JPS61103164A - Electrophotographic sensitive body - Google Patents

Electrophotographic sensitive body

Info

Publication number
JPS61103164A
JPS61103164A JP22557584A JP22557584A JPS61103164A JP S61103164 A JPS61103164 A JP S61103164A JP 22557584 A JP22557584 A JP 22557584A JP 22557584 A JP22557584 A JP 22557584A JP S61103164 A JPS61103164 A JP S61103164A
Authority
JP
Japan
Prior art keywords
zirconium
photoreceptor
amorphous silicon
surface layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22557584A
Other languages
Japanese (ja)
Other versions
JPH0723964B2 (en
Inventor
Yuzuru Fukuda
譲 福田
Shigeru Yagi
茂 八木
Kenichi Karakida
唐木田 健一
Yasunari Okugawa
奥川 康令
Yasuo Ro
盧 泰男
Noriyoshi Takahashi
高橋 徳好
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP22557584A priority Critical patent/JPH0723964B2/en
Publication of JPS61103164A publication Critical patent/JPS61103164A/en
Publication of JPH0723964B2 publication Critical patent/JPH0723964B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02Charge-receiving layers
    • G03G5/04Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Abstract

PURPOSE:To form an electrophotographic sensitive body with which the dark attenuation of electrostatic charge potential is extremely small by coating a photoconductive layer consisting of amorphous silicon on a conductive substrate and incorporating an org. zirconium compd. into a surface layer to be laminated thereon. CONSTITUTION:The photoconductive layer of the electrophotographic sensitive body constituted by laminating successively the photoconductive layer and surface layer on the conductive substrate consists of a (p) type semiconductor consisting essentially of the amorphous silicon cong. hydrogen atoms and contg. boron atoms as an impurity and the surface layer thereof consists of the dry and hardened material of a soln. contg. at least one kind of the org. zirconium compd. Zirconium complex and zirconium alkoxide are more particularly preferable as the org. zirconium compd. The preferable example of the zirconium complex is acetyl acetone zirconium complex such as zirconium acetoacetonate. The more preferable example of the zirconium alkoxide is zirconium tetramethoxide, etc.

Description

【発明の詳細な説明】 光層に非晶質ケイ素を用いた電子写真用感光体に関する
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrophotographic photoreceptor using amorphous silicon in an optical layer.

従来技術 電子写真法は、感光体に帯′α、像露光によシ静電潜偉
を形成し、この潜像金トナーと称される現像剤で現像後
、転写紙にトナー像を転写し定着して複写物を得る方法
である。この電子写真法に用いられる感光体は、基本構
成として導電性基板上に感光層′ft積層して成る。し
かして、従来より、感光層2!I−構成する材料として
はセレンあるいはセレン合金、硫fヒカドミウム、酸化
亜鉛静の無機感光材料、あるいは、ポリビニルカルバゾ
ール、トリニトロフルオレノン、ビスアゾ顔料、フタロ
シアニン、ピラゾリン、ヒドラゾン等の有機感光材料が
知られており、感光/i!#全単層あるいはfljt層
にして用いられている。しかしながら、従来より用いら
れているこれらの感光層は、耐久性、耐熱性、元M11
度などにおいて未だ解決すべき問題点を有している。
In the conventional electrophotographic method, an electrostatic latent layer is formed on a photoreceptor by image exposure, and after this latent image is developed with a developer called gold toner, a toner image is transferred to transfer paper. This is a method of fixing and obtaining copies. The basic structure of a photoreceptor used in this electrophotographic method is a photosensitive layer laminated on a conductive substrate. However, conventionally, the photosensitive layer 2! I-Constituting materials include inorganic photosensitive materials such as selenium or selenium alloys, hycadmium sulfate, and zinc oxide, and organic photosensitive materials such as polyvinylcarbazole, trinitrofluorenone, bisazo pigments, phthalocyanine, pyrazoline, and hydrazone. It is photosensitive/i! #It is used as a complete single layer or a fljt layer. However, these conventionally used photosensitive layers have poor durability, heat resistance, and original M11
There are still problems that need to be resolved, such as in terms of

近年、この感光層として非晶質ケイ素(ア七ルファスシ
リコン)音用いた感光体が知られ徨々その改善が試みら
れている。この非晶質ケイ素を用いた感光体は、7ラン
(SiH2)  ガスをグロー放電分解法等によりケイ
素の非晶質膜を導電性基板上に形成したものであって、
非晶質ケイ素膜中に水素原子が組み込まれて光導電性を
呈するものである。この非晶質ケイ素感光体は、感光層
の表面硬度が高く傷つきに<<、摩耗にも強く、耐熱性
も′ 高く、機械的強度においてもすぐれている。)!
! K %非晶質ケイ素は、分光感度域が広く、高い光
感度を有する如く感光特性もすぐれている。しかし反面
、非晶質ケイ素を用いた感光体は、暗yR設が大きく、
w′Wtしても十分を帯4電位が得られるという欠点を
有する。即ち、非晶質ケイ素感光体′(!−帯電し、像
露光して静電潜像を形成し、次いで現像する際、感光体
上の表面−に荷が像露光工程まで、あるいは現像工程ま
での間に光照射を受けなかつ九部分の電荷までも減衰し
てしまい、現像に必要な帯電電位が得られない。この帯
電電位の減衰は、環境条件の影響によっても変fヒしや
すく、特に高温高湿環境では帯電電位が大巾に低下する
。更に1非晶質ケイ素の感光体は、繰返し使用すると除
々に帯電電位が低下してしまう。この様な帯電電位の暗
減衰の大きな感光体を用いて複写物を作成すると、画像
濃度が低くまた、中間調の再現性に乏しい複写物となる
In recent years, photoreceptors using amorphous silicon as the photosensitive layer have been known, and many attempts have been made to improve them. This photoreceptor using amorphous silicon is one in which an amorphous film of silicon is formed on a conductive substrate by a glow discharge decomposition method using 7 run (SiH2) gas.
Hydrogen atoms are incorporated into the amorphous silicon film to exhibit photoconductivity. This amorphous silicon photoreceptor has a photosensitive layer that has a high surface hardness, is resistant to scratches, is resistant to abrasion, has high heat resistance, and has excellent mechanical strength. )!
! K% amorphous silicon has a wide spectral sensitivity range and has excellent photosensitivity, such as high photosensitivity. However, on the other hand, photoreceptors using amorphous silicon have a large dark yR setting.
Even if w'Wt is used, it has the disadvantage that a sufficient band 4 potential can be obtained. That is, when an amorphous silicon photoreceptor (!) is charged, imagewise exposed to form an electrostatic latent image, and then developed, charges are deposited on the surface of the photoreceptor until the image exposure process or the development process. During the process, even the charge of the nine parts is attenuated without being exposed to light, making it impossible to obtain the charging potential necessary for development.This attenuation of the charging potential is easily changed by the influence of environmental conditions, In a high-temperature, high-humidity environment, the charging potential drops significantly.Furthermore, when an amorphous silicon photoconductor is used repeatedly, the charging potential gradually decreases.Such a photoconductor with large dark decay of the charging potential If a copy is made using this method, the resulting copy will have low image density and poor halftone reproducibility.

発明の目的 本発明の目的は、非晶質ケイ矢金用いる感光体の上述の
欠点を解消し九電子写真用感光体を提供することにある
OBJECTS OF THE INVENTION It is an object of the present invention to provide a photoreceptor for electrophotography which eliminates the above-mentioned drawbacks of photoreceptors using amorphous silicon arrow metal.

更に、本発明の目的は、非晶質ケイ素を用い、しかも、
帯電電位の暗減艮が極めて小さい電子写真用感光体を提
供することにある。
Furthermore, the object of the present invention is to use amorphous silicon, and
An object of the present invention is to provide an electrophotographic photoreceptor in which the darkening of the charged potential is extremely small.

本発明の他の目的(・↓、帯電特性が外部環境の雰囲気
の変比罠よって影響を受けない電子写真用感光体t−提
供することにある。
Another object of the present invention is to provide a photoreceptor for electrophotography whose charging characteristics are not affected by the ratio trapping of the external environment.

また、本発明の他の目トんは、繰返し使用されても画像
品質の優れた電子写真用感光体を提供することにある。
Another object of the present invention is to provide an electrophotographic photoreceptor with excellent image quality even after repeated use.

更に、本発明の他の目的は、機械的強度、耐久性、耐熱
性、光感度などの電子写真特性に優れた電子写真用感光
体t−提供することにある。
Another object of the present invention is to provide an electrophotographic photoreceptor having excellent electrophotographic properties such as mechanical strength, durability, heat resistance, and photosensitivity.

発明の構成 本発明者は、鋭意研究を行なった結果、導電性基板上に
、非晶質ケイ素から成る元4電層を被覆し、更に、その
上に表面Nt−積層すると共に、V表面層として、有4
!lジルコニウム「ヒ合物を少なくとも1種類含有する
#夜の乾燥硬化物を用いることによって上記目的が達成
されることを見出した。
Structure of the Invention As a result of extensive research, the present inventor coated a conductive substrate with an original quaternary conductive layer made of amorphous silicon, further laminated a surface Nt layer thereon, and a V surface layer. As, there are 4
! It has been found that the above object can be achieved by using a dried and cured product containing at least one type of zirconium arsenide.

光導電層としては、非晶質ケイ素を生体とし、不純物と
してホウX原子を含有するp型半導体を用いる。
As the photoconductive layer, a p-type semiconductor made of amorphous silicon and containing boron X atoms as an impurity is used.

かくして、本発明に従えば、4電性基板上に光導を層お
よび表面層を順次積層して成る電子写真用感光体におい
て、前Lid元導電導電層水素原子を含有する非晶質ケ
イit王体とし不純物としてホウ素原子を含有するp型
半導体から成り、前記表面層が、有機ジルコニウム化合
物を少なくともlS類含む溶液の乾燥硬化物から成るこ
とを特徴とする電子写真用感光体が提供される。
Thus, according to the present invention, in an electrophotographic photoreceptor in which a photoconductive layer and a surface layer are successively laminated on a four-conducting substrate, an amorphous silicon layer containing hydrogen atoms is used as a pre-lid conductive layer. Provided is an electrophotographic photoreceptor comprising a p-type semiconductor containing boron atoms as a body and impurity, and wherein the surface layer comprises a dried and cured product of a solution containing at least an organic zirconium compound.

本発明の電子写真用感光体の表面#全形成するのに用い
られる有機ジルコニウム化合切としては、稗々のものが
考えられるが、特に好ましいのは、ソルコニウA B 
体* ヨヒジルコニウムアルコΦシトである。ジルコニ
ウム錯体の好ましい例は、ゾルコニウムアセトアセトネ
ート、ゾルコニウムテトラキスアセチルアセトネート、
ジルコニウムジブトキシビスアセチルアセトネート、ジ
ルコニウムトリプトΦシア七チルアセトネート、ジルコ
ニウムトリックロアセチルアセトネート、ジルコニウム
テトラキスエチルアセトアセテート、ジルコニウムブト
キシトリスエチルアセトアセテート、ジルコニウムソブ
トキシビスエチルアセトアセテ、    −ト、9ルコ
ニウムトリプトなシモノエチルアセトアセテート、ビス
アセチルアセトネートビスエチルアセトアセテートジル
コニウム、モノアセチルアセトネートトリスエチルアセ
トアセテートゾルコニウム、ビスアセチルアセトネート
ビスエチルラクテートジルコニウム等のアセチルアセト
ンジルコニウム錯体である。その他に1ジルコニウムテ
トラキスエチルラクテート、ジルコニウムジブトキシビ
スエチルラクテート等のジルコニウム錯体を用いること
もできる。ジル−ニウムアルコキシドの好ましい911
としては、ジルコニウムテトラメトキシド、ジルコニウ
ムナト9−n−faポΦシト、ジルコニウムテトライブ
faポキシド、ジルコニウム−〇−ブトキシド、ジルコ
ニウムイソブトキシド、等が挙げられる。
As the organic zirconium compound used to form the entire surface of the electrophotographic photoreceptor of the present invention, various types of organic zirconium compounds can be considered, but particularly preferred are Sorconium A B
Body* It is iohidzirconium alcohol. Preferred examples of zirconium complexes include zorconium acetoacetonate, zorconium tetrakis acetylacetonate,
9 These are acetylacetone zirconium complexes such as ruconium trypto cymonoethyl acetoacetate, bisacetylacetonate bisethylacetoacetate zirconium, monoacetylacetonate trisethylacetoacetate zorconium, bisacetylacetonate bisethylacetoacetate zirconium. In addition, zirconium complexes such as 1-zirconium tetrakisethyl lactate and zirconium dibutoxybisethyl lactate can also be used. Preferred 911 of Zyl-nium alkoxide
Examples include zirconium tetramethoxide, zirconium nato 9-n-fa poxide, zirconium tetrab-fa poxide, zirconium-〇-butoxide, zirconium isobutoxide, and the like.

本発明の電子写真用感光体を侍るに当っては、上記のご
とき有機ゾルコニウム「ヒ合物の7種または2種以上を
適当々醇媒に溶解した溶液を塗布する。また、この際、
これらの有機ジルコニウム化合物に有機ケイ素上合物を
混合した溶液を用いてもよい。この有機ケイ素化合物と
しては一般にシ  1う/カッブリング剤と呼はれてい
る化合物が好適 ゛であシ、例えば、ビニルトリクミル
シラン、ビニルトリエトキシシラン、ビニルトリス(β
−メトキシエトΦシンシラン、r−グリシドキシグロビ
ルトリメトキシシラン、γ−メタアクリロキシグロビル
トリメトキシシラン、N−β(アミノエチ/S/)γ−
アミノグロビルトリメトキシシラン、N−β(アミノエ
ナル)r−アミノプロビルメチルジメト命ジシラン、γ
−クロログロビルトリメトキクシラン、r−メルカグト
faピルトリメトキシシラン、γ−アミノグロビルトリ
エト中ジシラン、メチルトリメトキシシラン、シフメチ
ルジメトキシラン、トリメチルモノメトヤシシラン、ジ
フェニルジメトキシシラン、ジフェニルジメトキシシラ
ン、モノフェニルトリメトヤシシラン等が挙げられる。
When preparing the electrophotographic photoreceptor of the present invention, a solution containing seven or more of the above-mentioned organic zolconium arsenides dissolved in an appropriate medium is applied.
A solution obtained by mixing these organic zirconium compounds with an organic silicon supercompound may also be used. As this organosilicon compound, compounds generally called silica/coupling agents are preferred.For example, vinyltricumylsilane, vinyltriethoxysilane, vinyltris(β
-methoxyethophylsilane, r-glycidoxyglobiltrimethoxysilane, γ-methacryloxyglobiltrimethoxysilane, N-β(aminoethyl/S/)γ-
Aminoglobiltrimethoxysilane, N-β(aminoenal)r-aminopropylmethyldimethodisilane, γ
-chloroglobiltrimethoxysilane, r-mercagutfa pyrutrimethoxysilane, γ-aminoglobiltriethodisilane, methyltrimethoxysilane, schifmethyldimethoxylan, trimethylmonometosilane, diphenyldimethoxysilane, diphenyldimethoxysilane, Examples include monophenyltrimethoyasisilane.

このよう、tシラ/カッグリングPI ′t−混合して
用いる場合には、該シランカッブリング剤が全固形物重
量に対して5〜5053となるようにするのがよい。
When the silane coupling agent and the silane coupling agent are used as a mixture as described above, it is preferable that the amount of the silane coupling agent be 5 to 5053 based on the total solid weight.

かくし1、有機ノルコニウム化合物、!場合によっては
更に有様ケイネ化せ吻?含有するi♀1牧を、光褥電鳩
上iZi 、スグレー塗市、a文塗布、ナイフ塗布また
(・よロール塗布などの方法で塗布した後、乾燥硬化さ
せることによって本発明の電子写真用感光体が得られる
。乾燥硬化温度は100〜弘0OCO間の任意の温度に
設定することができる。最終的に得られる荻ilf!層
の膜厚も任意に設定され得るが、0.7〜10twn、
荷に/μIn 以下が好適である。
Hidden 1, organic norconium compound! Depending on the case, the snout may become even more peculiar? The electrophotographic material of the present invention is prepared by applying the i♀1 maki containing iZi by a method such as Kofuden Hatojo iZi, Sugrei coating, A-mon coating, knife coating, or (yo-roll coating), and then drying and curing it. A photoreceptor is obtained.The drying and curing temperature can be set at any temperature between 100 and 000CO.The film thickness of the finally obtained Ogi Ilf! layer can also be set at any value, but is between 0.7 and 0.7. 10twn,
It is preferable that the load is less than /μIn.

非晶班ケイ素を生体とする光導電層は、5IH4、S1
□H4,51,H,,514H,。、等の水素ケイ素ガ
スの/釉またはそれらの混合物を原料として、グロー放
電法、スパッタリング法、イオングレーティング法、p
、、空蒸着法などの方法により1基板上に形成する。中
でも、プラズマCV D (ChemicmlVapo
r Deposition )  ’d2によhシラン
(5IH4)ガス等をグロー放電分解する方法(グロー
放電法)が、膜中への水素の含有“軟の制御の点から好
ましい。また、この場合水素の含有を一層効率良く行な
9ために、グラズマCvD装置ピコにシランガス等と同
時に、別途に水素(H2)  ガスを導入してもよい。
The photoconductive layer whose living body is amorphous silicon is 5IH4, S1
□H4,51,H,,514H,. , a glow discharge method, a sputtering method, an ion grating method, p
, , is formed on one substrate by a method such as an empty evaporation method. Among them, plasma CVD (Chemical Vapo
r Deposition ) A method (glow discharge method) in which silane (5IH4) gas, etc. is decomposed by glow discharge is preferable from the viewpoint of controlling the amount of hydrogen contained in the film. In order to carry out the process more efficiently, hydrogen (H2) gas may be separately introduced into the Glazma CvD device PICO at the same time as silane gas or the like.

本発明の電子写真用感光体の元導電膚として用いるのは
、水素原子を含有する非晶ケイ素を生体とし不純物とし
てホウ素原子を含有するp型半導体である。このホウ、
代原子の6加にkよ、通常、ゾ。
The material used as the conductive material of the electrophotographic photoreceptor of the present invention is a p-type semiconductor made of amorphous silicon containing hydrogen atoms and containing boron atoms as impurities. This way,
The surrogate atom 6 plus k, usually zo.

ゲラy (s2+6)  ガスが原本シとして用いられ
、0.07/原子−のi度a−7JOされることによっ
てp型半導体の非晶質ケイ≠が得られる。
Gale y (s2+6) gas is used as the original, and a p-type semiconductor amorphous silicon is obtained by a-7JO of 0.07/atom.

ま九、4:′l?3明に従う別のα子方X用感光体にお
いては、光導1−が、氷素ノは子を含有する非晶質ケイ
素で王座とし不純、1勿としてホf)凧原子をよ、汀す
るp型子ηト体から成り、更に、炭素原子、望A原子ま
たはら(木原子のうちのタン上くとも/掲類ヲ宮有して
いる。このよりな原子の貧有tよ、特に感電ノー膜のl
if抵抗の4 /711 、尤J盛夏の増加、爽には、
′帯域11しく本位膜厚あたすの帝成電侃2の増加の点
から好ましい。
Maku, 4:'l? In another photoreceptor for alpha electrons according to 3 Ming, the light guide 1- is enthroned with amorphous silicon containing ice atoms and impurities, as well as hof) atoms. It consists of a p-type atom, and it also has a carbon atom, an atom, or an atom of the following types. No electric shock film
If the resistance is 4/711, the increase in the height of summer, the refreshing,
'Band 11' is preferable from the viewpoint of increasing the standard film thickness and Teisei Denkan 2.

更に、感光体の艮波長域の感度を増加さぜることを目的
とし工、元尋゛一層映にrルマニワム(Ge)などの元
素を象刀口することもOL ggである。fたハI2ダ
ン電子全添〃口することによつ1、暗砥抗の;〕力0等
を図ることもできる。
Furthermore, for the purpose of increasing the sensitivity of the photoreceptor in the wavelength range, it is also an OL gg to inlay elements such as lumenium (Ge) into the original photoreceptor. It is also possible to reduce the dark abrasive force to 0 by adding all the electrons.

かくして、本発明の4子与兵用!6元体の充46窺層を
y4′#するには、グラダマCVD装置内に1主原料で
ある水素fヒケイ素ガス、更に所望に応じて水素ガスを
用い、それらのガスと共に、8袈な元素を含むガス状化
合物を導入してグロー放電分解を行なえばよい。以上の
ようにグラズマCvD法による非晶遥ケイ素から成る光
4恥層を形成するのに8幼な放電条件は、例えば、交流
放電の場合、周波数は通常0.7〜.? OMHz 、
放電時の真空度は0./〜5 Torr 、基板iM#
IL温度は/θ0〜弘00Cである。しかして、非晶質
ケイ素を主体とする光導fL層の膜厚は、7〜700μ
m1特に70〜50μmとするのが好適である。
Thus, the present invention is for four children! In order to form a full 46-dimensional layer of a 6-element substance, hydrogen gas, which is the main raw material, and hydrogen gas, if desired, are used in the Gradama CVD apparatus, and 8 layers are added together with these gases. Glow discharge decomposition may be performed by introducing a gaseous compound containing the element. As described above, the discharge conditions required to form a light layer made of amorphous silicon by the GLAZMA CvD method are, for example, in the case of AC discharge, the frequency is usually 0.7~. ? OMHz,
The degree of vacuum during discharge is 0. /~5 Torr, board iM#
The IL temperature is /θ0~Hiro00C. Therefore, the film thickness of the light guide fL layer mainly composed of amorphous silicon is 7 to 700 μm.
It is particularly preferable that m1 is 70 to 50 μm.

導゛ヱ性基板としては、アルミニウム、ニッケル、クロ
ム、ステンレス鋼、もしくは黄銅などの全編、導電膜を
有するグラスチックシートもしくはグラス、または、2
4を化処理をした紙などを用いることができる。また、
211蒐性基板の形状は、円筒状、  。
The conductive substrate can be made entirely of aluminum, nickel, chromium, stainless steel, or brass, a glass sheet or glass with a conductive film, or two.
It is possible to use paper treated with 4. Also,
The shape of the 211 flexible substrate is cylindrical.

平板状、エンドレスベルト状等の任意の形状全裸ること
ができる。
It can be completely exposed in any shape such as a flat plate or an endless belt.

実施例 次に、比較例と本発明の実施例とを挙げて、本発明の電
子写真用$光体を更に説明する。
EXAMPLES Next, the $ light body for electrophotography of the present invention will be further explained with reference to comparative examples and examples of the present invention.

比較例1: 容量結合型プラ、e−vcVD装置の反応室内の所定の
位置罠円筒状^を基板全設置し、基板温度を所定の温度
である。2socに維持し、反応室内に100−シラン
(SIH4)  、f/スを毎分/20CX:、、水素
希釈の/ 00 ppmジ?2ン(82H6)  ガx
6毎分コθの、さらに1ooyb水巣(H2)ガスを毎
分qoccの籟囲で流入きせ、反応槽内をθ、 、!r
Torrの内厚に維持した後、/ J 、 !; 7 
MHzの高周波電源を投入して、グロー放電を生じゼし
め、高周波電源の出力をざ5Wに維持した。このように
して、円筒状の^を基板上に厚さコSμmの非晶負ケイ
:JAt−主体とし不純物としてホウ素原子を含有する
p型半導体から成る光導電/i+!を有する感光体を得
た。このようにして得られた感光体は、表面硬度が硬く
、耐摩耗性、耐熱性に優れ、高暗抵抗かつ高光感度を有
し、電子与真用感電体イq性の優れたものであった。ま
た正’7J rt %負帯電いずれの帯電も可能であシ
両極性帯電性を有していた。
Comparative Example 1: A capacitively coupled plastic trap cylindrical substrate was placed at a predetermined position in the reaction chamber of an e-vcVD device, and the substrate temperature was kept at a predetermined temperature. Maintaining 2 soc, 100-silane (SIH4) in the reaction chamber, f/s/20 CX:, 00 ppm dilution of hydrogen dilution. 2n (82H6) Gax
In addition, 100b water bubble (H2) gas is introduced at a rate of 6 qocc per minute, and the inside of the reaction tank is θ, ! r
After maintaining the inner thickness of Torr, /J,! ;7
A high frequency power source of MHz was turned on to generate a glow discharge, and the output of the high frequency power source was maintained at about 5W. In this way, a cylindrical photoconductor/i+! consisting of a p-type semiconductor mainly composed of amorphous negative silicon (JAt-) and containing boron atoms as impurities is formed on a substrate with a thickness of Sμm. A photoreceptor having the following was obtained. The photoconductor thus obtained has a hard surface, excellent wear resistance and heat resistance, high dark resistance and high light sensitivity, and has excellent q properties for electroconductor for electron transfer. Ta. Further, it was possible to perform both positive and negative charging, and had bipolar charging properties.

この感光体を正帯電させ初期電位を550vにし九。こ
れを4.5i’ Onmの波長の光で露光する操作を毎
分70回の速度で繰返した。この時の残留電位はOvで
安定していたが、帯電電位は繰返し数の増加とともに減
少する傾向が見られ、ioo。
This photoreceptor was positively charged to an initial potential of 550V.9. This operation of exposing the sample to light having a wavelength of 4.5i' Onm was repeated at a rate of 70 times per minute. The residual potential at this time was stable at Ov, but the charging potential tended to decrease as the number of repetitions increased, ioo.

回の繰返し操作の後においてその帯電電位は初期帯ja
L1!位の75%の値まで減少してい友。
After repeated operations, the charging potential is the initial band ja
L1! It has decreased to 75% of the value.

またこのg光体t−負帯電させ、同様の操作を行なった
ところ、正帯電の場合と同様の現象が見られた。
When this g-light body t was negatively charged and the same operation was performed, the same phenomenon as in the case of positively charging was observed.

実施例1: 比較$117と−1一方法、同一条件にて作成した非晶
質ケイ素を主体とし不純物としてホウ素を含有するp型
半導体から成る光導電ノf4を有する感光体の上に、ジ
ルコニウムテトラ−n−ブトキシ21重シ1部、エチル
アルコール100M量部からなる配液を塗布L−120
0℃の炉中で2時間乾燥硬化し、0.3μ厚の表面層を
有する感光体を得た。このよつり(シて得らnた表面層
はセラミックスに似た性質を持ち、非晶質珪素の優れた
特性である、表面硬度、耐摩耗性、耐熱性ケはとんど損
うことがなかった。
Example 1: Comparison $117 and -1 A photoconductor having a photoconductor f4 made of a p-type semiconductor mainly composed of amorphous silicon and containing boron as an impurity was prepared by the same method and under the same conditions. Apply a liquid solution consisting of 1 part of tetra-n-butoxy 21% alcohol and 100M parts of ethyl alcohol L-120
The photoreceptor was dried and cured in an oven at 0° C. for 2 hours to obtain a photoreceptor having a surface layer with a thickness of 0.3 μm. The surface layer obtained by this process has properties similar to ceramics, and the excellent properties of amorphous silicon, such as surface hardness, wear resistance, and heat resistance, are almost never lost. There wasn't.

この感光体を正帯電させ初期霜1位を!r!;OVにし
、比較例1と1■1じ方法にて繰シ克し試験を行なった
ところ、この時の残留電位は約5Vで安定していた。′
tた帯電′観位は7000回の楓り返し操、  作後に
訃いても初期帯tiV、電位と変わらす5sovの電位
であった。
Positively charge this photoreceptor to achieve the highest level of initial frost! r! OV, and a repeat test was conducted in the same manner as in Comparative Examples 1 and 1. The residual potential at this time was stable at about 5V. ′
The charging point was 7000 times, and even after the operation, the initial band tiV was 5sov, which was different from the potential.

又、この感光体を負帯電させたところ残′11i旭位は
一3vで安定しておりまた帯゛〜、亀位も正帯電の場合
と同様に1000回の繰り返し後でも1回目とほとんど
変わらず安定していた。
Also, when this photoreceptor was negatively charged, the remaining '11i' and '11i' positions remained stable at -3 V, and the '11i' and '9' positions remained almost unchanged from the first time even after 1,000 repetitions, as in the case of positive charging. It was stable.

実施例コニ 比較例1と同一方法、同−条件にて作成した非晶ηケイ
素金主体とし不純物としてホウ素を含有するp型半導体
から成る光導[M?有する感光体の上に、ジルコニウム
テトラ−n−ブト中シドコ重量部、メチルトリメトキシ
シラン7重量部、エチルアルコールts01Km部から
なる溶液を浸漬法にて塗布し、250℃で1時間乾燥硬
化し、0.5μ厚の表面層をもつ感光体を得た。
Example: A light guide [M? A solution consisting of parts by weight of sidoco in zirconium tetra-n-buto, 7 parts by weight of methyltrimethoxysilane, and 1 Km parts of ethyl alcohol was applied onto the photoreceptor using a dipping method, and dried and cured at 250°C for 1 hour. A photoreceptor with a surface layer of 0.5 μm thickness was obtained.

このようにして得られた感光体の表面層はセラミックス
に似た性質を持ち、非晶質ケイ素の優れた特性である、
表面硬度、耐摩耗性、耐熱性をほとんど損うことがなか
った。
The surface layer of the photoreceptor thus obtained has properties similar to ceramics, which is an excellent property of amorphous silicon.
There was almost no loss in surface hardness, wear resistance, or heat resistance.

この感光体に正帯電、露光の操作′?−繰力返し九とこ
ろ、残留電位は5vで安定していた。負帯電の場合VC
#:を残留電位は5vで安定していた。帯電電位は正、
負帯電共に7000回まで安定であった。
Is this photoreceptor positively charged and the exposure operation'? -After nine repetitions, the residual potential remained stable at 5V. VC in case of negative charge
#: The residual potential was stable at 5V. The charging potential is positive,
Both negative charges were stable up to 7000 times.

実施例3: 比較9jl /と同一方法、同一条件にて作成した非晶
質ケイ素を主体とし不純物としてホウ素を含有するp型
半導体から成る光導電層を肩する感光体の上に、ジルコ
ニウムテトラ−n−グロポキシVダ重伊部、γ−メタア
クリロキシグロビルトリメトキシシラン/i量!3エチ
ルアルコールlSO重g#部、イソプロビルアルコール
100重量部からなる溶液?浸漬法にて塗布し、300
℃で1時間乾燥硬化しlμ厚の表面層を待つ感光体?−
祷た。
Example 3: Zirconium tetra- n-glopoxy Vdajuibe, γ-methacryloxyglobiltrimethoxysilane/i amount! A solution consisting of #3 parts by weight of ethyl alcohol lSO and 100 parts by weight of isopropyl alcohol? Apply by dipping method, 300
A photoreceptor that is dried and cured at ℃ for 1 hour and waiting for a lμ thick surface layer? −
I prayed.

この表面層を廟する感光体の表面硬度、耐摩耗性、1熱
性は非晶質ケイ素と変わることはなかった。
The surface hardness, abrasion resistance, and heat resistance of the photoreceptor containing this surface layer were the same as those of amorphous silicon.

この感光体に正帯電、1へ光及び負帯亀静光をそれぞれ
1000回H!り返したところ、残i電位は正、負帯電
共Vc10Vであり安定で、また帯1し電位も安定して
いた。
This photoreceptor was positively charged, and 1000 times of light and negative light were applied to it! When repeated, the residual i potential was Vc10V for both positive and negative charges, which was stable, and the potential of band 1 was also stable.

実施例4L: 比較例1と同一方法、1町−条件にて作成した非晶質ケ
イ素を主体とし不純物としてホウ累原子を含有するp型
半導体から成る光棉寛僧全壱する感光体を得た。さらに
その上にジルコニウムトリフ0ロアセチルアセトネート
1重1部、メチルアルコール30M、警部、n−ブタノ
ールIOX量部からなる溶液を塗布し、200℃の炉中
で1時間乾燥硬化し、0.3μ厚の表面層をもつ感光体
を得た。このようにして得られた表面層はセラミックス
に似た性質を持ち、非晶質ケイ素の優れた特性である、
表面硬度、耐摩耗性、耐熱性を#1とんど損うことがな
かつな。
Example 4L: A photoconductor made of a p-type semiconductor mainly composed of amorphous silicon and containing boron atoms as impurities was obtained by the same method and conditions as in Comparative Example 1. Ta. Further, a solution consisting of 1 part by weight of zirconium trifluoroacetylacetonate, 30 M of methyl alcohol, 1 part of n-butanol IOX was applied thereon, and dried and hardened in an oven at 200°C for 1 hour to give a 0.3μ A photoreceptor with a thick surface layer was obtained. The surface layer obtained in this way has properties similar to ceramics, which is an excellent property of amorphous silicon.
#1 No loss of surface hardness, wear resistance, and heat resistance.

この感光体を正帯電させ初期電位を!;!;OVKし、
比較例1と同じ方法にて繰〕返し試欺を行なつ九ところ
、との時の残留電位は約QVで安定していた。ま比帯亀
電位Fi/θθθ回の繰ル返し掃作後においても初期帯
電電位と変わらす5sovの電位であった。
Positively charge this photoreceptor to create an initial potential! ;! ;OVK,
When repeated trials were carried out in the same manner as in Comparative Example 1, the residual potential was stable at approximately QV. Even after repeated sweeping for the ratio Fi/θθθ times, the potential was 5 sov, which was different from the initial charging potential.

また、この感光体を負″#I電させ穴とζろ残留電位は
一3vで安定しておりまた帯゛亀電位も正帯電の場合と
同様に1OoQ回の繰シ返し後でも1回目とほとんど変
わらず安定していた。
In addition, when this photoreceptor is negatively charged, the residual potential between the hole and the ζ filter is stable at -3V, and the charging potential is also the same as the first one even after 100Q times of repetition, as in the case of positive charging. It remained almost unchanged.

実施9′lI!; a 比較物1/と同一方法、同一条件にて作成した非晶質ケ
イ素を主体とし不純物としてホウ素原子を含有するp型
半導体から成る光導*、 ju t ’!する感光体の
上に、ジルコニウムトリフロロアセチルアセトネート2
亀斂部、メチルトリメトキシシラン7重量部、n−プメ
ノールコO氷針部、メチルアルコール50重俸部からな
る溶液を漬痘法にて塗布し、2Sθ℃で二時間乾燥硬化
させO0Sμm厚の表面版を持つ感光体を得た。
Implementation 9'lI! ; a Light guide* made of a p-type semiconductor mainly composed of amorphous silicon and containing boron atoms as an impurity, prepared by the same method and under the same conditions as Comparison 1/, ju t'! Zirconium trifluoroacetylacetonate 2
A solution consisting of 7 parts by weight of methyltrimethoxysilane, 7 parts by weight of n-pumenorco O ice needles, and 50 parts by weight of methyl alcohol was applied by the pickling method and dried and cured at 2Sθ°C for 2 hours to form a surface with a thickness of 0Sμm. A photoreceptor with a plate was obtained.

このようにして得られfc感光体の表面層はセラミック
スに供た性質を持ち、非晶質ケイ素の優れた特性である
、表向硬度、耐苧耗性、耐熱性ケはとんど摺うことがな
かつ′fi−0 この感光体に正帯11、露光の操作hO外したところ、
残留を位に2vで安定していた。負帯電の場合には残留
電位は一5vで安定していた。帯電電位は正、負帯電共
に1oQO回まで安定であった。
The surface layer of the FC photoreceptor obtained in this way has properties similar to those of ceramics, and the excellent properties of amorphous silicon, such as surface hardness, abrasion resistance, and heat resistance, are almost impossible to print. Kotonakatsu'fi-0 When the positive band 11 and the exposure operation hO were removed from this photoreceptor,
It was stable at 2V with the remaining voltage at about that point. In the case of negative charging, the residual potential was stable at -5V. The charging potential was stable up to 1oQO times for both positive and negative charging.

実施例6: 比較例1の感光体と実施例/−5の感光体を低己低湿、
高温高湿のλつの環境で帯電、露光をkk1h返した。
Example 6: The photoconductor of Comparative Example 1 and the photoconductor of Example/-5 were subjected to low humidity,
Charging and exposure were repeated for kk1h in a high temperature and high humidity environment.

いづれの場合にも帯電電位は一定とし、100回繰り返
し後の帯8+1電位の最も高いものを700とし、他の
帯電電位を相対値で示した。
In all cases, the charging potential was constant, and the highest potential of band 8+1 after 100 repetitions was set at 700, and the other charging potentials were shown as relative values.

(表/)  C各感光体の帯電電位〕 このように、表面層を有しない非晶質ケイ素感光体では
、帯電電位が繰返し数の増加とともにかつ高i高湿の雰
囲気下洗おいて著しく低下するのに比べ、本発明釦よる
表面#j ’fr設は念非晶ηケイ素感介体では、帯電
電位は繰返し数の稙加及び高温高湿の東件下においても
ほぼ一定であった。
(Table/) Charging potential of each photoreceptor] In this way, for an amorphous silicon photoreceptor without a surface layer, the charging potential decreases significantly as the number of repetitions increases and when washed in a high i and high humidity atmosphere. In contrast, when the surface #j'fr was set using the button of the present invention, the charging potential was almost constant even under the conditions of high temperature and high humidity and the number of repetitions was increased.

比較例2= 容量結合型プラズマCVD装置の反応室内の所定の位置
に円筒状M基板を設僧し、基析瀉度を所定の温度である
2Sθ℃に維持し、反応室内に100Xシ′2ン(5N
−14)  ガスを毎分/コθeC。
Comparative Example 2 = A cylindrical M substrate was placed at a predetermined position in the reaction chamber of a capacitively coupled plasma CVD apparatus, the substrate temperature was maintained at a predetermined temperature of 2Sθ°C, and a 100X film was placed in the reaction chamber. (5N
-14) Gas per minute/koθeC.

水素希釈の1000p1000ppラン(B、l−16
)  ガスを毎分3Qcc、  および100%のエチ
レン(C,H4)  ffニス1毎 水素(H3)ガスを毎分737cc  で流入させ、反
応槽内t−Q 、 !fTorr  の内圧に維持した
後、/J−jAMs−+z  の交周波電力を投入して
、グロー放′RLを生じせしめ、高周波電源の出力をg
3WVc#持した。このよう圧して円筒状のM基板上に
、厚さ23μmで非晶澗ケイ素を主体とし不純物として
ホウ素、更に、炭素を含有するp型半導体から成る光尋
電ノやセを有する感光体を得た。
1000p1000pp run with hydrogen dilution (B, l-16
) gas at 3 Qcc per minute, and hydrogen (H3) gas per minute of 100% ethylene (C, H4) ff varnish at 737 cc per minute, and t-Q in the reaction tank, ! After maintaining the internal pressure at fTorr, alternating frequency power of /J-jAMs-+z is applied to generate glow emission 'RL, and the output of the high-frequency power supply is changed to g.
Holds 3WVc#. By applying pressure in this way, a photoreceptor having a thickness of 23 μm and consisting of a p-type semiconductor mainly composed of amorphous silicon and containing boron and carbon as impurities was obtained on a cylindrical M substrate. Ta.

このようVCして得られ几感光体を複写機に入れ、正の
コロナ帯電方式で画IJRP@IIを行なったところ、
集用に耐え得る画像濃度は得られなかった。また、この
感光体管30℃、g3XRH(r)*境下テ画質評価し
たところ、画像の流れが観察され喪。
When the photoconductor obtained by VC was placed in a copying machine and image IJRP@II was performed using a positive corona charging method,
It was not possible to obtain an image density sufficient for repeated use. In addition, when the image quality of this photoreceptor tube was evaluated at 30°C and g3XRH(r)*, image flow was observed.

実施例7: 比較例コと四一方法、同一条件にて作成した非晶質ケイ
素を主体としホウ素および炭素管含有するp型半導体か
ら成る光導電層を有する感光体の上に、ジル;ニウムア
セテルアセトネー)7重量部、メチルアルコール50重
量部およびn−ブチルアルコールからなる溶液を浸漬塗
布し、2!;0℃で2時間乾燥硬化して、0.2μm犀
の表面層を有する感光体を得た。
Example 7: On a photoreceptor having a photoconductive layer made of a p-type semiconductor mainly composed of amorphous silicon and containing boron and carbon tubes, prepared using the same methods and conditions as in Comparative Examples 1 and 41, A solution consisting of 7 parts by weight of methyl alcohol, 50 parts by weight of methyl alcohol, and n-butyl alcohol was applied by dip coating, and 2! The photoreceptor was dried and cured at 0° C. for 2 hours to obtain a photoreceptor having a 0.2 μm rhinoceros surface layer.

このよう圧して得られた感光体を複写機に入れ、正のコ
ロナ帯電方式によ)画lIL評価し次ところ、初期時で
は実用上問題のない画像m度が得られた。
The photoreceptor thus obtained was placed in a copying machine, and the image quality was evaluated using a positive corona charging method.As a result, an image quality of no problem for practical use was obtained at the initial stage.

また、複与操作を5万回繰り返したが画像濃度の低下は
みられなかった。この感光体を30℃、g!fXRHO
墳境下で画質評価を行なったが画像の流れにみられず?
th解像度を示した。
Further, although the duplication operation was repeated 50,000 times, no decrease in image density was observed. This photoreceptor was heated at 30°C, g! fXRHO
I evaluated the image quality under the burial mound, but could not see the flow of the image?
th resolution was shown.

比較例3: 容釦結合型グラズマCVD舷館の反応室内の所定の位曾
に円筒状す基板を設置し、逓板漉度全所定の温度である
2!;O”Cに維持し、反疋室内に100%シラン(S
IH,)ガスを毎分/2Qcc、水素希釈O/ 00 
Q opmジ?ラン(B、H6)  ガスを毎分30c
c1および100%の窒素(N2)カ、’l。
Comparative Example 3: A cylindrical substrate was installed at a predetermined position in the reaction chamber of a button-coupled glazma CVD gunwale, and the temperature of the transducer plate was 2! ; Maintain the temperature at O”C and add 100% silane (S
IH,) gas per minute/2Qcc, hydrogen dilution O/00
Q opmji? Run (B, H6) Gas at 30c/min
c1 and 100% nitrogen (N2),'l.

全毎分90cc、さらlIC10096水素(H)  
ガスを毎分/ Q cc  で流入させ、反応槽内fO
,5Torr  の内圧に維持した後、/3−、t4M
Hz  O父周波電力を投入;−て、グロー放電を生じ
せしめ、高周波電源の出力をgswK維持した。このよ
うにして円筒状のAJA板上に、厚さ25μmで非晶質
ケイ素を主体とし不純物としてホウ素、更に、窒Xを含
有するp型半導体から成る光導ill、層を有する感光
体を得た。
Total 90cc per minute, further IC10096 hydrogen (H)
Gas is introduced at a rate of Q cc per minute, and the fO in the reaction tank is
After maintaining the internal pressure at ,5Torr, /3-,t4M
Hz O father frequency power was applied; - to generate a glow discharge and maintain the output of the high frequency power supply at gswK. In this way, a photoconductor having a 25 μm thick light guide layer made of a p-type semiconductor mainly composed of amorphous silicon and containing boron and nitrogen X as impurities was obtained on a cylindrical AJA plate. .

°   このようにして得られた感光体を複写機に入れ
、正のコロナ帯電方式により画質評価を行なったところ
、゛実用に#え得るi[111g#濃度はイむられなが
った。
When the photoreceptor thus obtained was placed in a copying machine and the image quality was evaluated using a positive corona charging method, it was found that ``a density of i[111 g#'' that could be achieved in practical use could not be achieved.

また、この感光体を30℃、g5%R1−1の環境下で
画質評価したところ、画像の流れが観察された。
Further, when this photoreceptor was evaluated for image quality under an environment of 30° C. and g5% R1-1, image flow was observed.

実施上ンリg : 比較?113と1!1j一方法、同一条件にて作成した
非晶餉ケイJJ!、?主体とじホウ素および室*r金含
有るp型半導体から成る光導1i)’!r有する感光体
の上に、ジルコニウムテトラブトキシド1重量部、エチ
ルアルコール100重量部からなる溶液を浸fj!、塗
布し、2!;0℃で二時間乾燥硬化して、0.2μm厚
の表面Jfkを有する感光体を得た。
Implementation: Comparison? 113 and 1!1j Amorphous Kei JJ made by one method and under the same conditions! ,? A light guide composed of a p-type semiconductor containing boron as the main body and gold as the main body 1i)'! A solution consisting of 1 part by weight of zirconium tetrabutoxide and 100 parts by weight of ethyl alcohol is immersed onto the photoreceptor having fj! , apply, 2! ; Drying and curing at 0° C. for 2 hours yielded a photoreceptor having a surface Jfk with a thickness of 0.2 μm.

このようにして得られた感光体を複写機に入れ、正のコ
ロナ帯電方式により画質評価したところ、初期時では寅
用上問題のない画像濃度が得られた。
When the photoreceptor thus obtained was placed in a copying machine and the image quality was evaluated using a positive corona charging method, an image density that was acceptable for use at the initial stage was obtained.

また、り写摂作を5万回繰り返したが画倖@度の低下は
みられなかつ九。この感光体f30℃、t5%RHの*
境下で画質評価を行なったが1Ilii像の流れはみら
れず^解傳置會示し友。
In addition, even after repeating the photoshoot 50,000 times, there was no decrease in the quality of the painting. This photoreceptor f30℃, t5%RH*
I evaluated the image quality under the shrine, but no flow of the 1Ilii image was observed.

比較ガク: 容墓結合型グラズマCVD装置の反応室内の所定の位置
1こ円筒状M基板を設置し、基板偏置を所定の偏置であ
る250℃&C維持し、反応室内に10096シラン(
5IH4) gスt−az分/、2(7CC,水素希釈
)/ 000 ppmシバ?ラン(82H,)  ガス
を毎分30cc、および、700%の酸素ガスを毎分/
、Qcc、’4らに10096水ff1(H2)  ガ
スを毎分g 9 cc  で流入させ、反応槽内fQ 
、 j; Torrの内圧に維持した後、/3−!;l
sMHz  の交周波翫力を投入して、グロー放電を生
じせしめ、高周波電源の出力′f−gswtch#持し
、た。このようにして円筒状のり基板上に、厚さコSμ
mで非晶質ケイ素を主体とし不純物としてホウ素、史に
1醇素を含有するp型半導体から成る光導1〜を肩する
感光体+mた。
Comparison: A cylindrical M substrate was installed at a predetermined position in the reaction chamber of a vessel-coupled glazma CVD device, the substrate eccentricity was maintained at the predetermined eccentricity of 250°C &C, and 10096 silane (
5IH4) gst-az min/, 2 (7CC, hydrogen dilution)/000 ppm Shiba? Run (82H,) Gas at 30cc/min and 700% oxygen gas/min.
, Qcc, '4, etc., 10096 water ff1 (H2) gas is introduced at g 9 cc per minute, and fQ in the reaction tank is
, j; /3-! after maintaining the internal pressure at Torr. ;l
An alternating frequency wave of sMHz was applied to generate a glow discharge, and the output of the high frequency power source was maintained at f-gswtch#. In this way, on the cylindrical glue substrate, the thickness Sμ
The photoreceptor +m was made of a p-type semiconductor mainly composed of amorphous silicon and containing boron and 1% impurity as an impurity.

このようKして得られた感光体を複写様に入れ、正のコ
ロナ帯電方式により画質評価を行なったところ、実用に
耐え得る画1才濃度は得られなかった。
When the photoreceptor thus obtained was placed in a copying manner and the image quality was evaluated using a positive corona charging method, a practically acceptable image density was not obtained.

また、この感光体f1″30℃s II!;9bRHI
7′)環境下でIthI黄評価したところ、画像の流j
か統紐された。
Also, this photoreceptor f1″30℃s II!;9bRHI
7') When IthI yellow was evaluated under the environment, the flow of the image was
Or tied together.

“笑施例り: 比敦汐リグとIDJ一方法、同−栄件で作成した非晶質
ケイ″J、r生体とし不純物としてホウ素お裏ひ酸素全
含有するp型半導体から成る光導電層を有する感光体の
上に、ジルコニウムテトラブトキシド/11c%部、メ
チルトリメトキシシラy1重量部、xプルアルコール/
 Q Q i< J1部およびインプロビルアルコール
100重餠部から成る溶液?浸漬塗布し、250℃で2
時間乾燥硬化して、0.1μm厚の表面1柚金有する感
光体を得九。
“Example: Amorphous silicon fabricated using the Hitoshio rig and IDJ method,” J, r photoconductive layer consisting of a p-type semiconductor fully containing boron and oxygen as impurities. zirconium tetrabutoxide/11c% parts, methyltrimethoxysilane y1 part by weight,
Q Q i< A solution consisting of 1 part J and 100 parts Improvil alcohol? Dip coating and 250℃
After drying and curing for a period of time, a photoreceptor having a surface layer of 0.1 μm thick was obtained.

このよう処して得られた感光体?複写様に入れ、正のコ
ロナ帯電方式により画質評価したところ、初期時でti
実用上問題のない画@濃度が得られた。
A photoreceptor obtained through this process? When the image quality was evaluated using a positive corona charging method, it was found that ti
An image @density with no practical problems was obtained.

また、複写操作を5万回繰り返したが画像濃度の低下は
みられなかつ念。この感光体’t30℃、g5%RH1
7)環境下で画質評価7行なったが画像の流れはみられ
ず高解像度を示した。
In addition, although the copying operation was repeated 50,000 times, no decrease in image density was observed. This photoreceptor't30℃, g5%RH1
7) Image quality was evaluated 7 times under environmental conditions, but no image flow was observed, indicating high resolution.

発明の効果 本発明の篭子写真用忌光体は、非晶質ケイ素からの成る
感光体の優れた特性である高機械的強度、高耐久性、高
耐熱、画先感度を保持し、しかも、外部キ梼、や便用回
数の影智會受けずに商いt荷保持カケ有して、潰れた品
質の画像を供することができる。
Effects of the Invention The light repellent material for basket photography of the present invention maintains the excellent properties of a photoreceptor made of amorphous silicon, such as high mechanical strength, high durability, high heat resistance, and image tip sensitivity. However, it is possible to provide images of poor quality without having to worry about external access or the influence of the number of times of use.

Claims (4)

【特許請求の範囲】[Claims] (1)導電性基板上に光導電層および表面層を順次積層
して成る電子写真用感光体において、 前記光導電層が、水素原子を含有する非晶質ケイ素を生
体とし不純物としてホウ素原子を含有するp型半導体か
ら成り、 前記表面層が、有機ジルコニウム化合物を少なくとも1
種類含む溶液の乾燥硬化物から成ることを特徴とする電
子写真感光体。
(1) In an electrophotographic photoreceptor comprising a photoconductive layer and a surface layer sequentially laminated on a conductive substrate, the photoconductive layer is made of amorphous silicon containing hydrogen atoms and boron atoms as impurities. the surface layer contains at least one organic zirconium compound;
1. An electrophotographic photoreceptor comprising a dried and cured product of a solution containing various types of electrophotographic photoreceptors.
(2)前記、有機ジルコニウム化合物が、ジルコニウム
錯体またはジルコニウムアルコキシドである特許請求の
範囲第(1)項記載の電子写真用感光体。
(2) The electrophotographic photoreceptor according to claim (1), wherein the organic zirconium compound is a zirconium complex or a zirconium alkoxide.
(3)導電性基板上に光導電層および表面層を順次積層
して成る電子写真用感光体において、 前記光導電層が、水素原子を含有する非晶質ケイ素を生
体とし不純物としてホウ素原子を含有するp型半導体か
ら成り、更に、炭素原子、窒素原子または酸素原子のう
ちの少なくとも1種類を含有しており、 前記表面層が、有機ジルコニウム化合物を少なくとも1
種類含む溶液の乾燥硬化物から成ることを特徴とする電
子写真用感光体。
(3) In an electrophotographic photoreceptor comprising a photoconductive layer and a surface layer sequentially laminated on a conductive substrate, the photoconductive layer is made of amorphous silicon containing hydrogen atoms and boron atoms as impurities. The surface layer further contains at least one type of carbon atom, nitrogen atom, or oxygen atom, and the surface layer contains at least one organic zirconium compound.
1. A photoreceptor for electrophotography, characterized in that it is made of a dried and cured product of a solution containing various types of photoreceptors.
(4)前記有機ジルコニウム化合物が、ジルコニウム錯
体またはジルコニウムアルコキシドである特許請求の範
囲第(3)項記載の電子写真用感光体。
(4) The electrophotographic photoreceptor according to claim (3), wherein the organic zirconium compound is a zirconium complex or a zirconium alkoxide.
JP22557584A 1984-10-26 1984-10-26 Electrophotographic photoconductor Expired - Lifetime JPH0723964B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22557584A JPH0723964B2 (en) 1984-10-26 1984-10-26 Electrophotographic photoconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22557584A JPH0723964B2 (en) 1984-10-26 1984-10-26 Electrophotographic photoconductor

Publications (2)

Publication Number Publication Date
JPS61103164A true JPS61103164A (en) 1986-05-21
JPH0723964B2 JPH0723964B2 (en) 1995-03-15

Family

ID=16831454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22557584A Expired - Lifetime JPH0723964B2 (en) 1984-10-26 1984-10-26 Electrophotographic photoconductor

Country Status (1)

Country Link
JP (1) JPH0723964B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6363051A (en) * 1986-09-04 1988-03-19 Fuji Xerox Co Ltd Electrophotographic sensitive body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6363051A (en) * 1986-09-04 1988-03-19 Fuji Xerox Co Ltd Electrophotographic sensitive body

Also Published As

Publication number Publication date
JPH0723964B2 (en) 1995-03-15

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