JPS6071540A - 基板用ガラス - Google Patents

基板用ガラス

Info

Publication number
JPS6071540A
JPS6071540A JP58176477A JP17647783A JPS6071540A JP S6071540 A JPS6071540 A JP S6071540A JP 58176477 A JP58176477 A JP 58176477A JP 17647783 A JP17647783 A JP 17647783A JP S6071540 A JPS6071540 A JP S6071540A
Authority
JP
Japan
Prior art keywords
glass
pbo
zno
thermal expansion
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58176477A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04936B2 (enExample
Inventor
Hisao Hatta
八田　比佐雄
Mutsumi Miyazaki
睦 宮崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohara Inc
Original Assignee
Ohara Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohara Inc filed Critical Ohara Inc
Priority to JP58176477A priority Critical patent/JPS6071540A/ja
Priority to US06/561,750 priority patent/US4501819A/en
Priority to GB08333560A priority patent/GB2134100A/en
Priority to DE3345943A priority patent/DE3345943C2/de
Publication of JPS6071540A publication Critical patent/JPS6071540A/ja
Publication of JPH04936B2 publication Critical patent/JPH04936B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C4/00—Compositions for glass with special properties
    • C03C4/0085—Compositions for glass with special properties for UV-transmitting glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/102—Glass compositions containing silica with 40% to 90% silica, by weight containing lead
    • C03C3/108—Glass compositions containing silica with 40% to 90% silica, by weight containing lead containing boron

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Glass Compositions (AREA)
JP58176477A 1982-12-23 1983-09-26 基板用ガラス Granted JPS6071540A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58176477A JPS6071540A (ja) 1983-09-26 1983-09-26 基板用ガラス
US06/561,750 US4501819A (en) 1982-12-23 1983-12-15 Glass for a photomask
GB08333560A GB2134100A (en) 1982-12-23 1983-12-16 Glass for a photomask
DE3345943A DE3345943C2 (de) 1982-12-23 1983-12-20 Verwendung eines im wesentlichen SiO↓2↓, B↓2↓O↓3↓, Al↓2↓O↓3↓, MgO und PbO enthaltenden Glases für eine Photomaske und ein zusätzlich BaO und ZnO enthaltendes Glas dieses Systems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58176477A JPS6071540A (ja) 1983-09-26 1983-09-26 基板用ガラス

Publications (2)

Publication Number Publication Date
JPS6071540A true JPS6071540A (ja) 1985-04-23
JPH04936B2 JPH04936B2 (enExample) 1992-01-09

Family

ID=16014351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58176477A Granted JPS6071540A (ja) 1982-12-23 1983-09-26 基板用ガラス

Country Status (1)

Country Link
JP (1) JPS6071540A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622259A (ja) * 1985-06-27 1987-01-08 Hoya Corp フオトマスクブランクとフオトマスク
EP0714862A1 (en) 1994-11-30 1996-06-05 Asahi Glass Company Ltd. Alkali-free glass and flat panel display
JP2016074575A (ja) * 2014-10-08 2016-05-12 株式会社オハラ ガラス
JP2019011244A (ja) * 2017-06-29 2019-01-24 日本板硝子株式会社 ガラス組成物及びこれを用いたガラス製品

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622259A (ja) * 1985-06-27 1987-01-08 Hoya Corp フオトマスクブランクとフオトマスク
EP0714862A1 (en) 1994-11-30 1996-06-05 Asahi Glass Company Ltd. Alkali-free glass and flat panel display
JP2016074575A (ja) * 2014-10-08 2016-05-12 株式会社オハラ ガラス
JP2019011244A (ja) * 2017-06-29 2019-01-24 日本板硝子株式会社 ガラス組成物及びこれを用いたガラス製品

Also Published As

Publication number Publication date
JPH04936B2 (enExample) 1992-01-09

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