JPH0527488Y2 - - Google Patents

Info

Publication number
JPH0527488Y2
JPH0527488Y2 JP1989019262U JP1926289U JPH0527488Y2 JP H0527488 Y2 JPH0527488 Y2 JP H0527488Y2 JP 1989019262 U JP1989019262 U JP 1989019262U JP 1926289 U JP1926289 U JP 1926289U JP H0527488 Y2 JPH0527488 Y2 JP H0527488Y2
Authority
JP
Japan
Prior art keywords
retaining ring
semiconductor wafer
planet
holding
deposition source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989019262U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02110666U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989019262U priority Critical patent/JPH0527488Y2/ja
Publication of JPH02110666U publication Critical patent/JPH02110666U/ja
Application granted granted Critical
Publication of JPH0527488Y2 publication Critical patent/JPH0527488Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1989019262U 1989-02-20 1989-02-20 Expired - Lifetime JPH0527488Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989019262U JPH0527488Y2 (enExample) 1989-02-20 1989-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989019262U JPH0527488Y2 (enExample) 1989-02-20 1989-02-20

Publications (2)

Publication Number Publication Date
JPH02110666U JPH02110666U (enExample) 1990-09-04
JPH0527488Y2 true JPH0527488Y2 (enExample) 1993-07-13

Family

ID=31234616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989019262U Expired - Lifetime JPH0527488Y2 (enExample) 1989-02-20 1989-02-20

Country Status (1)

Country Link
JP (1) JPH0527488Y2 (enExample)

Also Published As

Publication number Publication date
JPH02110666U (enExample) 1990-09-04

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