JPS6093973A - 半導体試験装置の検査装置 - Google Patents

半導体試験装置の検査装置

Info

Publication number
JPS6093973A
JPS6093973A JP20330383A JP20330383A JPS6093973A JP S6093973 A JPS6093973 A JP S6093973A JP 20330383 A JP20330383 A JP 20330383A JP 20330383 A JP20330383 A JP 20330383A JP S6093973 A JPS6093973 A JP S6093973A
Authority
JP
Japan
Prior art keywords
test
input
semiconductor
driver
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20330383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249670B2 (ko
Inventor
Yasumasa Nishimura
西村　安正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP20330383A priority Critical patent/JPS6093973A/ja
Publication of JPS6093973A publication Critical patent/JPS6093973A/ja
Publication of JPH0249670B2 publication Critical patent/JPH0249670B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP20330383A 1983-10-28 1983-10-28 半導体試験装置の検査装置 Granted JPS6093973A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20330383A JPS6093973A (ja) 1983-10-28 1983-10-28 半導体試験装置の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20330383A JPS6093973A (ja) 1983-10-28 1983-10-28 半導体試験装置の検査装置

Publications (2)

Publication Number Publication Date
JPS6093973A true JPS6093973A (ja) 1985-05-25
JPH0249670B2 JPH0249670B2 (ko) 1990-10-30

Family

ID=16471796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20330383A Granted JPS6093973A (ja) 1983-10-28 1983-10-28 半導体試験装置の検査装置

Country Status (1)

Country Link
JP (1) JPS6093973A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6366470A (ja) * 1986-04-07 1988-03-25 テクトロニツクス・インコ−ポレイテツド プロ−ブ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS453400Y1 (ko) * 1967-04-24 1970-02-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS453400Y1 (ko) * 1967-04-24 1970-02-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6366470A (ja) * 1986-04-07 1988-03-25 テクトロニツクス・インコ−ポレイテツド プロ−ブ装置

Also Published As

Publication number Publication date
JPH0249670B2 (ko) 1990-10-30

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