JPS6047908A - 表面欠陥計測装置 - Google Patents

表面欠陥計測装置

Info

Publication number
JPS6047908A
JPS6047908A JP15616183A JP15616183A JPS6047908A JP S6047908 A JPS6047908 A JP S6047908A JP 15616183 A JP15616183 A JP 15616183A JP 15616183 A JP15616183 A JP 15616183A JP S6047908 A JPS6047908 A JP S6047908A
Authority
JP
Japan
Prior art keywords
light
level
measured
photoelectric conversion
transmission path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15616183A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314123B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hideyuki Matsubara
秀之 松原
Toshio Hashimoto
橋本　利夫
Kenichi Konno
今野　憲一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP15616183A priority Critical patent/JPS6047908A/ja
Publication of JPS6047908A publication Critical patent/JPS6047908A/ja
Publication of JPH0314123B2 publication Critical patent/JPH0314123B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP15616183A 1983-08-26 1983-08-26 表面欠陥計測装置 Granted JPS6047908A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15616183A JPS6047908A (ja) 1983-08-26 1983-08-26 表面欠陥計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15616183A JPS6047908A (ja) 1983-08-26 1983-08-26 表面欠陥計測装置

Publications (2)

Publication Number Publication Date
JPS6047908A true JPS6047908A (ja) 1985-03-15
JPH0314123B2 JPH0314123B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-02-26

Family

ID=15621678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15616183A Granted JPS6047908A (ja) 1983-08-26 1983-08-26 表面欠陥計測装置

Country Status (1)

Country Link
JP (1) JPS6047908A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0314123B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-02-26

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