JPS6041729Y2 - ウエハプロ−ブカ−ド - Google Patents

ウエハプロ−ブカ−ド

Info

Publication number
JPS6041729Y2
JPS6041729Y2 JP3627879U JP3627879U JPS6041729Y2 JP S6041729 Y2 JPS6041729 Y2 JP S6041729Y2 JP 3627879 U JP3627879 U JP 3627879U JP 3627879 U JP3627879 U JP 3627879U JP S6041729 Y2 JPS6041729 Y2 JP S6041729Y2
Authority
JP
Japan
Prior art keywords
wafer
wiring
probe card
probe
card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3627879U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55135985U (OSRAM
Inventor
富仁 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3627879U priority Critical patent/JPS6041729Y2/ja
Publication of JPS55135985U publication Critical patent/JPS55135985U/ja
Application granted granted Critical
Publication of JPS6041729Y2 publication Critical patent/JPS6041729Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3627879U 1979-03-19 1979-03-19 ウエハプロ−ブカ−ド Expired JPS6041729Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3627879U JPS6041729Y2 (ja) 1979-03-19 1979-03-19 ウエハプロ−ブカ−ド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3627879U JPS6041729Y2 (ja) 1979-03-19 1979-03-19 ウエハプロ−ブカ−ド

Publications (2)

Publication Number Publication Date
JPS55135985U JPS55135985U (OSRAM) 1980-09-27
JPS6041729Y2 true JPS6041729Y2 (ja) 1985-12-19

Family

ID=28897136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3627879U Expired JPS6041729Y2 (ja) 1979-03-19 1979-03-19 ウエハプロ−ブカ−ド

Country Status (1)

Country Link
JP (1) JPS6041729Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2576233Y2 (ja) * 1991-08-05 1998-07-09 株式会社アドバンテスト Ｉｃ試験装置のテストヘッドと試料との接続機構

Also Published As

Publication number Publication date
JPS55135985U (OSRAM) 1980-09-27

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