JPH0352406B2 - - Google Patents

Info

Publication number
JPH0352406B2
JPH0352406B2 JP21731684A JP21731684A JPH0352406B2 JP H0352406 B2 JPH0352406 B2 JP H0352406B2 JP 21731684 A JP21731684 A JP 21731684A JP 21731684 A JP21731684 A JP 21731684A JP H0352406 B2 JPH0352406 B2 JP H0352406B2
Authority
JP
Japan
Prior art keywords
fluorosilane
gas
activated carbon
present
chlorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21731684A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6197129A (ja
Inventor
Hiroyuki Momotake
Yukihiro Yoda
Nobuhiko Koto
Kensaku Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP21731684A priority Critical patent/JPS6197129A/ja
Publication of JPS6197129A publication Critical patent/JPS6197129A/ja
Publication of JPH0352406B2 publication Critical patent/JPH0352406B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP21731684A 1984-10-18 1984-10-18 フルオロシラン類の精製法 Granted JPS6197129A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21731684A JPS6197129A (ja) 1984-10-18 1984-10-18 フルオロシラン類の精製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21731684A JPS6197129A (ja) 1984-10-18 1984-10-18 フルオロシラン類の精製法

Publications (2)

Publication Number Publication Date
JPS6197129A JPS6197129A (ja) 1986-05-15
JPH0352406B2 true JPH0352406B2 (enExample) 1991-08-09

Family

ID=16702253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21731684A Granted JPS6197129A (ja) 1984-10-18 1984-10-18 フルオロシラン類の精製法

Country Status (1)

Country Link
JP (1) JPS6197129A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1196983B (it) * 1986-07-23 1988-11-25 Enichem Agricoltura Spa Procedimento per la produzione di tetrafluoruro di silicio
US5232602A (en) * 1992-07-01 1993-08-03 Hemlock Semiconductor Corporation Phosphorous removal from tetrachlorosilane
DE102014013250B4 (de) * 2014-09-08 2021-11-25 Christian Bauch Verfahren zur Aufreinigung halogenierter Oligosilane

Also Published As

Publication number Publication date
JPS6197129A (ja) 1986-05-15

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