JPS6090810A - フルオロシランガスの製造方法 - Google Patents

フルオロシランガスの製造方法

Info

Publication number
JPS6090810A
JPS6090810A JP19515583A JP19515583A JPS6090810A JP S6090810 A JPS6090810 A JP S6090810A JP 19515583 A JP19515583 A JP 19515583A JP 19515583 A JP19515583 A JP 19515583A JP S6090810 A JPS6090810 A JP S6090810A
Authority
JP
Japan
Prior art keywords
fluorosilane
gas
impurities
activated carbon
chlorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19515583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6241166B2 (enExample
Inventor
Yukihiro Okita
興田　幸廣
Kensaku Maruyama
丸山　謙作
Isao Harada
功 原田
Nobuhiko Koto
信彦 古藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP19515583A priority Critical patent/JPS6090810A/ja
Publication of JPS6090810A publication Critical patent/JPS6090810A/ja
Publication of JPS6241166B2 publication Critical patent/JPS6241166B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP19515583A 1983-10-20 1983-10-20 フルオロシランガスの製造方法 Granted JPS6090810A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19515583A JPS6090810A (ja) 1983-10-20 1983-10-20 フルオロシランガスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19515583A JPS6090810A (ja) 1983-10-20 1983-10-20 フルオロシランガスの製造方法

Publications (2)

Publication Number Publication Date
JPS6090810A true JPS6090810A (ja) 1985-05-22
JPS6241166B2 JPS6241166B2 (enExample) 1987-09-01

Family

ID=16336342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19515583A Granted JPS6090810A (ja) 1983-10-20 1983-10-20 フルオロシランガスの製造方法

Country Status (1)

Country Link
JP (1) JPS6090810A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4900530A (en) * 1986-07-23 1990-02-13 Enichem Agricoltura S.P.A. Process for the production of silicon tetrafluoride
US5232602A (en) * 1992-07-01 1993-08-03 Hemlock Semiconductor Corporation Phosphorous removal from tetrachlorosilane

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57156317A (en) * 1981-03-18 1982-09-27 Central Glass Co Ltd Purification of silicon tetrafluoride

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57156317A (en) * 1981-03-18 1982-09-27 Central Glass Co Ltd Purification of silicon tetrafluoride

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4900530A (en) * 1986-07-23 1990-02-13 Enichem Agricoltura S.P.A. Process for the production of silicon tetrafluoride
US5232602A (en) * 1992-07-01 1993-08-03 Hemlock Semiconductor Corporation Phosphorous removal from tetrachlorosilane

Also Published As

Publication number Publication date
JPS6241166B2 (enExample) 1987-09-01

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