JPH0118150B2 - - Google Patents

Info

Publication number
JPH0118150B2
JPH0118150B2 JP59074719A JP7471984A JPH0118150B2 JP H0118150 B2 JPH0118150 B2 JP H0118150B2 JP 59074719 A JP59074719 A JP 59074719A JP 7471984 A JP7471984 A JP 7471984A JP H0118150 B2 JPH0118150 B2 JP H0118150B2
Authority
JP
Japan
Prior art keywords
substrate
gas
reaction
reaction chamber
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59074719A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6036665A (ja
Inventor
Akio Nishama
Noribumi Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP7471984A priority Critical patent/JPS6036665A/ja
Publication of JPS6036665A publication Critical patent/JPS6036665A/ja
Publication of JPH0118150B2 publication Critical patent/JPH0118150B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP7471984A 1984-04-13 1984-04-13 金属窒化物による基体表面被覆方法 Granted JPS6036665A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7471984A JPS6036665A (ja) 1984-04-13 1984-04-13 金属窒化物による基体表面被覆方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7471984A JPS6036665A (ja) 1984-04-13 1984-04-13 金属窒化物による基体表面被覆方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP7371478A Division JPS552715A (en) 1978-06-20 1978-06-20 Coating method for base material surface with metallic nitride

Publications (2)

Publication Number Publication Date
JPS6036665A JPS6036665A (ja) 1985-02-25
JPH0118150B2 true JPH0118150B2 (enrdf_load_stackoverflow) 1989-04-04

Family

ID=13555305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7471984A Granted JPS6036665A (ja) 1984-04-13 1984-04-13 金属窒化物による基体表面被覆方法

Country Status (1)

Country Link
JP (1) JPS6036665A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6360285A (ja) * 1986-08-29 1988-03-16 Oriental Eng Kk プラズマ蒸着式基体表面被覆方法
JPS6360282A (ja) * 1986-08-29 1988-03-16 Oriental Eng Kk プラズマ蒸着式基体表面被覆方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248593B2 (enrdf_load_stackoverflow) * 1972-12-19 1977-12-10

Also Published As

Publication number Publication date
JPS6036665A (ja) 1985-02-25

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