JPH0249670B2 - - Google Patents
Info
- Publication number
- JPH0249670B2 JPH0249670B2 JP58203303A JP20330383A JPH0249670B2 JP H0249670 B2 JPH0249670 B2 JP H0249670B2 JP 58203303 A JP58203303 A JP 58203303A JP 20330383 A JP20330383 A JP 20330383A JP H0249670 B2 JPH0249670 B2 JP H0249670B2
- Authority
- JP
- Japan
- Prior art keywords
- test
- semiconductor device
- semiconductor
- input
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012360 testing method Methods 0.000 claims description 130
- 239000004065 semiconductor Substances 0.000 claims description 74
- 238000007689 inspection Methods 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims description 10
- 230000007547 defect Effects 0.000 claims description 6
- 230000002950 deficient Effects 0.000 claims description 5
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 4
- 230000005856 abnormality Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20330383A JPS6093973A (ja) | 1983-10-28 | 1983-10-28 | 半導体試験装置の検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20330383A JPS6093973A (ja) | 1983-10-28 | 1983-10-28 | 半導体試験装置の検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6093973A JPS6093973A (ja) | 1985-05-25 |
| JPH0249670B2 true JPH0249670B2 (ko) | 1990-10-30 |
Family
ID=16471796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20330383A Granted JPS6093973A (ja) | 1983-10-28 | 1983-10-28 | 半導体試験装置の検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6093973A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4758779A (en) * | 1986-04-07 | 1988-07-19 | Tektronix, Inc. | Probe body for an electrical measurement system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS453400Y1 (ko) * | 1967-04-24 | 1970-02-16 |
-
1983
- 1983-10-28 JP JP20330383A patent/JPS6093973A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS453400Y1 (ko) * | 1967-04-24 | 1970-02-16 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6093973A (ja) | 1985-05-25 |
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