JPS61102046U - - Google Patents
Info
- Publication number
- JPS61102046U JPS61102046U JP18607984U JP18607984U JPS61102046U JP S61102046 U JPS61102046 U JP S61102046U JP 18607984 U JP18607984 U JP 18607984U JP 18607984 U JP18607984 U JP 18607984U JP S61102046 U JPS61102046 U JP S61102046U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- scribe
- etching
- separated
- crystal plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18607984U JPS61102046U (enrdf_load_stackoverflow) | 1984-12-10 | 1984-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18607984U JPS61102046U (enrdf_load_stackoverflow) | 1984-12-10 | 1984-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61102046U true JPS61102046U (enrdf_load_stackoverflow) | 1986-06-28 |
Family
ID=30743541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18607984U Pending JPS61102046U (enrdf_load_stackoverflow) | 1984-12-10 | 1984-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61102046U (enrdf_load_stackoverflow) |
-
1984
- 1984-12-10 JP JP18607984U patent/JPS61102046U/ja active Pending
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