JPS6041266A - 半導体装置作製方法およびその作製用装置 - Google Patents

半導体装置作製方法およびその作製用装置

Info

Publication number
JPS6041266A
JPS6041266A JP58149082A JP14908283A JPS6041266A JP S6041266 A JPS6041266 A JP S6041266A JP 58149082 A JP58149082 A JP 58149082A JP 14908283 A JP14908283 A JP 14908283A JP S6041266 A JPS6041266 A JP S6041266A
Authority
JP
Japan
Prior art keywords
forming
conductive film
groove
semiconductor
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58149082A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0514432B2 (enExample
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP58149082A priority Critical patent/JPS6041266A/ja
Publication of JPS6041266A publication Critical patent/JPS6041266A/ja
Publication of JPH0514432B2 publication Critical patent/JPH0514432B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass

Landscapes

  • Photovoltaic Devices (AREA)
  • Drying Of Semiconductors (AREA)
JP58149082A 1983-08-15 1983-08-15 半導体装置作製方法およびその作製用装置 Granted JPS6041266A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58149082A JPS6041266A (ja) 1983-08-15 1983-08-15 半導体装置作製方法およびその作製用装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58149082A JPS6041266A (ja) 1983-08-15 1983-08-15 半導体装置作製方法およびその作製用装置

Publications (2)

Publication Number Publication Date
JPS6041266A true JPS6041266A (ja) 1985-03-04
JPH0514432B2 JPH0514432B2 (enExample) 1993-02-25

Family

ID=15467299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58149082A Granted JPS6041266A (ja) 1983-08-15 1983-08-15 半導体装置作製方法およびその作製用装置

Country Status (1)

Country Link
JP (1) JPS6041266A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7271042B2 (en) 1996-12-12 2007-09-18 Semiconductor Energy Laboratory Co., Ltd. Laser annealing method and laser annealing device
JP2013536996A (ja) * 2010-09-01 2013-09-26 エルジー イノテック カンパニー リミテッド 太陽光発電装置及びその製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003028949A2 (en) * 2001-10-01 2003-04-10 Xsil Technology Limited Method of machining substrates
WO2004110694A2 (en) * 2003-06-06 2004-12-23 Xsil Technology Limitel Laser machining using a surfactant film

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5712568A (en) * 1980-06-02 1982-01-22 Rca Corp Method of producing solar battery
JPS5753986A (enExample) * 1980-07-25 1982-03-31 Eastman Kodak Co
JPS57176778A (en) * 1981-03-31 1982-10-30 Rca Corp Solar battery array

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5712568A (en) * 1980-06-02 1982-01-22 Rca Corp Method of producing solar battery
JPS5753986A (enExample) * 1980-07-25 1982-03-31 Eastman Kodak Co
JPS57176778A (en) * 1981-03-31 1982-10-30 Rca Corp Solar battery array

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7271042B2 (en) 1996-12-12 2007-09-18 Semiconductor Energy Laboratory Co., Ltd. Laser annealing method and laser annealing device
US7351646B2 (en) * 1996-12-12 2008-04-01 Semiconductor Energy Laboratory Co., Ltd. Laser annealing method and laser annealing device
US7687380B2 (en) 1996-12-12 2010-03-30 Semiconductor Energy Laboratory Co., Ltd. Laser annealing method and laser annealing device
JP2013536996A (ja) * 2010-09-01 2013-09-26 エルジー イノテック カンパニー リミテッド 太陽光発電装置及びその製造方法

Also Published As

Publication number Publication date
JPH0514432B2 (enExample) 1993-02-25

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