動的に変化する媒体の量を測定する装置
JPS59136620A (ja) * 1982-12-30 1984-08-06 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 流体の流量測定装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01150817A (ja) * 1987-12-08 1989-06-13 Rintetsuku:Kk 質量流量計
US4984460A (en) * 1987-12-08 1991-01-15 Lintec Co., Ltd. Mass flowmeter
US4843881A (en) * 1987-12-24 1989-07-04 Aalborg Instruments & Controls Fluid flow sensor system
JPH01311231A (ja) * 1988-06-09 1989-12-15 Stec Kk マスフローメータ
JPH01318925A (ja) * 1988-06-20 1989-12-25 Tadahiro Omi マスフローコントローラ
US5447173A (en) * 1993-07-23 1995-09-05 Hitachi Metals, Ltd. Mass flow controller, operating method and electromagnetic valve
US5711342A (en) * 1993-07-23 1998-01-27 Hitachi Metals, Ltd. Mass flow controller, operating method and electromagnetic valve

Also Published As

Publication number Publication date
JPH0449893B2 (enrdf_load_stackoverflow) 1992-08-12

Similar Documents

Publication Publication Date Title
JP2631481B2 (ja) 質量流量計とその計測方法
US4464932A (en) Thermal mass flowmetering
KR100326479B1 (ko) 차동전류열질량유동변환기
JPS5858417A (ja) 流動横断面部を流れる脈動的に変化する媒体の量を測定する装置
JPS61128123A (ja) 質量流量計
JP2788329B2 (ja) 流体の流速及び流れ方向測定方法及び測定装置
JP2875919B2 (ja) 質量流量計
JP3019009U (ja) 質量流量計
JP2965464B2 (ja) 流量計
JP2929356B2 (ja) 流量計
JP4368432B2 (ja) 質量流量センサ並びにこれを用いるマスフローメータおよびマスフローコントローラ
JP3706283B2 (ja) フローセンサ回路
KR0163621B1 (ko) 한개의 열선센서를 이용한 유동장 내의 온도 및 속도의 측정방법
JP2949527B2 (ja) 質量流量計
JP2879256B2 (ja) 熱式流量計
JPH01227016A (ja) 質量流量計
JP3373981B2 (ja) 熱式流量測定装置
JPS59136619A (ja) 渦流量計
JPH0523605B2 (enrdf_load_stackoverflow)
JP3068950B2 (ja) 質量流量計
JPH06160139A (ja) 質量流量計
JPH0735590A (ja) 質量流量計
CN119555169A (zh) 流体流量感测设备和相关方法
JPS5848818A (ja) 気体流量測定装置
JPH0434315A (ja) 流量計のヒータ制御装置