JPS6036665A - 金属窒化物による基体表面被覆方法 - Google Patents

金属窒化物による基体表面被覆方法

Info

Publication number
JPS6036665A
JPS6036665A JP7471984A JP7471984A JPS6036665A JP S6036665 A JPS6036665 A JP S6036665A JP 7471984 A JP7471984 A JP 7471984A JP 7471984 A JP7471984 A JP 7471984A JP S6036665 A JPS6036665 A JP S6036665A
Authority
JP
Japan
Prior art keywords
substrate
gas
reaction
coating
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7471984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0118150B2 (enrdf_load_stackoverflow
Inventor
Akio Nishiyama
昭雄 西山
Noribumi Kikuchi
菊池　則文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP7471984A priority Critical patent/JPS6036665A/ja
Publication of JPS6036665A publication Critical patent/JPS6036665A/ja
Publication of JPH0118150B2 publication Critical patent/JPH0118150B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP7471984A 1984-04-13 1984-04-13 金属窒化物による基体表面被覆方法 Granted JPS6036665A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7471984A JPS6036665A (ja) 1984-04-13 1984-04-13 金属窒化物による基体表面被覆方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7471984A JPS6036665A (ja) 1984-04-13 1984-04-13 金属窒化物による基体表面被覆方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP7371478A Division JPS552715A (en) 1978-06-20 1978-06-20 Coating method for base material surface with metallic nitride

Publications (2)

Publication Number Publication Date
JPS6036665A true JPS6036665A (ja) 1985-02-25
JPH0118150B2 JPH0118150B2 (enrdf_load_stackoverflow) 1989-04-04

Family

ID=13555305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7471984A Granted JPS6036665A (ja) 1984-04-13 1984-04-13 金属窒化物による基体表面被覆方法

Country Status (1)

Country Link
JP (1) JPS6036665A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6360282A (ja) * 1986-08-29 1988-03-16 Oriental Eng Kk プラズマ蒸着式基体表面被覆方法
JPS6360285A (ja) * 1986-08-29 1988-03-16 Oriental Eng Kk プラズマ蒸着式基体表面被覆方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4983679A (enrdf_load_stackoverflow) * 1972-12-19 1974-08-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4983679A (enrdf_load_stackoverflow) * 1972-12-19 1974-08-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6360282A (ja) * 1986-08-29 1988-03-16 Oriental Eng Kk プラズマ蒸着式基体表面被覆方法
JPS6360285A (ja) * 1986-08-29 1988-03-16 Oriental Eng Kk プラズマ蒸着式基体表面被覆方法

Also Published As

Publication number Publication date
JPH0118150B2 (enrdf_load_stackoverflow) 1989-04-04

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