JPS6056069A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPS6056069A
JPS6056069A JP58164425A JP16442583A JPS6056069A JP S6056069 A JPS6056069 A JP S6056069A JP 58164425 A JP58164425 A JP 58164425A JP 16442583 A JP16442583 A JP 16442583A JP S6056069 A JPS6056069 A JP S6056069A
Authority
JP
Japan
Prior art keywords
sample
thin film
sample holding
gear
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58164425A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6217027B2 (enExample
Inventor
Kazumi Tanaka
一己 田中
Isamu Inoue
勇 井上
Koichi Kodera
宏一 小寺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58164425A priority Critical patent/JPS6056069A/ja
Publication of JPS6056069A publication Critical patent/JPS6056069A/ja
Publication of JPS6217027B2 publication Critical patent/JPS6217027B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP58164425A 1983-09-06 1983-09-06 薄膜形成装置 Granted JPS6056069A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58164425A JPS6056069A (ja) 1983-09-06 1983-09-06 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58164425A JPS6056069A (ja) 1983-09-06 1983-09-06 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS6056069A true JPS6056069A (ja) 1985-04-01
JPS6217027B2 JPS6217027B2 (enExample) 1987-04-15

Family

ID=15792904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58164425A Granted JPS6056069A (ja) 1983-09-06 1983-09-06 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS6056069A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318063A (ja) * 1986-07-10 1988-01-25 Nippon Kokan Kk <Nkk> 真空蒸着方法
US7817927B2 (en) 2006-08-29 2010-10-19 Brother Kogyo Kabushiki Kaisha Image forming apparatus with developer collection

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5213935U (enExample) * 1975-06-06 1977-01-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5213935U (enExample) * 1975-06-06 1977-01-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318063A (ja) * 1986-07-10 1988-01-25 Nippon Kokan Kk <Nkk> 真空蒸着方法
US7817927B2 (en) 2006-08-29 2010-10-19 Brother Kogyo Kabushiki Kaisha Image forming apparatus with developer collection

Also Published As

Publication number Publication date
JPS6217027B2 (enExample) 1987-04-15

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