JPS6042706A - カラ−フイルタ− - Google Patents

カラ−フイルタ−

Info

Publication number
JPS6042706A
JPS6042706A JP58151021A JP15102183A JPS6042706A JP S6042706 A JPS6042706 A JP S6042706A JP 58151021 A JP58151021 A JP 58151021A JP 15102183 A JP15102183 A JP 15102183A JP S6042706 A JPS6042706 A JP S6042706A
Authority
JP
Japan
Prior art keywords
dye
green
layer
phthalocyanine
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58151021A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0257283B2 (enrdf_load_stackoverflow
Inventor
Kojiro Yokono
横野　幸次郎
Hisashi Shindo
進藤　寿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58151021A priority Critical patent/JPS6042706A/ja
Publication of JPS6042706A publication Critical patent/JPS6042706A/ja
Publication of JPH0257283B2 publication Critical patent/JPH0257283B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/233—Manufacture of photoelectric screens or charge-storage screens

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Optical Filters (AREA)
JP58151021A 1983-08-18 1983-08-18 カラ−フイルタ− Granted JPS6042706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58151021A JPS6042706A (ja) 1983-08-18 1983-08-18 カラ−フイルタ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58151021A JPS6042706A (ja) 1983-08-18 1983-08-18 カラ−フイルタ−

Publications (2)

Publication Number Publication Date
JPS6042706A true JPS6042706A (ja) 1985-03-07
JPH0257283B2 JPH0257283B2 (enrdf_load_stackoverflow) 1990-12-04

Family

ID=15509564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58151021A Granted JPS6042706A (ja) 1983-08-18 1983-08-18 カラ−フイルタ−

Country Status (1)

Country Link
JP (1) JPS6042706A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61102602A (ja) * 1984-10-25 1986-05-21 Nec Corp カラ−フイルタ−およびその製造方法
JPS6289906A (ja) * 1985-06-10 1987-04-24 Nec Corp カラ−フイルタ−
JPS62280807A (ja) * 1986-05-30 1987-12-05 Nec Corp カラ−フイルタ−
JP2002305295A (ja) * 2001-04-05 2002-10-18 Sony Corp カラー固体撮像素子およびその製造方法
KR20170091525A (ko) * 2016-02-01 2017-08-09 스미또모 가가꾸 가부시끼가이샤 화합물 및 착색 조성물
WO2024171841A1 (ja) * 2023-02-16 2024-08-22 富士フイルム株式会社 着色組成物、膜、光学フィルタ、固体撮像素子、画像表示装置および化合物

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61102602A (ja) * 1984-10-25 1986-05-21 Nec Corp カラ−フイルタ−およびその製造方法
JPS6289906A (ja) * 1985-06-10 1987-04-24 Nec Corp カラ−フイルタ−
JPS62280807A (ja) * 1986-05-30 1987-12-05 Nec Corp カラ−フイルタ−
JP2002305295A (ja) * 2001-04-05 2002-10-18 Sony Corp カラー固体撮像素子およびその製造方法
KR20170091525A (ko) * 2016-02-01 2017-08-09 스미또모 가가꾸 가부시끼가이샤 화합물 및 착색 조성물
JP2017137490A (ja) * 2016-02-01 2017-08-10 住友化学株式会社 化合物及び着色組成物
WO2024171841A1 (ja) * 2023-02-16 2024-08-22 富士フイルム株式会社 着色組成物、膜、光学フィルタ、固体撮像素子、画像表示装置および化合物

Also Published As

Publication number Publication date
JPH0257283B2 (enrdf_load_stackoverflow) 1990-12-04

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