JPS6112787B2 - - Google Patents
Info
- Publication number
- JPS6112787B2 JPS6112787B2 JP53114897A JP11489778A JPS6112787B2 JP S6112787 B2 JPS6112787 B2 JP S6112787B2 JP 53114897 A JP53114897 A JP 53114897A JP 11489778 A JP11489778 A JP 11489778A JP S6112787 B2 JPS6112787 B2 JP S6112787B2
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- thick film
- glass layer
- thin film
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 104
- 239000011521 glass Substances 0.000 claims description 82
- 239000010408 film Substances 0.000 claims description 68
- 239000010409 thin film Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 229910001252 Pd alloy Inorganic materials 0.000 description 4
- BBKFSSMUWOMYPI-UHFFFAOYSA-N gold palladium Chemical compound [Pd].[Au] BBKFSSMUWOMYPI-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000006060 molten glass Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Electronic Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11489778A JPS5541268A (en) | 1978-09-19 | 1978-09-19 | Sensible heat head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11489778A JPS5541268A (en) | 1978-09-19 | 1978-09-19 | Sensible heat head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5541268A JPS5541268A (en) | 1980-03-24 |
| JPS6112787B2 true JPS6112787B2 (enrdf_load_stackoverflow) | 1986-04-10 |
Family
ID=14649372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11489778A Granted JPS5541268A (en) | 1978-09-19 | 1978-09-19 | Sensible heat head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5541268A (enrdf_load_stackoverflow) |
-
1978
- 1978-09-19 JP JP11489778A patent/JPS5541268A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5541268A (en) | 1980-03-24 |
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