JPS6044075A - 塗布剤の自動塗布装置 - Google Patents
塗布剤の自動塗布装置Info
- Publication number
- JPS6044075A JPS6044075A JP15285083A JP15285083A JPS6044075A JP S6044075 A JPS6044075 A JP S6044075A JP 15285083 A JP15285083 A JP 15285083A JP 15285083 A JP15285083 A JP 15285083A JP S6044075 A JPS6044075 A JP S6044075A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- adhesive
- coating
- coating agent
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 39
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 239000000853 adhesive Substances 0.000 claims abstract description 20
- 230000001070 adhesive effect Effects 0.000 claims abstract description 20
- 238000003860 storage Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 25
- 238000000034 method Methods 0.000 description 5
- 239000010410 layer Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15285083A JPS6044075A (ja) | 1983-08-22 | 1983-08-22 | 塗布剤の自動塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15285083A JPS6044075A (ja) | 1983-08-22 | 1983-08-22 | 塗布剤の自動塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6044075A true JPS6044075A (ja) | 1985-03-08 |
| JPS6223621B2 JPS6223621B2 (enrdf_load_stackoverflow) | 1987-05-25 |
Family
ID=15549492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15285083A Granted JPS6044075A (ja) | 1983-08-22 | 1983-08-22 | 塗布剤の自動塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6044075A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61104623A (ja) * | 1984-10-29 | 1986-05-22 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 回転塗布方法及び回転塗布装置 |
-
1983
- 1983-08-22 JP JP15285083A patent/JPS6044075A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61104623A (ja) * | 1984-10-29 | 1986-05-22 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 回転塗布方法及び回転塗布装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6223621B2 (enrdf_load_stackoverflow) | 1987-05-25 |
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